We report comparative measurements of the piezoelectric coefficient of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified.
REFERENCES
1.
A.
Gruverman
, O.
Auciello
, and H.
Tokumoto
, Annu. Rev. Mater. Sci.
28
, 101
(1998
).2.
G.
Zavala
, J. H.
Fendler
, and S.
Trolier-McKinstry
, J. Appl. Phys.
81
, 7480
(1997
).3.
T.
Maruyama
, M.
Saitoh
, I.
Sakai
, T.
Hidaka
, Y.
Yano
, and T.
Noguchi
, Appl. Phys. Lett.
73
, 3524
(1998
).4.
C.
Durkan
, M. E.
Welland
, D. P.
Chu
, and P.
Migliorato
, Phys. Rev. B
60
, 16198
(1999
).5.
J. A.
Christman
, S.-H.
Kim
, H.
Maiwa
, J.-P.
Maria
, B. J.
Rodriguez
, A. I.
Kingon
, and R. J.
Nemanich
, J. Appl. Phys.
87
, 8031
(2000
).6.
C. S.
Ganpule
, V.
Nagarajan
, S. B.
Ogale
, A. L.
Roytburd
, E. D.
Williams
, and R.
Ramesh
, Appl. Phys. Lett.
77
, 3275
(2000
).7.
A.
Lin
, X.
Hong
, V.
Wood
, A. A.
Verevkin
, C. H.
Ahn
, R. A.
McKee
, F. J.
Walker
, and E. D.
Specht
, Appl. Phys. Lett.
78
, 2034
(2001
).8.
M.
Alexe
, C.
Harnagea
, D.
Hesse
, and U.
Gösele
, Appl. Phys. Lett.
79
, 242
(2001
).9.
Y.
Wang
, C.
Ganpule
, B. T.
Liu
, H.
Li
, K.
Mori
, B.
Hill
, M.
Wuttig
, R.
Ramesh
, J.
Finder
, Z.
Yu
, R.
Droopad
, and K.
Eisenbeiser
, Appl. Phys. Lett.
80
, 97
(2002
).10.
O.
Kuffer
, I.
Maggio-Aprile
, J.-M.
Triscone
, O/.
Fischer
, and C.
Renner
, Appl. Phys. Lett.
77
, 1701
(2000
).11.
12.
A.
Bietsch
, M. A.
Schneider
, M. E.
Welland
, and B.
Michel
, J. Vac. Sci. Technol. B
18
, 1160
(2000
);we have tested several different types of as-received conductive probes and the contact resistances between the tips and an Au film were always orders of magnitude higher than that from a good Au-coated tip.
13.
K.-S.
Liu
, Y.-Y.
Huang
, W.-J.
Lin
, T.-L.
Lin
, and I.-N.
Lin
, Integr. Ferroelectr.
30
, 213
(2000
).14.
The details can be found in our previous study of indium–tin–oxide films; see
H.-N.
Lin
, S.-H.
Chen
, G.-Y.
Perng
, and S.-A.
Chen
, J. Appl. Phys.
89
, 3976
(2001
);note that the 1 kΩ output resistance of the D3100 AFM was unaware in the above work.
15.
The DS345 panel reading is for a 50 Ω input and the actual voltage (as described in this work) between the tip and the bottom electrode is doubled.
16.
A linear piezoresponse versus voltage curve due to cantilever–sample capacitive force has been observed with the use of a probe with a spring constant of 0.1 N/m in Ref. 11.
This content is only available via PDF.
© 2003 American Vacuum Society.
2003
American Vacuum Society
You do not currently have access to this content.