We report comparative measurements of the piezoelectric coefficient d33 of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the d33 can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified.

1.
A.
Gruverman
,
O.
Auciello
, and
H.
Tokumoto
,
Annu. Rev. Mater. Sci.
28
,
101
(
1998
).
2.
G.
Zavala
,
J. H.
Fendler
, and
S.
Trolier-McKinstry
,
J. Appl. Phys.
81
,
7480
(
1997
).
3.
T.
Maruyama
,
M.
Saitoh
,
I.
Sakai
,
T.
Hidaka
,
Y.
Yano
, and
T.
Noguchi
,
Appl. Phys. Lett.
73
,
3524
(
1998
).
4.
C.
Durkan
,
M. E.
Welland
,
D. P.
Chu
, and
P.
Migliorato
,
Phys. Rev. B
60
,
16198
(
1999
).
5.
J. A.
Christman
,
S.-H.
Kim
,
H.
Maiwa
,
J.-P.
Maria
,
B. J.
Rodriguez
,
A. I.
Kingon
, and
R. J.
Nemanich
,
J. Appl. Phys.
87
,
8031
(
2000
).
6.
C. S.
Ganpule
,
V.
Nagarajan
,
S. B.
Ogale
,
A. L.
Roytburd
,
E. D.
Williams
, and
R.
Ramesh
,
Appl. Phys. Lett.
77
,
3275
(
2000
).
7.
A.
Lin
,
X.
Hong
,
V.
Wood
,
A. A.
Verevkin
,
C. H.
Ahn
,
R. A.
McKee
,
F. J.
Walker
, and
E. D.
Specht
,
Appl. Phys. Lett.
78
,
2034
(
2001
).
8.
M.
Alexe
,
C.
Harnagea
,
D.
Hesse
, and
U.
Gösele
,
Appl. Phys. Lett.
79
,
242
(
2001
).
9.
Y.
Wang
,
C.
Ganpule
,
B. T.
Liu
,
H.
Li
,
K.
Mori
,
B.
Hill
,
M.
Wuttig
,
R.
Ramesh
,
J.
Finder
,
Z.
Yu
,
R.
Droopad
, and
K.
Eisenbeiser
,
Appl. Phys. Lett.
80
,
97
(
2002
).
10.
O.
Kuffer
,
I.
Maggio-Aprile
,
J.-M.
Triscone
,
O/.
Fischer
, and
C.
Renner
,
Appl. Phys. Lett.
77
,
1701
(
2000
).
11.
S. V.
Kalinin
and
D. A.
Bonnell
,
J. Mater. Res.
17
,
936
(
2002
).
12.
A.
Bietsch
,
M. A.
Schneider
,
M. E.
Welland
, and
B.
Michel
,
J. Vac. Sci. Technol. B
18
,
1160
(
2000
);
we have tested several different types of as-received conductive probes and the contact resistances between the tips and an Au film were always orders of magnitude higher than that from a good Au-coated tip.
13.
K.-S.
Liu
,
Y.-Y.
Huang
,
W.-J.
Lin
,
T.-L.
Lin
, and
I.-N.
Lin
,
Integr. Ferroelectr.
30
,
213
(
2000
).
14.
The details can be found in our previous study of indium–tin–oxide films; see
H.-N.
Lin
,
S.-H.
Chen
,
G.-Y.
Perng
, and
S.-A.
Chen
,
J. Appl. Phys.
89
,
3976
(
2001
);
note that the 1 kΩ output resistance of the D3100 AFM was unaware in the above work.
15.
The DS345 panel reading is for a 50 Ω input and the actual voltage (as described in this work) between the tip and the bottom electrode is doubled.
16.
A linear piezoresponse versus voltage curve due to cantilever–sample capacitive force has been observed with the use of a probe with a spring constant of 0.1 N/m in Ref. 11.
This content is only available via PDF.
You do not currently have access to this content.