Microring optical resonators have important applications in integrated photonic circuits for optical communications. We have developed two methods to fabricate polymer microring devices based on the nanoimprint technique. The first method uses a hard mold to directly imprint a polymer film to form optical waveguides in microring devices. We have demonstrated polymethylmethacrylate, polystyrene, and polycarbonate microring resonators fabricated using this technique. The second method employs a template filling approach, which allows a thicker waveguide to be fabricated, as well as polymers that are difficult to directly imprint. Optical filtering behavior of a microring resonator is demonstrated with a Q factor as high as 5800. The technique developed in this work could offer a cost-effective method to fabricate integrated photonic circuits based on polymer microring resonators.
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November 2002
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
28-31 May 2002
Anaheim, California (USA)
Research Article|
December 09 2002
Polymer microring resonators fabricated by nanoimprint technique
Chung-yen Chao;
Chung-yen Chao
Solid-State Electronics Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109-2122
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L. Jay Guo
L. Jay Guo
Solid-State Electronics Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109-2122
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J. Vac. Sci. Technol. B 20, 2862–2866 (2002)
Article history
Received:
May 28 2002
Accepted:
September 23 2002
Citation
Chung-yen Chao, L. Jay Guo; Polymer microring resonators fabricated by nanoimprint technique. J. Vac. Sci. Technol. B 1 November 2002; 20 (6): 2862–2866. https://doi.org/10.1116/1.1521729
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