To meet the increased demand of porosity evaluation of low-k materials, the ultra-high-sensitive Kr gas adsorption technique was developed. A homemade differential-type adsorption apparatus enables us to detect Kr adsorption as small as 2 μg. This corresponds to the sensitivity improvement by four orders of magnitude compared to the conventional nitrogen adsorption method. Established analytical procedures for the pore-size distribution, Brunauer–Emmett–Teller theory, Kelvin equation, and Dollimore–Heal method, are applied to Kr adsorption. The results were calibrated with one obtained from nitrogen adsorption using standard samples. Applicability of the Kr adsorption method to a low-k thin-film sample was demonstrated.
REFERENCES
1.
F. N.
Dultsev
and M. R.
Baklanov
, Electrochem. Solid-State Lett.
2
, 192
(1999
).2.
M. P. Pectov, M. H. Weber, K. G. Lynn, K. P. Rodbell, W. Volksen, and R. D. Miller, Abstract of the 2001 MRS Spring Meeting, San Francisco, 16 April 2001, p. 240.
3.
C. M. Flannery, C. Murray, I. Streiter, and S. E. Schulz, Abstract of the 2001 MRS Spring Meeting, San Francisco, 16 April 2001, p. 240.
4.
K. Omote and S. Kawamura, Abstract of the 2001 MRS Spring Meeting, San Francisco, 16 April 2001, p. 241.
5.
F. Rouquerol, J. Rouquerol, and K. Sing, Adsorption by Powders and Porous Solids (Academic, London, 1999), p. 191.
6.
7.
8.
9.
10.
K.
Inagaki
, Y.
Fukushima
, and K.
Kuroda
, Stud. Surf. Sci. Catal.
84
, 125
(1994
).11.
S.
Brunauer
, P. H.
Emmett
, and E.
Teller
, J. Am. Chem. Soc.
60
, 309
(1938
).12.
F. Rouquerol, J. Rouquerol, and K. Sing, Adsorption by Powders and Porous Solids (Academic, London, 1999), p. 193.
13.
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