Films of pure high-quality multiwall carbon nanotubes are grown by laser-assisted thermal chemical vapor deposition in a cold wall reactor. A laser is used to locally heat a substrate on which nanotubes are grown, employing the catalytic activity of iron nanoparticles. Two kinds of experiments are reported: In a two-step mode, catalytic iron particles and solid carbon are deposited separately, leading to the formation of homogeneous films of nonaligned pure multiwall nanotubes (MWNTs). The role of gas phase heating was investigated by the addition of a sensitizing molecule that absorbs the laser radiation. It is found that large-volume gas phase heating is not needed for the synthesis of high-quality nanotube films. Focused laser radiation allows growth of locally defined nanotube films. In a second set of experiments, iron and carbon are deposited simultaneously. Films of vertically aligned MWNTs of extremely high packing density were produced in this mode under very lean hydrocarbon supply conditions.
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May 2002
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
June 05 2002
Carbon nanotube films grown by laser-assisted chemical vapor deposition
F. Rohmund;
F. Rohmund
Department of Experimental Physics, Gothenburg University and Chalmers University of Technology, SE-41296 Gothenburg, Sweden
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R.-E. Morjan;
R.-E. Morjan
Department of Experimental Physics, Gothenburg University and Chalmers University of Technology, SE-41296 Gothenburg, Sweden
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G. Ledoux;
G. Ledoux
Max-Planck Institut für Strömungsforschung, Bunsenstrasse 10, D-37073 Göttingen, Germany
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F. Huisken;
F. Huisken
Max-Planck Institut für Strömungsforschung, Bunsenstrasse 10, D-37073 Göttingen, Germany
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R. Alexandrescu
R. Alexandrescu
National Institute for Lasers, Plasma and Radiation Physics, P.O. Box MG-36, R-76900 Bucharest, Romania
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J. Vac. Sci. Technol. B 20, 802–811 (2002)
Article history
Received:
August 20 2001
Accepted:
February 18 2002
Citation
F. Rohmund, R.-E. Morjan, G. Ledoux, F. Huisken, R. Alexandrescu; Carbon nanotube films grown by laser-assisted chemical vapor deposition. J. Vac. Sci. Technol. B 1 May 2002; 20 (3): 802–811. https://doi.org/10.1116/1.1469013
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