Electronic devices can be significantly affected in their behavior by the properties of the surfaces and interfaces which delineate their structure. Unfortunately, such surface effects are often degrading, acting to reduce the performance of the device below that to be expected in the ideal case. This paper will attempt to review these processes and relate them to what is known about the properties and structures of surfaces. In particular those deficiencies which most severely impact device performance will be identified, and suggestions made as to where improvements in understanding of surface control might have the greatest impact on resulting device development.
Topics
Electronic devices
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© 1984 American Vacuum Society.
1984
American Vacuum Society
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