We have used reflectance-difference (RD) spectroscopy (UV-visible energy range) during the growth and doping process of CdTe(001) and ZnTe(001) layers by molecular beam epitaxy (MBE). The MBE chamber is equipped with an electron cyclotron resonance cell to generate N plasma and a effusion cell for the p- and n-type doping, respectively. After the first stages of the growth and prior doping, different spectral features were found as we changed from Cd or Zn to Te stabilized conditions due to surface anisotropy. However, as the doping of the growing layer further increased, the RD spectra of both surfaces showed resonances around and interband transitions due to the linear electro optic (LEO) effect. Although RD spectra exhibit similar line shapes dominated by surface transitions, differences due to the LEO can be isolated. Different Fermi level pinning mechanisms are proposed for both materials because the RD measurements of the LEO strongly depend on surface termination.
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July 2000
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Papers from the 27th conference on the physics and chemistry of semiductor interfaces
16-20 January 2000
Salt Lake City, Utah (USA)
Research Article|
July 01 2000
In situ reflectance-difference spectroscopy of doped CdTe and ZnTe grown by molecular beam epitaxy
R. E. Balderas-Navarro;
R. E. Balderas-Navarro
Johannes Kepler Universität Linz, Institut für Halbleiterphysik und Festkörperphysik, Altenbergerstr. 69, A-4040 Linz, Austria
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K. Hingerl;
K. Hingerl
Johannes Kepler Universität Linz, Institut für Halbleiterphysik und Festkörperphysik, Altenbergerstr. 69, A-4040 Linz, Austria and Profactor GmbH, Wehrgrabengasse 5, A-4400 Steyr, Austria
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W. Hilber;
W. Hilber
Johannes Kepler Universität Linz, Institut für Halbleiterphysik und Festkörperphysik, Altenbergerstr. 69, A-4040 Linz, Austria
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D. Stifter;
D. Stifter
Profactor GmbH, Wehrgrabengasse 5, A-4400 Steyr, Austria
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A. Bonanni;
A. Bonanni
Johannes Kepler Universität Linz, Institut für Halbleiterphysik und Festkörperphysik, Altenbergerstr. 69, A-4040 Linz, Austria
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H. Sitter
H. Sitter
Johannes Kepler Universität Linz, Institut für Halbleiterphysik und Festkörperphysik, Altenbergerstr. 69, A-4040 Linz, Austria
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J. Vac. Sci. Technol. B 18, 2224–2228 (2000)
Article history
Received:
January 17 2000
Accepted:
May 25 2000
Citation
R. E. Balderas-Navarro, K. Hingerl, W. Hilber, D. Stifter, A. Bonanni, H. Sitter; In situ reflectance-difference spectroscopy of doped CdTe and ZnTe grown by molecular beam epitaxy. J. Vac. Sci. Technol. B 1 July 2000; 18 (4): 2224–2228. https://doi.org/10.1116/1.1306282
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