Thermal effects in molybdenum tips with and without diamond coatings are analyzed. An attempt is made to identify “intrinsic” mechanisms that might trigger catastrophic vacuum breakdown. A new theoretical treatment is employed to study the thermal response of tip emitters which takes into account the correlative effect between field emission and its resultant temperature rise at the tip. In both uncoated and chemically vapor deposited diamond coated Mo tip emission regimes, the location of the hot spot is found to be at the tip apex. It is also shown that higher emission current densities can be obtained from a coated tip before the melting temperature of Mo is reached compared to that of an uncoated tip for the same geometry and dimension.
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March 1999
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Papers from the 11th international vacuum microelectronics conference
19-23 July 1998
Asheville, North Carolina (USA)
Research Article|
March 01 1999
Theoretical study of thermal instability of Mo tips with and without diamond coatings
Z. X. Yu;
Z. X. Yu
Department of Physics, Zhongshan University, Guangzhou 510275, People’s Republic of China
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S. S. Wu;
S. S. Wu
Department of Physics, Zhongshan University, Guangzhou 510275, People’s Republic of China
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N. S. Xu
N. S. Xu
Department of Physics, Zhongshan University, Guangzhou 510275, People’s Republic of China
State Key Laboratory for Surface Physics, Chinese Academy of Sciences, People’s Republic of China
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Z. X. Yu
S. S. Wu
N. S. Xu
,
Department of Physics, Zhongshan University, Guangzhou 510275, People’s Republic of China
J. Vac. Sci. Technol. B 17, 562–566 (1999)
Article history
Received:
July 19 1998
Accepted:
January 18 1999
Citation
Z. X. Yu, S. S. Wu, N. S. Xu; Theoretical study of thermal instability of Mo tips with and without diamond coatings. J. Vac. Sci. Technol. B 1 March 1999; 17 (2): 562–566. https://doi.org/10.1116/1.590594
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