Micropatterned diamond pyramidal tips have been demonstrated to have high emission current. This article presents in great detail the physical characterizations that have proceeded to characterize the topology, morphology, and microstructure of these diamond microtips using transmission electron microscopy (TEM), atomic force microscopy (AFM), scanning tunneling microscopy (STM), and Raman spectroscopy. The results show that the diamond microtips are indeed a polycrystalline diamond structure as evidenced by Raman spectroscopy and diffraction analysis of the TEM. AFM and STM results provide detail information as to the surface and tip shape of the diamond emitters. AFM/STM observations suggest a nucleation and growth process whereby the matter in which chemical vapor deposition diamond nucleates on the planar top surface of the tip substrate is distinct and different from the way the diamond grows in the cavity “mold.” Likewise, the TEM results contrast the diamond microstructure in the field area with that of the tip where distinct differences are observed.
Skip Nav Destination
,
,
,
,
,
,
Article navigation
March 1997
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The 9th international vacuum microelectronics conference
7-12 Jul 1996
St.Petersburg (Russia)
Research Article|
March 01 1997
Physical characterization of diamond pyramidal microtip emitters
W. P. Kang;
W. P. Kang
Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235
Search for other works by this author on:
J. L. Davidson;
J. L. Davidson
Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235
Search for other works by this author on:
M. A. George;
M. A. George
Fisk University, Nashville, Tennessee 37208
Search for other works by this author on:
I. Milosavljevic;
I. Milosavljevic
Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235
Search for other works by this author on:
Q. Li;
Q. Li
East China Normal University, Shanghai, People's Republic of China
Search for other works by this author on:
J. F. Xu;
J. F. Xu
East China Normal University, Shanghai, People's Republic of China
Search for other works by this author on:
D. V. Kerns
D. V. Kerns
Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235
Search for other works by this author on:
W. P. Kang
J. L. Davidson
M. A. George
I. Milosavljevic
Q. Li
J. F. Xu
D. V. Kerns
Department of Electrical and Computer Engineering, Vanderbilt University, Nashville, Tennessee 37235
J. Vac. Sci. Technol. B 15, 460–463 (1997)
Article history
Received:
August 25 1996
Accepted:
January 20 1997
Citation
W. P. Kang, J. L. Davidson, M. A. George, I. Milosavljevic, Q. Li, J. F. Xu, D. V. Kerns; Physical characterization of diamond pyramidal microtip emitters. J. Vac. Sci. Technol. B 1 March 1997; 15 (2): 460–463. https://doi.org/10.1116/1.589599
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Exploring SiC CVD growth parameters compatible with remote epitaxy
Daniel J. Pennachio, Jenifer R. Hajzus, et al.
Related Content
Flexible electron field emitters fabricated using conducting ultrananocrystalline diamond pyramidal microtips on polynorbornene films
Appl. Phys. Lett. (January 2014)
Micropatterned polycrystalline diamond field emitter vacuum diode arrays
J. Vac. Sci. Technol. B (May 1996)
Field emission arrays by silicon micromachining
J. Vac. Sci. Technol. B (March 2000)
Atom-by-atom analysis of microtip emitter surfaces by the scanning atom probe
J. Vac. Sci. Technol. B (March 1999)
Advanced nanodiamond emitter with pyramidal tip-on-pole structure for emission self-regulation
J. Vac. Sci. Technol. B (February 2012)