We present cross‐sectional scanning tunneling microscopy (STM) studies of the atomic‐scale structural and electronic properties of InAs/InAs1−xSbx superlattices grown by modulated molecular‐beam epitaxy. In this technique the Group V composition is controlled by rapid modulation of the Group V beams rather than adjustment of the Group V flux ratios. A superlattice sample was grown at 475 °C consisting of 52 Å InAs1−xSbx alternating with 172 Å InAs for 30 periods on a GaSb (001) substrate. The InAs1−xSbx alloy layers consisted nominally of 7.8 Å InAs alternating with 5.2 Å InSb for four periods. X‐ray diffraction was used to determine an average composition of InAs0.76Sb0.24 for the alloy layers. Constant‐current STM images of the superlattice exhibit clear, electronically induced contrast between the InAs layers and InAs0.76Sb0.24 layers, and also reveal ordering within the InAs0.76Sb0.24 layers. Interfaces between the InAs layers and the InAs0.76Sb0.24 layers appear sharp, though there is evidence of more atomic intermixing at the InAs‐on‐InAs0.76Sb 0.24 interface. Significant variation in composition within individual InAs0.76Sb 0.24 alloy layers and apparent Sb incorporation from the InAs0.76Sb0.24 layers into the surrounding InAs layers are also observed.
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July 1996
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The 23rd annual conference on physics and chemistry of semiconductor interfaces
21−25 Jan 1996
La Jolla, California (USA)
Research Article|
July 01 1996
Atomic‐scale structure of InAs/InAs1−xSbx superlattices grown by modulated molecular beam epitaxy Available to Purchase
A. Y. Lew;
A. Y. Lew
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, California 92093
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E. T. Yu;
E. T. Yu
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, California 92093
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Y. H. Zhang
Y. H. Zhang
Hughes Research Laboratories, Malibu, California 90265
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A. Y. Lew
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, California 92093
E. T. Yu
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, California 92093
Y. H. Zhang
Hughes Research Laboratories, Malibu, California 90265
J. Vac. Sci. Technol. B 14, 2940–2943 (1996)
Article history
Received:
January 22 1996
Accepted:
March 16 1996
Citation
A. Y. Lew, E. T. Yu, Y. H. Zhang; Atomic‐scale structure of InAs/InAs1−xSbx superlattices grown by modulated molecular beam epitaxy. J. Vac. Sci. Technol. B 1 July 1996; 14 (4): 2940–2943. https://doi.org/10.1116/1.588938
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