We report on the growth and subsequent work function measurements of diamond film covered surfaces. Diamond films were grown via a thermal chemical vapor deposition technique. The feed gas mixture used was 1% CH4/99% H2. Raman spectroscopy was used to verify diamond growth. Electron emission was investigated and work function values obtained in field emission as well as thermionic emission modes. However, we primarily report on a unique way to ascertain the absolute work function of diamond surfaces using the field emission retarding potential technique. This experimental method readily lends itself to these types of investigations where values can be determined apart from thermal or field effects. This method gives a diamond surface work function of 4.15±0.05 eV.
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May 1996
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The eighth international vacuum microelectronics conference
31 Jul − 3 Aug 1995
Portland, Oregon (USA)
Research Article|
May 01 1996
Work function measurements of diamond film surfaces
W. A. Mackie;
W. A. Mackie
Linfield Research Institute, McMinnville, Oregon 97128‐6894
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Jason E. Plumlee;
Jason E. Plumlee
Linfield Research Institute, McMinnville, Oregon 97128‐6894
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A. E. Bell
A. E. Bell
Oregon Graduate Institute, Beaverton, Oregon 97006‐1029
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J. Vac. Sci. Technol. B 14, 2041–2045 (1996)
Article history
Received:
December 29 1995
Accepted:
February 20 1996
Citation
W. A. Mackie, Jason E. Plumlee, A. E. Bell; Work function measurements of diamond film surfaces. J. Vac. Sci. Technol. B 1 May 1996; 14 (3): 2041–2045. https://doi.org/10.1116/1.588982
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