Most samples of Ga0.5In0.5P grown by metalorganic chemical vapor deposition (MOCVD) on (001)‐like surfaces are partially ordered and exhibit distinctive reflectance difference spectral (RDS) features associated with the anisotropic properties of the ordered bulk structure. It is known that the ordering is not a ground‐state property of the bulk but is surface‐induced during growth. On the other hand, Ga0.5In0.5P grown by liquid‐phase epitaxy (LPE) is completely disordered, and it has been shown that its RD spectrum is essentially featureless. In this article, we present a study of the effects of annealing (in a PH3/H2 atmosphere) on LPE‐grown Ga0.5In0.5P using ex situ and in situ RDS. The annealing temperatures and times used in this study (650°C and tens of minutes) have virtually no effect on the bulk optical or structural properties of MOCVD‐grown Ga0.5In0.5P. For LPE‐grown Ga0.5In0.5P, we find that annealing induces bulk‐like RDS features at both E0 and E1 with line shapes similar to those observed for MOCVD‐grown ordered Ga0.5In0.5P. These bulk‐like spectral features are, however, due to near‐surface reconstruction of Ga and In because they are effectively quenched by exposure to air. Also, the E0 feature becomes sharper and both the E0 and the E1 features red‐shift as the annealing process is prolonged. This indicates that this reconstruction is kinetically limited, presumably by the slow interdiffusion of Ga and In necessary to achieve the ordered bulk‐like structure.
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July 1995
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The 22nd Annual Conference on the Physics and Chemistry of Semiconductor Interfaces
8−12 Jan 1995
Scottsdale, Arizona (USA)
Research Article|
July 01 1995
Annealing‐induced near‐surface ordering in disordered Ga0.5In0.5P
J. S. Luo;
J. S. Luo
National Renewable Energy Laboratory, Golden, Colorado 80401
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J. M. Olson;
J. M. Olson
National Renewable Energy Laboratory, Golden, Colorado 80401
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Meng‐Chyi Wu
Meng‐Chyi Wu
National Tsing Hua University, Hsinchu, Taiwan 30043, Republic of China
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J. Vac. Sci. Technol. B 13, 1755–1759 (1995)
Article history
Received:
January 30 1995
Accepted:
March 25 1995
Citation
J. S. Luo, J. M. Olson, Meng‐Chyi Wu; Annealing‐induced near‐surface ordering in disordered Ga0.5In0.5P. J. Vac. Sci. Technol. B 1 July 1995; 13 (4): 1755–1759. https://doi.org/10.1116/1.587808
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