A microtip field‐emission electron microgun of a few cm3 has been developed for a novel type of semiconductor laser. The electron source is provided by an array of a field emissive microtips cathode each of 1.4 μm base diameter. The source current–voltage characteristic has been determined and its geometrical characteristics have been measured by collecting electrons on a phosphor screen in a region of constant electric field. We have observed that about 100 μA are typically emitted for gate‐cathode voltage (VGC) of 80 V with a half‐aperture angle of 28°. Beam focusing is then realized by two electrostatic lenses: a ‘‘thin hole lens’’ and a quadrupole lens. Using a cathode a 70×500 μm2 rectangular spot on a 10 kV biased anode has been obtained which yields a power density of about 3 kW/cm2. Less than 20% of the total electron beam (current) is lost in the electrostatic optics.
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March 1995
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
7th International Vacuum Microelectronics Conference
4−7 Jul 1994
Grenoble, France
Research Article|
March 01 1995
Investigation of an electron‐beam microgun using a microtips array Available to Purchase
C. Constancias;
C. Constancias
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
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D. Herve;
D. Herve
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
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R. Accomo;
R. Accomo
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
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E. Molva
E. Molva
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
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C. Constancias
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
D. Herve
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
R. Accomo
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
E. Molva
LETI‐CEA‐Technologies Avancées, DOPT/SMDO, CENG 17, rue des Martyrs, 38054 Grenoble Cédex 09, France
J. Vac. Sci. Technol. B 13, 611–615 (1995)
Article history
Received:
July 07 1994
Accepted:
December 05 1994
Citation
C. Constancias, D. Herve, R. Accomo, E. Molva; Investigation of an electron‐beam microgun using a microtips array. J. Vac. Sci. Technol. B 1 March 1995; 13 (2): 611–615. https://doi.org/10.1116/1.587925
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