A lateral resistive layer which stabilizes field emission arrays also makes these devices robust. Initial activation of a microtip array after exposure to air and without bakeout can be accomplished with the sudden application of high voltage at room temperature, without fear of tip destruction. Analysis of initial activation curves of current versus time are made at various constant voltages in 11 tests. Reversible degradation and recovery of cathode emission is observed when contaminating anodes containing ITO and phosphor are replaced by a stainless steel anode. The major effect in the activation procedure is field induced desorption of a high work function adsorbate from the cathode. Analysis of the various I–V curves taken during the activation process at 55 V yields an equivalent series limiting resistance and the fraction of emitting microtips, which is 4% for a contaminating unbaked ITO anode and 10% for a stainless steel anode.
Skip Nav Destination
Article navigation
March 1995
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
7th International Vacuum Microelectronics Conference
4−7 Jul 1994
Grenoble, France
Research Article|
March 01 1995
Field emission from microtip test arrays using resistor stabilization
J. D. Levine;
J. D. Levine
Texas Instruments, Dallas, Texas 75243
Search for other works by this author on:
R. Meyer;
R. Meyer
LETI‐CEA Technologies Avanceés CENG, 38054 Grenoble, France
Search for other works by this author on:
R. Baptist;
R. Baptist
LETI‐CEA Technologies Avanceés CENG, 38054 Grenoble, France
Search for other works by this author on:
T. E. Felter;
T. E. Felter
Sandia Laboratories, Livermore, California 94551‐0969
Search for other works by this author on:
A. A. Talin
A. A. Talin
Sandia Laboratories, Livermore, California 94551‐0969
Search for other works by this author on:
J. Vac. Sci. Technol. B 13, 474–477 (1995)
Article history
Received:
July 07 1994
Accepted:
November 21 1994
Citation
J. D. Levine, R. Meyer, R. Baptist, T. E. Felter, A. A. Talin; Field emission from microtip test arrays using resistor stabilization. J. Vac. Sci. Technol. B 1 March 1995; 13 (2): 474–477. https://doi.org/10.1116/1.588336
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Machine learning driven measurement of high-aspect-ratio nanostructures using Mueller matrix spectroscopic ellipsometry
Shiva Mudide, Nick Keller, et al.
Related Content
Benefits of the lateral resistor in a field effect display
J. Vac. Sci. Technol. B (May 1996)
Investigation of an electron‐beam microgun using a microtips array
J. Vac. Sci. Technol. B (March 1995)
Folding field emission from GaN onto polymer microtip array by femtosecond pulsed laser deposition
Appl. Phys. Lett. (August 2006)
Recent development of diamond microtip field emitter cathodes and devices
J. Vac. Sci. Technol. B (May 2001)
Emission observation of a microtip cathode array with an electrostatic-lens projector: Statistical approach
J. Vac. Sci. Technol. B (March 1998)