A novel atomic force microscope (AFM) having a tip on whose surface sensor molecules were immobilized has been developed for chemical sensing. The AFM tips chemically modified with octadecyltrichlorosilane [CH3(CH)17SiCl3; OTS] or perfluorotrichlorosilane [CF3(CF2)7C2H4SiCl3; FS‐17] were more sensitive than the unmodified tips in detecting adhesive force on some monolayers on the silicon substrates. Using OTS modified tip, the hydrocarbon chain length of chemically adsorbed alkyltrichlorosilanes [CH3(CH)nSiCl3, n=1,8,13,17] on the silicon substrates was discriminated in ethanol environment. The origin of the interaction between the chemically modified tips and the sample surfaces, which depend on the monolayers and environmental liquids where the interactions were measured, has been speculated to arise from the entwining of carbon chains in monolayers on the tip and the sample.
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May 1994
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The 1993 international conference on scanning tunneling microscopy
9−13 Aug 1993
Beijing, China
Research Article|
May 01 1994
Atomic force microscope for chemical sensing
Tohru Nakagawa;
Tohru Nakagawa
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., 3‐4 Hikaridai, Seika‐cho, Soraku‐gun, Kyoto 619‐02, Japan
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Kazufumi Ogawa;
Kazufumi Ogawa
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., 3‐4 Hikaridai, Seika‐cho, Soraku‐gun, Kyoto 619‐02, Japan
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Toshimitsu Kurumizawa
Toshimitsu Kurumizawa
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., 3‐4 Hikaridai, Seika‐cho, Soraku‐gun, Kyoto 619‐02, Japan
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J. Vac. Sci. Technol. B 12, 2215–2218 (1994)
Article history
Received:
August 09 1993
Accepted:
October 18 1993
Citation
Tohru Nakagawa, Kazufumi Ogawa, Toshimitsu Kurumizawa; Atomic force microscope for chemical sensing. J. Vac. Sci. Technol. B 1 May 1994; 12 (3): 2215–2218. https://doi.org/10.1116/1.587744
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