Nanometer characterization of single point diamond‐turned mirrors on the micrometer and submicrometer scale

Single point diamond turning (SPDT) is one of the nanometer machining methods. We deal with the nanometer characterization of diamond‐turned mirrors on the micrometer and submicrometer scale with our three‐dimensional roughness measuring system based on scanning tunneling microscopy. We have studied the results of amplitude spectral density functions for these surfaces. Finally, we have calculated the total integrated scattering as a function of incident light wavelength λ and root mean square surface roughness σ and the diffracted angle θ_d as a function of the λ and the surface spatial wavelength λ_sp. All these measurement results are the basis for improving the SPDT surface quality.