GaInAs and AlInAs structures have been grown on on‐axis and misoriented [4°‐(111) In‐plane] (110) InP substrates. In general, the growth on the on‐axis substrates shows a high density of defects; while the surface morphology using misoriented substrates is smooth. A smooth morphology is obtained on on‐axis (110) InP, however, with a low substrate temperature and high V/III ratio. The photoluminescence properties of the individual alloys grown on (110) show high intensities, similar to that which can be obtained on (100) substrates, but the peaks are significantly broadened and shifted in energy. The interface quality of the GaInAs–AlInAs (110) heterojunction, inferred from the linewidths of quantum well emissions, is improved by growing at higher temperature.
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May 1993
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Proceedings of the 12th molecular−beam epitaxy workshop
12−14 Oct 1992
Ottawa (Canada)
Research Article|
May 01 1993
Growth and properties of AlInAs–GaInAs alloys and quantum wells on (110) InP
A. S. Brown;
A. S. Brown
Hughes Research Laboratories, Malibu, California 90265
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R. A. Metzger;
R. A. Metzger
Hughes Research Laboratories, Malibu, California 90265
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J. A. Henige
J. A. Henige
Hughes Research Laboratories, Malibu, California 90265
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J. Vac. Sci. Technol. B 11, 817–819 (1993)
Article history
Received:
October 12 1992
Accepted:
December 09 1992
Citation
A. S. Brown, R. A. Metzger, J. A. Henige; Growth and properties of AlInAs–GaInAs alloys and quantum wells on (110) InP. J. Vac. Sci. Technol. B 1 May 1993; 11 (3): 817–819. https://doi.org/10.1116/1.586753
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