HgTe contacts were fabricated on p‐HgCdTe and compared to electroless Au contacts. Both metals resulted in contacts to multiwire infrared HgCdTe which were nonohmic as deposited, but became ohmic with a specific contact resistance below 0.1 Ω cm2 after a 150 °C anneal. Electroless Au contacts became ohmic at a lower anneal temperature, usually 100 °C, while HgTe contacts required anneal temperatures in the 140–150 °C range. However, HgTe contacts are much more reproducible because they adhere well to HgCdTe. Precontact surface preparations which did not result in an oxidized HgCdTe surface produced the lowest HgTe contact resistances. Exposure of the HgTe surface to a short ion mill caused type conversion of the HgCdTe and therefore highly resistive and rectifying contacts.
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July 1992
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
July 01 1992
HgTe contacts to p‐HgCdTe
Arthur M. Turner
Arthur M. Turner
Texas Instruments, Central Research Laboratories, Dallas, Texas, 75265
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Arthur M. Turner
Texas Instruments, Central Research Laboratories, Dallas, Texas, 75265
J. Vac. Sci. Technol. B 10, 1534–1537 (1992)
Article history
Received:
October 10 1991
Accepted:
February 12 1992
Citation
Arthur M. Turner; HgTe contacts to p‐HgCdTe. J. Vac. Sci. Technol. B 1 July 1992; 10 (4): 1534–1537. https://doi.org/10.1116/1.586244
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