Long‐wavelength infrared molecular‐beam epitaxial (MBE) HgCdTe films with dislocation densities as low as 2.3 × 105 cm−2 on (211) GaAs and Si substrates have been obtained by postgrowth thermal annealing and thermal cycle annealing processes (300–490 °C). Experiments show that metalorganic chemical vapor deposition (MOCVD) HgCdTe epilayers require a higher thermal annealing temperature than MBE material and the difference in dislocation reduction between MBE and MOCVD HgCdTe materials is caused by dislocation movement under high‐temperature and thermal stress conditions. The CdTe buffer layer has been observed to play a significant role for the dislocation reduction in the HgCdTe epilayer grown on GaAs or Si alternative substrates. To study the role of dislocations on MBE HgCdTe/GaAs, systematic measurements of the minority carrier lifetime of MBE HgCdTe grown on both CdZnTe and GaAs substrates were carried out. A strong correlation between minority carrier lifetime and dislocation density is observed.
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July 1992
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
July 01 1992
Dislocation reduction in HgCdTe on GaAs and Si
S. H. Shin;
S. H. Shin
Rockwell International Science Center, Thousand Oaks, California 91360
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J. M. Arias;
J. M. Arias
Rockwell International Science Center, Thousand Oaks, California 91360
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D. D. Edwall;
D. D. Edwall
Rockwell International Science Center, Thousand Oaks, California 91360
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M. Zandian;
M. Zandian
Rockwell International Science Center, Thousand Oaks, California 91360
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J. G. Pasko;
J. G. Pasko
Rockwell International Science Center, Thousand Oaks, California 91360
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R. E. DeWames
R. E. DeWames
Rockwell International Science Center, Thousand Oaks, California 91360
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S. H. Shin
J. M. Arias
D. D. Edwall
M. Zandian
J. G. Pasko
R. E. DeWames
Rockwell International Science Center, Thousand Oaks, California 91360
J. Vac. Sci. Technol. B 10, 1492–1498 (1992)
Article history
Received:
October 08 1991
Accepted:
April 02 1992
Citation
S. H. Shin, J. M. Arias, D. D. Edwall, M. Zandian, J. G. Pasko, R. E. DeWames; Dislocation reduction in HgCdTe on GaAs and Si. J. Vac. Sci. Technol. B 1 July 1992; 10 (4): 1492–1498. https://doi.org/10.1116/1.586277
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