Skip to Main Content
Skip Nav Destination
Issue Cover
Current Issue
Volume 42,
Issue 1,
January 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

Read more about the journal

Editor's Picks
Research Article
Zengqian Ding, Boyi Zhou et al.
The presence of amorphous oxide layers can significantly affect the coherent time of superconducting qubits due to their high dielectric loss. Typically, the surface oxides of superconductor films ...
Research Article
Yixuan Shen, Rui Q. Yang et al.
We report the demonstration of continuous-wave interband cascade lasers (ICLs) near 13 μm. The attained lasing wavelength of 13.2 μm at 92 K stands as the longest cw emission wavelength ever reported ...
Research Article
Qingyue Li, Claire Deeb et al.
We report the results of a study on the inductively coupled plasma (ICP) etching of InP at room temperature using Cl2 mixtures (Cl2/N2/H2). The impact of different process parameters, including the ...
Most Recent
Research Article
Firat Yasar, Richard E. Muller et al.
This paper presents a time- and cost-effective method for the large-area fabrication of photonic crystals with nanometer-scale features on the GaN material. The proposed technique utilizes e-beam ...
Research Article
Zengqian Ding, Boyi Zhou et al.
The presence of amorphous oxide layers can significantly affect the coherent time of superconducting qubits due to their high dielectric loss. Typically, the surface oxides of superconductor films ...
Research Article
Philipp Buchner, Matthias Hausladen et al.
We investigate the influence of the geometry and doping level on the performance of n-type silicon nanowire field emitters on silicon pillar structures. Therefore, multiple cathodes with 50 by 50 ...

Become an AVS member!

AVS Members receive access to select content, product discounts, and more by logging into MyAVS.

Close Modal

or Create an Account

Close Modal
Close Modal