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Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.
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Research Article
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November 27 2024
Mattias Hausladen, Andreas Schels et al.
A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron ...
Research Article
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November 07 2024
Shiyang Li, Shuhu Huan et al.
Submicrometer double-grooved gratings feature unique optical properties and diverse potential applications, most of which have been fabricated by electron beam lithography up till now. On the other ...
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November 04 2024
Yasser Pordeli, Céline Steenge et al.
Three-dimensional (3D) stacking of nano-devices is an effective method for increasing areal density, especially as downscaling of lateral device dimensions becomes impractical. This stacking is ...
Editor's Picks
Research Article
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December 12 2024
Chen Tang, Toshiaki Tanaka et al.
The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...
Research Article
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December 10 2024
Jiacheng Ye, Yunxiang Wang et al.
To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for 3D optical metasurface. 3D nanoimprint ...
Research Article
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December 09 2024
Joshua Perozek, Tomás Palacios
Modern power devices rely on complex, three-dimensional, vertical designs to increase their power density, ease their thermal management, and improve their reliability. However, fabrication ...
Most Recent
Research Article
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December 12 2024
Chen Tang, Toshiaki Tanaka et al.
The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...
Research Article
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December 11 2024
Yun Jiang (江韵), Graham S. Wood et al.
A graphene-based capacitive monolithic microphone with optimized air gap thickness and damping has been designed, fabricated, and characterized. A bilayer poly(methylmethacrylate)/graphene membrane ...
Research Article
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December 10 2024
Jiacheng Ye, Yunxiang Wang et al.
To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for 3D optical metasurface. 3D nanoimprint ...
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
A. S. Stodolna, T. W. Mechielsen, et al.
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning
Yasser Pordeli, Céline Steenge, et al.
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