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Current Issue
Volume 42,
Issue 3,
May 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
Lei Hu, Yu-Chiao Huang et al.
In this study, an electrode based on transition metal oxide molybdenum trioxide (MoO3) was fabricated and applied to electrochemical biosensing for glucose. In the process of making electrodes with ...
Research Article
Hryhorii Stanchu, Grey Abernathy et al.
The development of all-group IV GeSn materials on Si substrates is of interest for monolithic midwave infrared (MWIR) silicon photonics. Despite their great potential, the growth of high crystalline ...
Research Article
Phoebe M. Pearce, Sheau Wei Ong et al.
Si x Ge 1 − x − y Sn y ternary alloys are a candidate material system for use in solar cells and other optoelectronic devices. We report on the ...
Most Recent
Research Article
Zecheng Gao, Wuyang Ji et al.
A type of nanocavity-shaped metasurface for intensively absorbing infrared (IR) radiation in a wide wavelength range of 3–14 μm, which is mainly based on spatial magnetic plasmon excitation and ...
Research Article
D. Karaoulanis, J. P. Xanthakis
We have examined the transition from the thermionic to the space-charge limited current (SCLC) regime under strong Schottky effects as the electric field increases. We have used the methodology of ...
Research Article
Naoki Takano, Hiromasa Niinomi et al.
To investigate the formation mechanism of wrinkle structures in imprinted resist masks generated by oxygen reactive ion etching (O2 RIE), we compared UV/ozone exposure (soft trimming) and O2 RIE ...

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