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Current Issue
Volume 42,
Issue 2,
March 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
O. Spitz, Y. B. Shuai et al.
Nonlinear dynamics at mid-infrared wavelength is of interest for various applications but has been mainly limited to quantum cascade lasers so far. In this article, we show that interband cascade ...
Research Article
Michael J. Johnson, Gabriel H. Brown et al.
This study investigates the interaction between two counterpropagating atmospheric pressure plasma jets when their respective streamer ignition times are varied by introducing a phase difference ...
Research Article
Md Abu Jafar Rasel, Di Zhang et al.
High-power electronics, such as GaN high electron mobility transistors (HEMTs), are expected to perform reliably in high-temperature conditions. This study aims to gain an understanding of the ...
Most Recent
Research Article
Z. X. Jiang, A. Ravi et al.
Accurate monitoring and, thus, control of rapid thermal anneal (RTA) are critical for manufacturing semiconductor devices. In this work, we developed a method by using secondary ion mass spectrometry ...
Research Article
O. Spitz, Y. B. Shuai et al.
Nonlinear dynamics at mid-infrared wavelength is of interest for various applications but has been mainly limited to quantum cascade lasers so far. In this article, we show that interband cascade ...
Research Article
Jongpil Ye
The peak positions of graphene plasmon resonance can be controlled to overlap with those of the infrared absorption spectra of gas molecules, allowing highly sensitive detection and identification by ...

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