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Current Issue
Volume 42,
Issue 3,
May 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
Hryhorii Stanchu, Grey Abernathy et al.
The development of all-group IV GeSn materials on Si substrates is of interest for monolithic midwave infrared (MWIR) silicon photonics. Despite their great potential, the growth of high crystalline ...
Research Article
Phoebe M. Pearce, Sheau Wei Ong et al.
Si x Ge 1 − x − y Sn y ternary alloys are a candidate material system for use in solar cells and other optoelectronic devices. We report on the ...
Research Article
Haochen Zhao, Suho Park et al.
We experimentally demonstrate a low-cost transfer process of GeSn ribbons to insulating substrates for short-wave infrared (SWIR) sensing/imaging applications. By releasing the original compressive ...
Most Recent
Research Article
Toshiaki Kusunoki, Noriaki Arai
We investigated electron emission characteristics of a hafnium carbide [HfC(100)] single-crystal tip at various temperatures toward finding a candidate of the next generation of emitters for electron ...
Research Article
Miyako Matsui, Yohei Ishii et al.
We investigated the Ru-etching mechanism using a Cl2/O2-based plasma generated by a microwave electron cyclotron resonance etching system. When 20% of Cl2 gas was added to an O2 plasma, the Ru etch ...
Research Article
Dinghai Rui, Libin Zhang et al.
With the continuous advancement of integrated circuit technology nodes, the degree of chip integration is increasing, and the requirements for critical dimensions and overlay errors are becoming more ...

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