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Current Issue
Volume 42,
Issue 1,
January 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
Yixuan Shen, Rui Q. Yang et al.
We report the demonstration of continuous-wave interband cascade lasers (ICLs) near 13 μm. The attained lasing wavelength of 13.2 μm at 92 K stands as the longest cw emission wavelength ever reported ...
Research Article
Qingyue Li, Claire Deeb et al.
We report the results of a study on the inductively coupled plasma (ICP) etching of InP at room temperature using Cl2 mixtures (Cl2/N2/H2). The impact of different process parameters, including the ...
Research Article
Zhanyi Wang, Jingli Gong et al.
We report an investigation of V-coupled cavity interband cascade (IC) lasers (ICLs) emitting in the 3-μm wavelength range, employing various waveguide structures and coupler sizes. Type-II ICL ...
Most Recent
Research Article
Yixuan Shen, Rui Q. Yang et al.
We report the demonstration of continuous-wave interband cascade lasers (ICLs) near 13 μm. The attained lasing wavelength of 13.2 μm at 92 K stands as the longest cw emission wavelength ever reported ...
Research Article
Ketan Bhotkar, Yi Yin Yu et al.
The adoption of vertically aligned carbon nanotubes (VACNTs) as electron emitters in x-ray generation has opened a new path for medical imaging technology advancement. With their outstanding electron ...
Research Article
Qingyue Li, Claire Deeb et al.
We report the results of a study on the inductively coupled plasma (ICP) etching of InP at room temperature using Cl2 mixtures (Cl2/N2/H2). The impact of different process parameters, including the ...

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