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Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.
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Featured Articles
Research Article
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February 05 2025
Akihiro Shimizu, Kazuhiro Fukada et al.
We have developed a novel approach for the fabrication of 6G communication antenna substrates by directly sputtering a copper seed layer onto a resin with low dielectric properties and low ...
Research Article
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November 27 2024
Mattias Hausladen, Andreas Schels et al.
A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron ...
Research Article
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November 07 2024
Shiyang Li, Shuhu Huan et al.
Submicrometer double-grooved gratings feature unique optical properties and diverse potential applications, most of which have been fabricated by electron beam lithography up till now. On the other ...
Editor's Picks
Letter
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February 04 2025
J. Trey Diulus, Carles Corbella et al.
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for rapid (<40 ms response time) and sensitive (in the range of 1020 m−2 s−1–1017 m−3 for radicals’ ...
Research Article
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January 27 2025
Shohei Nakamura, Atsushi Tanide et al.
Cycle etching of GaN with high etching rate controllability was achieved by cycle exposure to BCl3 gas and F2-added Ar plasma at an ion energy of 23 eV and a substrate temperature of 400 °C. Surfaces ...
Research Article
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January 27 2025
Sherry Mo, Dana O. Byrne et al.
The focused helium ion beam microscope is a versatile imaging and nanofabrication instrument enabling direct-write lithography with sub-10 nm resolution. Subsurface damage and swelling of substrates ...
Most Recent
Research Article
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February 14 2025
Youzhuang Rong, Yongkang Yang et al.
We investigate the resistive switching characteristics of TiO2 films deposited by DC magnetron sputter deposition using a metallic Ti target in different ratios of argon (Ar), oxygen (O2), and ...
Research Article
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February 12 2025
Gong-Wen Liu, Han-Wen Cao et al.
In this paper, a method for the dynamic optimization of the iteration step τ in Newton’s method is proposed, based on the golden section search algorithm. This method combines the total ...
Research Article
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February 12 2025
Yingtao Wang, Xian Zhang
Effective heat management plays a vital role in ensuring the performance and reliability of nanoelectronic devices. Here, we present a new practical approach for thermal characterization: The dual ...
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Machine learning driven measurement of high-aspect-ratio nanostructures using Mueller matrix spectroscopic ellipsometry
Shiva Mudide, Nick Keller, et al.

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