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Current Issue
Volume 42,
Issue 3,
May 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
Phoebe M. Pearce, Sheau Wei Ong et al.
Si x Ge 1 − x − y Sn y ternary alloys are a candidate material system for use in solar cells and other optoelectronic devices. We report on the ...
Research Article
Haochen Zhao, Suho Park et al.
We experimentally demonstrate a low-cost transfer process of GeSn ribbons to insulating substrates for short-wave infrared (SWIR) sensing/imaging applications. By releasing the original compressive ...
Research Article
Hoon-Ki Lee, V. Janardhanam et al.
In this study, the (001) β-Ga2O3 surface was dry etched employing the inductively coupled plasma-reactive ion etching (ICP-RIE) system, and Au/Ni/β-Ga2O3 Schottky barrier diodes (SBDs) were ...
Most Recent
Research Article
Zhengwei Mei, Siwei Wang et al.
High vacuum packaging is the key manufacturing technology of passive vacuum devices. The inherent characteristics of narrow and long space and large surface-to-volume ratio make it challenging to ...
Research Article
Jean-Philippe Soulié, Kiroubanand Sankaran et al.
CuxAl1−x thin films with 0.2 ≤ x ≤ 0.7 have been studied as potential alternatives for metallization of advanced interconnects. First-principles simulations were used to obtain the CuxAl1−x ...
Research Article
Islam F. Nuriahmetov, Ilya A. Zavidovskiy et al.
In this work, resistive gas sensors based on dehydrohalogenated polyvinylidene difluoride irradiated by variable-energy (500–900 eV) Ar+ ions were investigated. The resulting ion-irradiated ...


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