Journal of Vacuum Science & Technology B

Skip Nav Destination

Current Issue

Volume 42,

Issue 6,

November 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

Editor-in-Chief

Eray Aydil

Editors

RSS Feed

Current Issue

Featured Articles

Research Article

| November 27 2024

Measurement of field emission array current distributions by metal-coated CMOS image sensors

Mattias Hausladen, Andreas Schels et al.

A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron ...

Research Article

| November 07 2024

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Shiyang Li, Shuhu Huan et al.

Submicrometer double-grooved gratings feature unique optical properties and diverse potential applications, most of which have been fabricated by electron beam lithography up till now. On the other ...

Research Article

| November 04 2024

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

Yasser Pordeli, Céline Steenge et al.

Three-dimensional (3D) stacking of nano-devices is an effective method for increasing areal density, especially as downscaling of lateral device dimensions becomes impractical. This stacking is ...

View All Featured Articles

Editor's Picks

Research Article

| January 07 2025

Machine learning driven measurement of high-aspect-ratio nanostructures using Mueller matrix spectroscopic ellipsometry

Shiva Mudide, Nick Keller et al.

Accurate fabrication of high-aspect ratio (HAR) structures in applications from semiconductor devices to x-ray observatories is essential for their optimal performance because their performance ...

Research Article

| December 17 2024

Endoscope-assisted manipulator for precooling and deposition in low-temperature scanning tunneling microscope systems

Ungdon Ham, Ji-Soo Yoon et al.

We present the design and implementation of an advanced manipulator system for use in low-temperature scanning tunneling microscope (STM) setups, specifically in an ultrahigh vacuum (UHV) chamber ...

Research Article

| December 12 2024

Novel approach for KrF chemically amplified resist optimization assisted by deep learning

Chen Tang, Toshiaki Tanaka et al.

The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...

View All Editor's Picks

Most Recent

Research Article

| January 13 2025

Chaos-enhanced self-adaptive particle swarm optimization with simulated annealing for digital lithography mask optimization

Shengzhou Huang, Dongjie Wu et al.

In this paper, an efficient approach to mask optimization for digital micromirror device lithography is proposed, leveraging an enhanced particle swarm optimization algorithm, which significantly ...

Research Article

| January 10 2025

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

Amelia Turnquist, Naoyuki Kofuji et al.

To investigate the impact of plasma-induced stress on line wiggling, pattern deformation was compared with and without hardmask exposure to the plasma during etching of porous SiOCH (p-SiOCH) with ...

Research Article

| January 09 2025

Charge density and screened potential near a (5,5) capped carbon nanotube from density functional computation

C. J. Edgcombe, J. Huns

Further results from an earlier computation by density functional theory for the ground state of a capped (5,5) carbon nanotube in the zero applied field show details of (a) self-consistent charge ...

View All Recent Articles