Journal of Vacuum Science & Technology B

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Current Issue

Volume 42,

Issue 5,

September 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

Editor-in-Chief

Eray Aydil

Editors

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Current Issue

Featured Articles

Research Article

| November 27 2024

Measurement of field emission array current distributions by metal-coated CMOS image sensors

Mattias Hausladen, Andreas Schels et al.

A CMOS image sensor is utilized to determine the time- and spatially resolved distribution of the total electron emission current of a silicon field emission array. The sensor measures electron ...

Research Article

| November 07 2024

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Shiyang Li, Shuhu Huan et al.

Submicrometer double-grooved gratings feature unique optical properties and diverse potential applications, most of which have been fabricated by electron beam lithography up till now. On the other ...

Research Article

| November 04 2024

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

Yasser Pordeli, Céline Steenge et al.

Three-dimensional (3D) stacking of nano-devices is an effective method for increasing areal density, especially as downscaling of lateral device dimensions becomes impractical. This stacking is ...

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Editor's Picks

Research Article

| December 12 2024

Novel approach for KrF chemically amplified resist optimization assisted by deep learning

Chen Tang, Toshiaki Tanaka et al.

The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...

Research Article

| December 10 2024

Optical metasurface fabricated using 3D nanoimprint lithography

Jiacheng Ye, Yunxiang Wang et al.

To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for 3D optical metasurface. 3D nanoimprint ...

Research Article

| December 09 2024

Self-aligned fabrication of vertical, fin-based structures

Joshua Perozek, Tomás Palacios

Modern power devices rely on complex, three-dimensional, vertical designs to increase their power density, ease their thermal management, and improve their reliability. However, fabrication ...

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Most Recent

Research Article

| December 12 2024

Novel approach for KrF chemically amplified resist optimization assisted by deep learning

Chen Tang, Toshiaki Tanaka et al.

The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...

Research Article

| December 11 2024

Graphene-based capacitive monolithic microphone with optimized air gap thickness and damping

Yun Jiang (江韵), Graham S. Wood et al.

A graphene-based capacitive monolithic microphone with optimized air gap thickness and damping has been designed, fabricated, and characterized. A bilayer poly(methylmethacrylate)/graphene membrane ...

Research Article

| December 10 2024

Optical metasurface fabricated using 3D nanoimprint lithography

Jiacheng Ye, Yunxiang Wang et al.

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