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Current Issue
Volume 43,
Issue 1,
January 2025

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Letter
J. Trey Diulus, Carles Corbella et al.
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for rapid (<40 ms response time) and sensitive (in the range of 1020 m−2 s−1–1017 m−3 for radicals’ ...
Research Article
Shohei Nakamura, Atsushi Tanide et al.
Cycle etching of GaN with high etching rate controllability was achieved by cycle exposure to BCl3 gas and F2-added Ar plasma at an ion energy of 23 eV and a substrate temperature of 400 °C. Surfaces ...
Research Article
Sherry Mo, Dana O. Byrne et al.
The focused helium ion beam microscope is a versatile imaging and nanofabrication instrument enabling direct-write lithography with sub-10 nm resolution. Subsurface damage and swelling of substrates ...
Most Recent
Research Article
Youzhuang Rong, Yongkang Yang et al.
We investigate the resistive switching characteristics of TiO2 films deposited by DC magnetron sputter deposition using a metallic Ti target in different ratios of argon (Ar), oxygen (O2), and ...
Research Article
Gong-Wen Liu, Han-Wen Cao et al.
In this paper, a method for the dynamic optimization of the iteration step τ in Newton’s method is proposed, based on the golden section search algorithm. This method combines the total ...
Research Article
Yingtao Wang, Xian Zhang
Effective heat management plays a vital role in ensuring the performance and reliability of nanoelectronic devices. Here, we present a new practical approach for thermal characterization: The dual ...

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