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Current Issue
Volume 42,
Issue 5,
September 2024

Focus and Coverage

Journal of Vacuum Science & Technology B covers microelectronics and nanometer structures with an emphasis on processing, measurement, and phenomena associated with micrometer, nanometer structures and devices and vacuum science and technology.

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Editor's Picks
Research Article
Chen Tang, Toshiaki Tanaka et al.
The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...
Research Article
Jiacheng Ye, Yunxiang Wang et al.
To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for 3D optical metasurface. 3D nanoimprint ...
Research Article
Joshua Perozek, Tomás Palacios
Modern power devices rely on complex, three-dimensional, vertical designs to increase their power density, ease their thermal management, and improve their reliability. However, fabrication ...
Most Recent
Research Article
Chen Tang, Toshiaki Tanaka et al.
The development of chemically amplified resists requires many experiments to optimize the chemical composition, which includes the type of monomer molecules and their component ratios, initiator ...
Research Article
Yun Jiang (江韵), Graham S. Wood et al.
A graphene-based capacitive monolithic microphone with optimized air gap thickness and damping has been designed, fabricated, and characterized. A bilayer poly(methylmethacrylate)/graphene membrane ...
Research Article
Jiacheng Ye, Yunxiang Wang et al.
To improve the performance of the next-generation optical metasurface device, we investigated the feasibility of practical design and fabrication processes for 3D optical metasurface. 3D nanoimprint ...

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