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Journal Articles

OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

Yundong Zhou, Alexis Franquet, Valentina Spampinato, Alex Merkulov, Michael R. Keenan, Paul A. W. van der Heide, Gustavo F. Trindade, Wilfried Vandervorst, Ian S. Gilmore

J. Vac. Sci. Technol. A 42, 053208 (2024)

https://doi.org/10.1116/6.0003821

Published: September 2024

View article titled, OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

Journal Articles

Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

Samira Jafari, Blaine Johs, Matthew R. Linford

J. Vac. Sci. Technol. A 42, 053401 (2024)

https://doi.org/10.1116/6.0003511

Published: July 2024

View article titled, Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

Journal Articles

Review of actinide core-level photoemission

Alaina Thompson, William Limestall, Art Nelson, Daniel T. Olive, Jeff Terry

J. Vac. Sci. Technol. A 42, 050802 (2024)

https://doi.org/10.1116/6.0003534

Published: July 2024

View article titled, Review of actinide core-level photoemission

Journal Articles

Introduction to reproducible laboratory hard x-ray photoelectron spectroscopy

Kateryna Artyushkova, Stuart R. Leadley, Alexander G. Shard

J. Vac. Sci. Technol. A 42, 052801 (2024)

https://doi.org/10.1116/6.0003740

Published: July 2024

View article titled, Introduction to reproducible laboratory hard x-ray photoelectron spectroscopy

Journal Articles

Best practices for performing quantitative TOF-SIMS analyses

Alan M. Spool, Lorie Finney

J. Vac. Sci. Technol. A 42, 043204 (2024)

https://doi.org/10.1116/6.0003660

Published: July 2024

View article titled, Best practices for performing quantitative TOF-SIMS analyses

Journal Articles

High power impulse magnetron sputtering of a zirconium target

Swetha Suresh Babu, Joel Fischer, Kateryna Barynova, Martin Rudolph, Daniel Lundin, Jon Tomas Gudmundsson

J. Vac. Sci. Technol. A 42, 043007 (2024)

https://doi.org/10.1116/6.0003647

Published: June 2024

View article titled, High power impulse magnetron sputtering of a zirconium target

Journal Articles

Selecting the best surface analysis method for your materials/samples

Kye J. Robinson, Helmut Thissen

J. Vac. Sci. Technol. A 42, 040801 (2024)

https://doi.org/10.1116/6.0003576

Published: May 2024

View article titled, Selecting the best surface analysis method for your materials/samples

Journal Articles

Crystallization kinetics during layer exchange of ²⁸Si implanted Al films for fabrication of quantum computers: A theoretical model

Ella B. Schneider, Jonathan England

J. Vac. Sci. Technol. A 42, 042703 (2024)

https://doi.org/10.1116/6.0003638

Published: May 2024

View article titled, Crystallization kinetics during layer exchange of 28Si implanted Al films for fabrication of quantum computers: A theoretical model

Includes: Supplementary data

Journal Articles

Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon

F. K. Urban, D. Barton

J. Vac. Sci. Technol. A 42, 043401 (2024)

https://doi.org/10.1116/6.0003548

Published: May 2024

View article titled, Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon

Journal Articles

XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice

B. Vincent Crist

J. Vac. Sci. Technol. A 42, 032803 (2024)

https://doi.org/10.1116/6.0003439

Published: April 2024

View article titled, XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice

Journal Articles

Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno, Julian Schulze

J. Vac. Sci. Technol. A 42, 033011 (2024)

https://doi.org/10.1116/6.0003448

Published: April 2024

View article titled, Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

Journal Articles

Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition

Jianfei Jin, Lin Lv, Lu Yan, Ying Li, Yunzhen Cao

J. Vac. Sci. Technol. A 42, 032403 (2024)

https://doi.org/10.1116/6.0003305

Published: March 2024

View article titled, Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition

Includes: Supplementary data

Journal Articles

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

João Saccoman, Nilton Francelosi A. Neto, José H. D. da Silva

J. Vac. Sci. Technol. A 42, 033402 (2024)

https://doi.org/10.1116/6.0003255

Published: March 2024

View article titled, Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Journal Articles

Bio-tribocorrosion resistance of CoB–Co₂B and Co₂B layers on CoCrMo alloy

A. M. Delgado-Brito, I. Mejía-Caballero, A. D. Contla-Pacheco, R. Pérez Pasten-Borja, V. H. Castrejón-Sánchez, E. J. Hernández-Ramírez, I. Campos-Silva

J. Vac. Sci. Technol. A 42, 023106 (2024)

https://doi.org/10.1116/6.0003342

Published: February 2024

View article titled, Bio-tribocorrosion resistance of CoB–Co2B and Co2B layers on CoCrMo alloy

Journal Articles

Role of the codeposited C and W element on the tribological performance of WS₂ coating

Weiming Niu, Yizhuo Xu, Yuting Li, Guojuan Liu, Yifan Yao, Hao Li, Xiaojun Xu, Yan Zhou, Minhao Zhu

J. Vac. Sci. Technol. A 42, 023417 (2024)

https://doi.org/10.1116/6.0003231

Published: February 2024

View article titled, Role of the codeposited C and W element on the tribological performance of WS2 coating

Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis

J. Vac. Sci. Technol. A 42, 020401 (2024)

https://doi.org/10.1116/6.0003389

Published: January 2024

View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Includes: Supplementary data

Journal Articles

Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control

F. K. Urban, III, D. Barton

J. Vac. Sci. Technol. A 42, 023404 (2024)

https://doi.org/10.1116/6.0003196

Published: January 2024

View article titled, Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control

Journal Articles

Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si₃N₄ thin films on silicon

Ben D. Beake, Vladimir M. Vishnyakov, Stephen R. Goodes, Azadeh Taher Rahmati

J. Vac. Sci. Technol. A 42, 013104 (2024)

https://doi.org/10.1116/6.0003189

Published: January 2024

View article titled, Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon

Journal Articles

Active learning with moment tensor potentials to predict material properties: Ti_0.5Al_0.5N at elevated temperature

F. Bock, F. Tasnádi, I. A. Abrikosov

J. Vac. Sci. Technol. A 42, 013412 (2024)

https://doi.org/10.1116/6.0003260

Published: January 2024

View article titled, Active learning with moment tensor potentials to predict material properties: Ti0.5Al0.5N at elevated temperature

Journal Articles

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura

J. Vac. Sci. Technol. A 42, 013201 (2024)

https://doi.org/10.1116/6.0003153

Published: December 2023

View article titled, Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

NARROW

Topics

*

OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution

Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

Review of actinide core-level photoemission

Introduction to reproducible laboratory hard x-ray photoelectron spectroscopy

Best practices for performing quantitative TOF-SIMS analyses

High power impulse magnetron sputtering of a zirconium target

Selecting the best surface analysis method for your materials/samples

Crystallization kinetics during layer exchange of ²⁸Si implanted Al films for fabrication of quantum computers: A theoretical model

Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon

XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice

Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

Robust ultrablack film deposited on large-curvature magnesium alloy by atomic layer deposition

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Bio-tribocorrosion resistance of CoB–Co₂B and Co₂B layers on CoCrMo alloy

Role of the codeposited C and W element on the tribological performance of WS₂ coating

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control

Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si₃N₄ thin films on silicon

Active learning with moment tensor potentials to predict material properties: Ti_0.5Al_0.5N at elevated temperature

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

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