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Journal Articles
J. Vac. Sci. Technol. A 42, 043204 (2024)
Published: July 2024
Journal Articles
Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim
J. Vac. Sci. Technol. A 41, 053110 (2023)
Published: August 2023
Journal Articles
Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke
J. Vac. Sci. Technol. A 41, 053207 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
George H. Major, Joshua W. Pinder, Daniel E. Austin, Donald R. Baer, Steven L. Castle, Jan Čechal, B. Maxwell Clark, Hagai Cohen, Jonathan Counsell, Alberto Herrera-Gomez, Pavitra Govindan, Seong H. Kim, David J. Morgan, Robert L. Opila, Cedric J. Powell, Stanislav Průša, Adam Roberts, Mario Rocca, Naoto Shirahata, Tomáš Šikola, Emily F. Smith, Regina C. So, John E. Stovall, Jennifer Strunk, Andrew Teplyakov, Jeff Terry, Stephen G. Weber, Matthew R. Linford
J. Vac. Sci. Technol. A 41, 038501 (2023)
Published: May 2023
Journal Articles
Benjamin C. Letson, Simon Barke, Peter Wass, Guido Mueller, Fan Ren, Stephen J. Pearton, John W. Conklin
J. Vac. Sci. Technol. A 41, 013202 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043006 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043003 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 030801 (2022)
Published: April 2022
Journal Articles
Michael Motala, Lucas K. Beagle, Jason Lynch, David C. Moore, Peter R. Stevenson, Anna Benton, Ly D. Tran, Luke A. Baldwin, Drake Austin, Christopher Muratore, Deep Jariwala, Nicholas R. Glavin
J. Vac. Sci. Technol. A 40, 032202 (2022)
Published: April 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 023206 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063003 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
J. Vac. Sci. Technol. A 39, 052406 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 051001 (2021)
Published: July 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043208 (2021)
Published: June 2021
Journal Articles
Zhiyu Huang, Daniel C. Messina, Brianna S. Eller, Franz A. Koeck, Paul A. Scowen, Robert J. Nemanich
J. Vac. Sci. Technol. A 39, 042402 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043203 (2021)
Published: May 2021
Includes: Supplementary data
Journal Articles
Pawan Kumar, Kelotchi S. Figueroa, Alexandre C. Foucher, Kiyoung Jo, Natalia Acero, Eric A. Stach, Deep Jariwala
J. Vac. Sci. Technol. A 39, 032201 (2021)
Published: March 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 033001 (2021)
Published: March 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 063402 (2020)
Published: September 2020
Journal Articles
Sonali N. Chopra, Martijn F. J. Vos, Marcel A. Verheijen, John G. Ekerdt, Wilhelmus M. M. Kessels, Adriaan J. M. Mackus
J. Vac. Sci. Technol. A 38, 062402 (2020)
Published: September 2020
Includes: Supplementary data
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