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Journal Articles

Recent trends in thermal atomic layer deposition chemistry

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Georgi Popov, Miika Mattinen, Anton Vihervaara, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 030801 (2025)
https://doi.org/10.1116/6.0004320
Published: March 2025
View articletitled, Recent trends in thermal atomic layer deposition chemistry
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Journal Articles

Applications of machine learning in ion beam analysis of materials

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Tiago Fiorini da Silva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020803 (2025)
https://doi.org/10.1116/6.0004277
Published: February 2025
View articletitled, Applications of machine learning in ion beam analysis of materials
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Journal Articles

Review of the behavior of helium bubbles in aged plutonium and their influence on material properties

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David W. Wheeler, Paul Roussel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020802 (2025)
https://doi.org/10.1116/6.0004207
Published: February 2025
View articletitled, Review of the behavior of helium bubbles in aged plutonium and their influence on material properties
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Journal Articles

Remote plasma assisted processing and semiconductor interface electronic structure

FeaturedOpen Access
Leonard J. Brillson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 020801 (2025)
https://doi.org/10.1116/6.0004200
Published: January 2025
View articletitled, Remote plasma assisted processing and semiconductor interface electronic structure
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Journal Articles

Surface passivation approaches for silicon, germanium, and III–V semiconductors

Editor’s PickOpen Access
Roel J. Theeuwes, Wilhelmus M. M. Kessels, Bart Macco
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 060801 (2024)
https://doi.org/10.1116/6.0004030
Published: November 2024
View articletitled, Surface passivation approaches for silicon, germanium, and III–V semiconductors
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Journal Articles

Review of actinide core-level photoemission

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Alaina Thompson, William Limestall, Art Nelson, Daniel T. Olive, Jeff Terry
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050802 (2024)
https://doi.org/10.1116/6.0003534
Published: July 2024
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Journal Articles

Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning

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Alexander G. Shard, Mark A. Baker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 050801 (2024)
https://doi.org/10.1116/6.0003681
Published: July 2024
View articletitled, Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning
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Journal Articles

Selecting the best surface analysis method for your materials/samples

FeaturedOpen Access
Kye J. Robinson, Helmut Thissen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 040801 (2024)
https://doi.org/10.1116/6.0003576
Published: May 2024
View articletitled, Selecting the best surface analysis method for your materials/samples
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Journal Articles

Advances in growth, doping, and devices and applications of zinc oxide

Open Access
Vishal Saravade, Zhe Chuan Feng, Manika Tun Nafisa, Chuanle Zhou, Na Lu, Benjamin Klein, Ian Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020802 (2024)
https://doi.org/10.1116/6.0003171
Published: February 2024
View articletitled, Advances in growth, doping, and devices and applications of zinc oxide
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Journal Articles

Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy

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Robin Lang, Christoph Klein, Jens Ohlmann, Frank Dimroth, David Lackner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020801 (2024)
https://doi.org/10.1116/6.0003393
Published: February 2024
View articletitled, Review on ultrahigh growth rate GaAs solar cells by metalorganic vapor-phase epitaxy
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Journal Articles

Materials characterization: Can artificial intelligence be used to address reproducibility challenges?

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Miu Lun Lau, Abraham Burleigh, Jeff Terry, Min Long
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 060801 (2023)
https://doi.org/10.1116/6.0002809
Published: November 2023
View articletitled, Materials characterization: Can artificial intelligence be used to address reproducibility challenges?
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Journal Articles

Challenges in porosity characterization of thin films: Cross-evaluation of different techniques

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Mikhail R. Baklanov, Konstantin P. Mogilnikov, Alexey S. Vishnevskiy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050802 (2023)
https://doi.org/10.1116/6.0002793
Published: July 2023
View articletitled, Challenges in porosity characterization of thin films: Cross-evaluation of different techniques
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Journal Articles

Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective

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Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050801 (2023)
https://doi.org/10.1116/6.0002431
Published: July 2023
View articletitled, Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
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Journal Articles

Review of virtual substrate technologies for 6.3 Ångström lattice constants

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Stefan P. Svensson, Nadeemullah A. Mahadik, Gela Kipshidze, Dmitri Donetski, Jingze Zhao, Gregory Belenky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040802 (2023)
https://doi.org/10.1116/6.0002715
Published: June 2023
View articletitled, Review of virtual substrate technologies for 6.3 Ångström lattice constants
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Journal Articles

Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy

Editor’s PickOpen Access
Alenka Vesel, Rok Zaplotnik, Gregor Primc, Miran Mozetic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040801 (2023)
https://doi.org/10.1116/6.0002695
Published: June 2023
View articletitled, Fundamentals of thin film depth profiling by glow discharge optical emission spectroscopy
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Journal Articles

Influence of local chemical environment and external perturbations of porphyrins on surfaces

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José J. Ortiz-Garcia, Rebecca C. Quardokus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 030801 (2023)
https://doi.org/10.1116/6.0002401
Published: March 2023
View articletitled, Influence of local chemical environment and external perturbations of porphyrins on surfaces
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Journal Articles

Plasma-assisted gas-phase aggregation of clusters for functional nanomaterials

Open Access
O. Kylián, D. Nikitin, J. Hanuš, S. Ali-Ogly, P. Pleskunov, H. Biederman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 020802 (2023)
https://doi.org/10.1116/6.0002374
Published: March 2023
View articletitled, Plasma-assisted gas-phase aggregation of clusters for functional nanomaterials
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Journal Articles

Masked-assisted radial-segmented target pulsed-laser deposition: A novel method for area-selective deposition using pulsed-laser deposition

Editor’s PickOpen Access
Laurenz Thyen, Daniel Splith, Max Kneiß, Marius Grundmann, Holger von Wenckstern
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 020801 (2023)
https://doi.org/10.1116/6.0002275
Published: January 2023
View articletitled, Masked-assisted radial-segmented target pulsed-laser deposition: A novel method for area-selective deposition using pulsed-laser deposition
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Journal Articles

Hydrogen permeation barriers and preparation techniques: A review

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Shu Xiao, Xinyu Meng, Kejun Shi, Liangliang Liu, Hao Wu, Weiqi Lian, Chilou Zhou, Yunrong Lyu, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 060803 (2022)
https://doi.org/10.1116/6.0002178
Published: November 2022
View articletitled, Hydrogen permeation barriers and preparation techniques: A review
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Journal Articles

Critical review of Ohmic and Schottky contacts to β-Ga2O3

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Luke A. M. Lyle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 060802 (2022)
https://doi.org/10.1116/6.0002144
Published: November 2022
View articletitled, Critical review of Ohmic and Schottky contacts to β-Ga2O3
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