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Journal Articles

Perspective on comparative radiation hardness of Ga2O3 polymorphs

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S. J. Pearton, Fan Ren, Alexander Y. Polyakov, Eugene B. Yakimov, Leonid Chernyak, Aman Haque
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 038501 (2025)
https://doi.org/10.1116/6.0004444
Published: March 2025
View article titled, Perspective on comparative radiation hardness of Ga<sub>2</sub>O<sub>3</sub> polymorphs
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Journal Articles

Perspective on breakdown in Ga2O3 vertical rectifiers

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Jian-Sian Li, Chao-Ching Chiang, Hsiao-Hsuan Wan, Fan Ren, Yu-Te Liao, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 018501 (2025)
https://doi.org/10.1116/6.0004146
Published: December 2024
View article titled, Perspective on breakdown in Ga<sub>2</sub>O<sub>3</sub> vertical rectifiers
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Journal Articles

Chemical significance of x-ray photoelectron spectroscopy binding energy shifts: A Perspective

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Paul S. Bagus, Connie J. Nelin, C. R. Brundle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 068501 (2023)
https://doi.org/10.1116/6.0003081
Published: October 2023
View article titled, Chemical significance of x-ray photoelectron spectroscopy binding energy shifts: A Perspective
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Includes: Supplementary data
Journal Articles

Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)

FeaturedScilight
George H. Major, Joshua W. Pinder, Daniel E. Austin, Donald R. Baer, Steven L. Castle, Jan Čechal, B. Maxwell Clark, Hagai Cohen, Jonathan Counsell, Alberto Herrera-Gomez, Pavitra Govindan, Seong H. Kim, David J. Morgan, Robert L. Opila, Cedric J. Powell, Stanislav Průša, Adam Roberts, Mario Rocca, Naoto Shirahata, Tomáš Šikola, Emily F. Smith, Regina C. So, John E. Stovall, Jennifer Strunk, Andrew Teplyakov, Jeff Terry, Stephen G. Weber, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 038501 (2023)
https://doi.org/10.1116/6.0002437
Published: May 2023
View article titled, Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)
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Journal Articles

Green CVD—Toward a sustainable philosophy for thin film deposition by chemical vapor deposition

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Henrik Pedersen, Seán T. Barry, Jonas Sundqvist
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 051001 (2021)
https://doi.org/10.1116/6.0001125
Published: July 2021
View article titled, Green CVD—Toward a sustainable philosophy for thin film deposition by chemical vapor deposition
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Journal Articles

Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition

Editor’s Pick
Josiah Yarbrough, Alex B. Shearer, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 021002 (2021)
https://doi.org/10.1116/6.0000840
Published: March 2021
View article titled, Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition
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Journal Articles

Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum

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Tyler J. Myers, Austin M. Cano, Diane K. Lancaster, Joel W. Clancey, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 021001 (2021)
https://doi.org/10.1116/6.0000680
Published: February 2021
View article titled, Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al<sub>2</sub>O<sub>3</sub> by trimethylaluminum
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Journal Articles

Acquisition and analysis of scanning tunneling spectroscopy data—WSe2 monolayer

Randall M. Feenstra, Grayson R. Frazier, Yi Pan, Stefan Fölsch, Yu-Chuan Lin, Bhakti Jariwala, Kehao Zhang, Joshua A. Robinson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 011001 (2021)
https://doi.org/10.1116/6.0000684
Published: December 2020
View article titled, Acquisition and analysis of scanning tunneling spectroscopy data—WSe<sub>2</sub> monolayer
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Includes: Supplementary data
Journal Articles

X-ray photoelectron spectroscopy: A perspective on quantitation accuracy for composition analysis of homogeneous materials

Christopher Richard Brundle, Bruce Vincent Crist
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 041001 (2020)
https://doi.org/10.1116/1.5143897
Published: June 2020
View article titled, X-ray photoelectron spectroscopy: A perspective on quantitation accuracy for composition analysis of homogeneous materials
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Includes: Supplementary data
Journal Articles

Perspectives from research on metal-semiconductor contacts: Examples from Ga2O3, SiC, (nano)diamond, and SnS

Editor’s Pick
Lisa M. Porter, Jenifer R. Hajzus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 031005 (2020)
https://doi.org/10.1116/1.5144502
Published: April 2020
View article titled, Perspectives from research on metal-semiconductor contacts: Examples from Ga<sub>2</sub>O<sub>3</sub>, SiC, (nano)diamond, and SnS
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Journal Articles

Inside the mysterious world of plasma: A process engineer’s perspective

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Keren J. Kanarik
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 031004 (2020)
https://doi.org/10.1116/1.5141863
Published: March 2020
View article titled, Inside the mysterious world of plasma: A process engineer’s perspective
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Journal Articles

Uranium and arsenic unregulated water issues on Navajo lands

Jani C. Ingram, Lindsey Jones, Jonathan Credo, Tommy Rock
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 031003 (2020)
https://doi.org/10.1116/1.5142283
Published: March 2020
View article titled, Uranium and arsenic unregulated water issues on Navajo lands
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Journal Articles

Misconceptions in interpretation of nitrogen chemistry from x-ray photoelectron spectra

Kateryna Artyushkova
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 031002 (2020)
https://doi.org/10.1116/1.5135923
Published: March 2020
View article titled, Misconceptions in interpretation of nitrogen chemistry from x-ray photoelectron spectra
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Journal Articles

Surface properties and interactions of transition metal oxide nanoparticles: A perspective on sustainability

Jenny K. Hedlund Orbeck, Robert J. Hamers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 031001 (2020)
https://doi.org/10.1116/1.5141853
Published: March 2020
View article titled, Surface properties and interactions of transition metal oxide nanoparticles: A perspective on sustainability
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Journal Articles

Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions

Steven L. Girshick
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 011001 (2020)
https://doi.org/10.1116/1.5136337
Published: December 2019
View article titled, Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions
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Journal Articles

Responding to the growing issue of research reproducibility

Donald R. Baer, Ian S. Gilmore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 068502 (2018)
https://doi.org/10.1116/1.5049141
Published: October 2018
View article titled, Responding to the growing issue of research reproducibility
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Journal Articles

Perspective: Nonequilibrium dynamics of localized and delocalized excitons in colloidal quantum dot solids

Editor’s Pick
Elizabeth M. Y. Lee, William A. Tisdale, Adam P. Willard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 068501 (2018)
https://doi.org/10.1116/1.5046694
Published: September 2018
View article titled, Perspective: Nonequilibrium dynamics of localized and delocalized excitons in colloidal quantum dot solids
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Journal Articles

From nanoscience to solutions in electrochemical energy storage

Gary W. Rubloff, Alexander C. Kozen, Sang Bok Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 058503 (2013)
https://doi.org/10.1116/1.4816262
Published: July 2013
View article titled, From nanoscience to solutions in electrochemical energy storage
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Journal Articles

Spectroscopic ellipsometry—A perspective

D. E. Aspnes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 058502 (2013)
https://doi.org/10.1116/1.4809747
Published: July 2013
View article titled, Spectroscopic ellipsometry—A perspective
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Journal Articles

Perspectives on future directions in III-N semiconductor research

Charles R. Eddy, Jr., Neeraj Nepal, Jennifer K. Hite, Michael A. Mastro
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 058501 (2013)
https://doi.org/10.1116/1.4813687
Published: July 2013
View article titled, Perspectives on future directions in III-N semiconductor research
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