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Journal Articles (17168)

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Atomic Layer Deposition (ALD) (126)
Gallium Oxide Materials and Devices (80)
Special Topic Collection on Atomic Layer Deposition (ALD) (54)
2019 Special Collection on Atomic Layer Deposition (ALD) (44)
Atomic Layer Etching (ALE) (40)
2018 Special Collection on Atomic Layer Deposition (ALD) (36)
Functional Coatings (35)
Festschrift Honoring Dr. Steve Rossnagel (32)
Special Topic Collection Commemorating the Career of John Coburn (30)
30 years of the Nellie Yeoh Whetten Award — Celebrating the Women of the AVS (29)

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