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Journal Articles

Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si

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Andriy Luchechko, Vyacheslav Vasyltsiv, Markiyan Kushlyk, Ihor Syvorotka, Lyudmyla Kostyk, Dmytro Slobodzyan, Yaroslav Zhydachevskyy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042802 (2025)
https://doi.org/10.1116/6.0004570
Published: May 2025
View articletitled, Luminescence and thermally stimulated conductivity of polycrystalline β-Ga2O3: Mn and β-Ga2O3: Mn, Si
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Journal Articles

Atomic layer deposition of entropy stabilized Zr2Ta2O9 and light activated self-rectifying resistive switching

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Shane M. W. Witsell, Konner E. K. Holden, Dustin Z. Austin, John F. Conley, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042402 (2025)
https://doi.org/10.1116/6.0004512
Published: May 2025
View articletitled, Atomic layer deposition of entropy stabilized Zr2Ta2O9 and light activated self-rectifying resistive switching
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Journal Articles

Study on the properties of MoS2 thin films and devices prepared under different annealing pressures

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Zhiping Huang, Xiaoqian Yang, Lukai Zhang, Dongjin Liao, Ying Xu, XingXing Xu, Yang Ding, Yu Zhang, Wei Yu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042803 (2025)
https://doi.org/10.1116/6.0004395
Published: May 2025
View articletitled, Study on the properties of MoS2 thin films and devices prepared under different annealing pressures
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Journal Articles

Band alignment of Cr2MnO4 on ( 2 ¯ 01 ) and (001) β-Ga2O3

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Hsiao-Hsuan Wan, Chao-Ching Chiang, Fan Ren, Babajide Akintunde, Naomi Derksen, Ashik Imran, Adam J. Hauser, Marko J. Tadjer, James C. Gallagher, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043402 (2025)
https://doi.org/10.1116/6.0004591
Published: May 2025
View articletitled, Band alignment of Cr2MnO4 on ( 2 ¯ 01 ) and (001) β-Ga2O3
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Journal Articles

Reactive sputtering refined Pd-decorated VO2 thin films for hydrogen sensing

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Wenhui Xu, Xiaoxu Lai, Zeqi Guo, Dan Sun, Chi Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043401 (2025)
https://doi.org/10.1116/6.0004488
Published: May 2025
View articletitled, Reactive sputtering refined Pd-decorated VO2 thin films for hydrogen sensing
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Journal Articles

Operando XPS in reactive plasmas: The importance of the wall reactions

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J. Trey Diulus, Ashley R. Head, Jorge Anibal Boscoboinik, Andrei Kolmakov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 040401 (2025)
https://doi.org/10.1116/6.0004569
Published: May 2025
View articletitled, Operando XPS in reactive plasmas: The importance of the wall reactions
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Journal Articles

Aluminum silicate deposition on polyethylene naphthalate films and its application to Cs absorber in Cs aqueous solution

Open Access
Hibiki Takeda, Haruto Suzuki, Ryo Miyazawa, Masanori Miura, Bashir Ahmmad, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042401 (2025)
https://doi.org/10.1116/6.0004544
Published: May 2025
View articletitled, Aluminum silicate deposition on polyethylene naphthalate films and its application to Cs absorber in Cs aqueous solution
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Journal Articles

Kinetic Monte Carlo simulations of aging in δ-Pu

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T. Oppelstrup, N. Bertin, N. Goldman, L. X. Benedict, L. A. Zepeda-Ruiz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043202 (2025)
https://doi.org/10.1116/6.0004547
Published: May 2025
View articletitled, Kinetic Monte Carlo simulations of aging in δ-Pu
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Journal Articles

Defining the relative proton irradiation hardness of β-Ga2O3

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Hsiao-Hsuan Wan, Fan Ren, Alexander Y. Polyakov, Aman Haque, Joonyup Bae, Jihyun Kim, Aaron Rabin, Assel Aitkaliyeva, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042801 (2025)
https://doi.org/10.1116/6.0004576
Published: May 2025
View articletitled, Defining the relative proton irradiation hardness of β-Ga2O3
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Journal Articles

Compatibility of molten plutonium with wrought and additively manufactured metal crucibles

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Michelle M. Greenough, Alexander E. Wilson-Heid, R. Joey Griffiths, Donya R. Servando-Williams, Ryan M. Kissinger, W. Preston Cole, Debra L. Rosas, Andrew J. Swift, Jason E. Schnackenberg, Tien T. Roehling, Aiden A. Martin, Kiel S. Holliday, Jason R. Jeffries
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043101 (2025)
https://doi.org/10.1116/6.0004524
Published: May 2025
View articletitled, Compatibility of molten plutonium with wrought and additively manufactured metal crucibles
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Journal Articles

Thermal annealing and radiation effects on structural and electrical properties of NbN/GaN superconductor/semiconductor junction

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Stephen Margiotta, Binzhi Liu, Saleh Ahmed Khan, Gabriel Calderon Ortiz, Ahmed Ibreljic, Jinwoo Hwang, A. F. M. Anhar Uddin Bhuiyan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 042701 (2025)
https://doi.org/10.1116/6.0004539
Published: May 2025
View articletitled, Thermal annealing and radiation effects on structural and electrical properties of NbN/GaN superconductor/semiconductor junction
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Journal Articles

Mechanical size effects of novel core-shell structured liquid gallium nanoparticles

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Wuxu Zhang, Jinyun Liu, Zidong He, HuaLi Yang, ShiYing Li, Feng Xu, Qi Zhang, Yiwei Liu, Yuanzao Wu, Baoru Bian, Ji Lin, Jie Shang, Run-Wei Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 043201 (2025)
https://doi.org/10.1116/6.0004403
Published: May 2025
View articletitled, Mechanical size effects of novel core-shell structured liquid gallium nanoparticles
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Journal Articles

Monitoring the thickness of white Sn thin island films by spectroscopic ellipsometry

Open Access
A. J. Onnink, J. Schmitz, B. Terbonssen, A. Y. Kovalgin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033410 (2025)
https://doi.org/10.1116/6.0004370
Published: May 2025
View articletitled, Monitoring the thickness of white Sn thin island films by spectroscopic ellipsometry
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Journal Articles

AI-guided frame prediction techniques to model single crystal diamond growth

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Rohan Reddy Mekala, Arjun Srinivasan, Matthias Muehle, Elias Garratt, Adam Porter, Mikael Lindvall
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032708 (2025)
https://doi.org/10.1116/6.0004290
Published: May 2025
View articletitled, AI-guided frame prediction techniques to model single crystal diamond growth
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Journal Articles

Testing commonly used background removal procedures for XPS quantitation of homogeneous material: Fe2O3, a transition metal oxide example

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Christopher Richard Brundle, Bruce Vincent Crist, Paul S. Bagus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033211 (2025)
https://doi.org/10.1116/6.0004533
Published: May 2025
View articletitled, Testing commonly used background removal procedures for XPS quantitation of homogeneous material: Fe2O3, a transition metal oxide example
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Journal Articles

Plasma enhanced atomic layer deposition of silicon nitride and silicon carbonitride using a single source precursor and different plasmas

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Samuel M. Johnson, Jianping Zhao, Tsung-Hsuan Yang, Toshihiko Iwao, Charles Schlechte, John Carroll, Gabriel Blankemeyer, Peter L. G. Ventzek, Joaquin Resasco, Gyeong S. Hwang, John G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032409 (2025)
https://doi.org/10.1116/6.0004510
Published: May 2025
View articletitled, Plasma enhanced atomic layer deposition of silicon nitride and silicon carbonitride using a single source precursor and different plasmas
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Journal Articles

Study of Cl2/Ar transient plasmas using a dynamic global model

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T. Rasoanarivo, C. Mannequin, F. Roqueta, M. Boufnichel, A. Rhallabi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033008 (2025)
https://doi.org/10.1116/6.0004464
Published: May 2025
View articletitled, Study of Cl2/Ar transient plasmas using a dynamic global model
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Journal Articles

Distribution and evolution of defects and lattice strain induced by H+ implantation in 4H-SiC for layer transfer processes

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Sijie Yang, Yao Shuai, Dailei Zhu, Wenbo Luo, Xinqiang Pan, Bin Peng, Chuangui Wu, Wanli Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033409 (2025)
https://doi.org/10.1116/6.0004436
Published: May 2025
View articletitled, Distribution and evolution of defects and lattice strain induced by H+ implantation in 4H-SiC for layer transfer processes
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Journal Articles

Wet etch clean-up of plasma damage for 1.68 kV breakdown in NiO/β-Ga2O3 chlorine-etched PN diodes

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Audrey Rose Gutierrez, Joseph A. Spencer, Alan G. Jacobs, Yuan Qin, Jenifer R. Hajzus, Hannah N. Masten, Emma Rocco, Karl D. Hobart, Travis J. Anderson, Yuhao Zhang, Akito Kuramata, Marko J. Tadjer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033210 (2025)
https://doi.org/10.1116/6.0004289
Published: May 2025
View articletitled, Wet etch clean-up of plasma damage for 1.68 kV breakdown in NiO/β-Ga2O3 chlorine-etched PN diodes
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Journal Articles

Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges

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Yu-Meng Cui, Fang-Fang Ma, Zi-Heng Liu, Nosir Matyakubov, Eugenia Krutsilina, Quan-Zhi Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033007 (2025)
https://doi.org/10.1116/6.0004221
Published: May 2025
View articletitled, Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges
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