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Journal Articles

Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study

Jeong Won Kim, Ansoon Kim, Hui Ung Hwang, Jun Hyung Kim, Seungwook Choi, Norbert Koch, Dongguen Shin, Zhijuan Zhao, Fen Liu, Minki Choi, Kyu Myung Lee, Yongsup Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053211 (2023)
https://doi.org/10.1116/6.0002852
Published: August 2023
View article titled, Work function measurement by ultraviolet photoelectron spectroscopy: Versailles project on advanced materials and standards interlaboratory study
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Journal Articles

Development of a process for flame retardant coating of textiles with bio-hybrid anchor peptides

Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053110 (2023)
https://doi.org/10.1116/6.0002776
Published: August 2023
View article titled, Development of a process for flame retardant coating of textiles with bio-hybrid anchor peptides
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Journal Articles

VAMAS TWA2 interlaboratory comparison: Surface analysis of TiO2 nanoparticles using ToF-SIMS

Francesca Bennet, Robert Opitz, Narges Ghoreishi, Kristina Plate, Jean-Paul Barnes, Allen Bellew, Anna Belu, Giacomo Ceccone, Eric de Vito, Arnaud Delcorte, Alexis Franquet, Francesco Fumagalli, Douglas Gilliland, Harald Jungnickel, Tae Geol Lee, Claude Poleunis, Derk Rading, Hyun Kyong Shon, Valentina Spampinato, Jin Gyeong Son, Fuyi Wang, Yung-Chen Andrew Wang, Yao Zhao, Alexander Roloff, Jutta Tentschert, Jörg Radnik
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053210 (2023)
https://doi.org/10.1116/6.0002814
Published: August 2023
View article titled, VAMAS TWA2 interlaboratory comparison: Surface analysis of TiO<sub>2</sub> nanoparticles using ToF-SIMS
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Includes: Supplementary data
Journal Articles

ToF-SIMS in battery research: Advantages, limitations, and best practices

Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053207 (2023)
https://doi.org/10.1116/6.0002850
Published: August 2023
View article titled, ToF-SIMS in battery research: Advantages, limitations, and best practices
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Includes: Supplementary data
Journal Articles

Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective

Nicholas A. Strnad, Daniel M. Potrepka, Brendan M. Hanrahan, Glen R. Fox, Ronald G. Polcawich, Jeffrey S. Pulskamp, Ryan R. Knight, Ryan Q. Rudy
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050801 (2023)
https://doi.org/10.1116/6.0002431
Published: July 2023
View article titled, Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective
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Journal Articles

Structural evolution and thermoelectric properties of Mg3SbxBi2−x thin films deposited by magnetron sputtering

Grzegorz Sadowski, Rui Shu, Arnaud le Febvrier, Zhijia Han, Denis Music, Weishu Liu, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043409 (2023)
https://doi.org/10.1116/6.0002635
Published: June 2023
View article titled, Structural evolution and thermoelectric properties of Mg<sub>3</sub>Sb<sub>x</sub>Bi<sub>2</sub><em><sub>−</sub></em><sub>x</sub> thin films deposited by magnetron sputtering
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Journal Articles

Insufficient reporting of x-ray photoelectron spectroscopy instrumental and peak fitting parameters (metadata) in the scientific literature

George H. Major, B. Maxwell Clark, Kevin Cayabyab, Nathan Engel, Christopher D. Easton, Jan Čechal, Donald R. Baer, Jeff Terry, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043201 (2023)
https://doi.org/10.1116/6.0002714
Published: May 2023
View article titled, Insufficient reporting of x-ray photoelectron spectroscopy instrumental and peak fitting parameters (metadata) in the scientific literature
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Journal Articles

Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)

George H. Major, Joshua W. Pinder, Daniel E. Austin, Donald R. Baer, Steven L. Castle, Jan Čechal, B. Maxwell Clark, Hagai Cohen, Jonathan Counsell, Alberto Herrera-Gomez, Pavitra Govindan, Seong H. Kim, David J. Morgan, Robert L. Opila, Cedric J. Powell, Stanislav Průša, Adam Roberts, Mario Rocca, Naoto Shirahata, Tomáš Šikola, Emily F. Smith, Regina C. So, John E. Stovall, Jennifer Strunk, Andrew Teplyakov, Jeff Terry, Stephen G. Weber, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 038501 (2023)
https://doi.org/10.1116/6.0002437
Published: May 2023
View article titled, Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)
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Journal Articles

Plasma-assisted gas-phase aggregation of clusters for functional nanomaterials

O. Kylián, D. Nikitin, J. Hanuš, S. Ali-Ogly, P. Pleskunov, H. Biederman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 020802 (2023)
https://doi.org/10.1116/6.0002374
Published: March 2023
View article titled, Plasma-assisted gas-phase aggregation of clusters for functional nanomaterials
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Journal Articles

Type-II band alignment for atomic layer deposited HfSiO4 on α-Ga2O3

Xinyi Xia, Jian-Sian Li, Zhuoqun Wen, Kamruzzaman Khan, Md Irfan Khan, Elaheh Ahmadi, Yuichi Oshima, David C. Hays, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023205 (2023)
https://doi.org/10.1116/6.0002453
Published: March 2023
View article titled, Type-II band alignment for atomic layer deposited HfSiO<sub>4</sub> on α-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Dry etching in the presence of physisorption of neutrals at lower temperatures

Thorsten Lill, Ivan L. Berry, Meihua Shen, John Hoang, Andreas Fischer, Theo Panagopoulos, Jane P. Chang, Vahid Vahedi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023005 (2023)
https://doi.org/10.1116/6.0002230
Published: February 2023
View article titled, Dry etching in the presence of physisorption of neutrals at lower temperatures
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Journal Articles

Targeted synthesis of predicted metastable compounds using modulated elemental reactants

Mellie Lemon, Fischer G. Harvel, Renae N. Gannon, Ping Lu, Sven P. Rudin, David C. Johnson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022203 (2023)
https://doi.org/10.1116/6.0002260
Published: February 2023
View article titled, Targeted synthesis of predicted metastable compounds using modulated elemental reactants
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Includes: Supplementary data
Journal Articles

Molecular beam epitaxy of KTaO3

Tobias Schwaigert, Salva Salmani-Rezaie, Matthew R. Barone, Hanjong Paik, Ethan Ray, Michael D. Williams, David A. Muller, Darrell G. Schlom, Kaveh Ahadi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022703 (2023)
https://doi.org/10.1116/6.0002223
Published: February 2023
View article titled, Molecular beam epitaxy of KTaO<sub>3</sub>
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Includes: Supplementary data
Journal Articles

On the possible nature of deep centers in Ga2O3

A. Y. Polyakov, A. I. Kochkova, Amanda Langørgen, Lasse Vines, A. Vasilev, I. V. Shchemerov, A. A. Romanov, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023401 (2023)
https://doi.org/10.1116/6.0002307
Published: January 2023
View article titled, On the possible nature of deep centers in Ga<sub>2</sub>O<sub>3</sub>
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Includes: Supplementary data
Journal Articles

Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma

Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Hubertus Marbach, Klaus Edinger, G. S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013004 (2023)
https://doi.org/10.1116/6.0002234
Published: December 2022
View article titled, Electron beam-induced etching of SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>, and poly-Si assisted by CF<sub>4</sub>/O<sub>2</sub> remote plasma
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Journal Articles

Practical guide to understanding goodness-of-fit metrics used in chemical state modeling of x-ray photoelectron spectroscopy data by synthetic line shapes using nylon as an example

Neal Fairley, Pascal Bargiela, Adam Roberts, Vincent Fernandez, Jonas Baltrusaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013203 (2023)
https://doi.org/10.1116/6.0002196
Published: December 2022
View article titled, Practical guide to understanding goodness-of-fit metrics used in chemical state modeling of x-ray photoelectron spectroscopy data by synthetic line shapes using nylon as an example
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Includes: Supplementary data
Journal Articles

Deep UV AlGaN LED reliability for long duration space missions

Benjamin C. Letson, Simon Barke, Peter Wass, Guido Mueller, Fan Ren, Stephen J. Pearton, John W. Conklin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013202 (2023)
https://doi.org/10.1116/6.0002199
Published: December 2022
View article titled, Deep UV AlGaN LED reliability for long duration space missions
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Journal Articles

Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). I. Introduction to methods useful for large or complex datasets

Tahereh G. Avval, Neal Gallagher, David Morgan, Pascal Bargiela, Neal Fairley, Vincent Fernandez, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063206 (2022)
https://doi.org/10.1116/6.0002082
Published: November 2022
View article titled, Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). I. Introduction to methods useful for large or complex datasets
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Journal Articles

Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). II. Example applications of multiple methods to the degradation of cellulose and tartaric acid

Tahereh G. Avval, Hyrum Haack, Neal Gallagher, David Morgan, Pascal Bargiela, Neal Fairley, Vincent Fernandez, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063205 (2022)
https://doi.org/10.1116/6.0001969
Published: November 2022
View article titled, Practical guide on chemometrics/informatics in x-ray photoelectron spectroscopy (XPS). II. Example applications of multiple methods to the degradation of cellulose and tartaric acid
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Includes: Supplementary data
Journal Articles

Area selective deposition of ruthenium on 3D structures

Kartik Sondhi, Rahul Sharangpani, Ramy Nashed Bassely Said, Joyeeta Nag, Michael Gribelyuk, Senaka Kanakamedala, Raghuveer S. Makala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062412 (2022)
https://doi.org/10.1116/6.0002148
Published: November 2022
View article titled, Area selective deposition of ruthenium on 3D structures
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Includes: Supplementary data