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Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source

J. Vac. Sci. Technol. A 8, 3103–3112 (1990) https://doi.org/10.1116/1.576592

View articletitled, Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source

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Plasma induced gas heating in electron cyclotron resonance sources

S. M. Rossnagel; S. J. Whitehair; C. R. Guarnieri; J. J. Cuomo

J. Vac. Sci. Technol. A 8, 3113–3117 (1990) https://doi.org/10.1116/1.576593

Abstract

View articletitled, Plasma induced gas heating in electron cyclotron resonance sources

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A hyperthermal (0.1–4 eV) F atom beam source suitable for surface etching investigations

Robert J. Levis; Curtis J. Waltman; Lisa M. Cousins; R. Guild Copeland; Stephen R. Leone

J. Vac. Sci. Technol. A 8, 3118–3122 (1990) https://doi.org/10.1116/1.576594

Abstract

View articletitled, A hyperthermal (0.1–4 eV) F atom beam source suitable for surface etching investigations

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Radio frequency sheaths—modeling and experiment

Chris M. Horwitz; T. Puzzer; A. M. Smith

J. Vac. Sci. Technol. A 8, 3123–3131 (1990) https://doi.org/10.1116/1.576595

Abstract

View articletitled, Radio frequency sheaths—modeling and experiment

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Radio frequency sheaths—adjustable waveform model

Chris M. Horwitz; Tom Puzzer

J. Vac. Sci. Technol. A 8, 3132–3140 (1990) https://doi.org/10.1116/1.576596

Abstract

View articletitled, Radio frequency sheaths—adjustable waveform model

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Analysis of time‐of‐flight spectra

E. M. Gibson; C. T. Foxon; J. Zhang; J. H. Batey; B. A. Joyce

J. Vac. Sci. Technol. A 8, 3141–3145 (1990) https://doi.org/10.1116/1.576597

Abstract

View articletitled, Analysis of time‐of‐flight spectra

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Ion beam assisted coating and surface modification with plasma source ion implantation

J. R. Conrad; R. A. Dodd; S. Han; M. Madapura; J. Scheuer; K. Sridharan; F. J. Worzala

J. Vac. Sci. Technol. A 8, 3146–3151 (1990) https://doi.org/10.1116/1.576598

Abstract

View articletitled, Ion beam assisted coating and surface modification with plasma source ion implantation

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Sputtering of excited‐state potassium atoms from electron‐bombarded KBr crystals

M. Kamada; E. T. Arakawa

J. Vac. Sci. Technol. A 8, 3152–3156 (1990) https://doi.org/10.1116/1.576599

Abstract

View articletitled, Sputtering of excited‐state potassium atoms from electron‐bombarded KBr crystals

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Surface‐defect formation in graphite targets during magnetron sputtering

C. W. Chen; D. M. Makowiecki; C. S. Alford; M. A. McKernan; P. B. Ramsey

J. Vac. Sci. Technol. A 8, 3157–3162 (1990) https://doi.org/10.1116/1.576600

Abstract

View articletitled, Surface‐defect formation in graphite targets during magnetron sputtering

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Morphology and crystal orientation of chromium thin films deposited by ion plating

D. D. Wang; Takeo Oki

J. Vac. Sci. Technol. A 8, 3163–3167 (1990) https://doi.org/10.1116/1.576601

Abstract

View articletitled, Morphology and crystal orientation of chromium thin films deposited by ion plating

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Formation of cubic boron nitride films by arc‐like plasma‐enhanced ion plating method

Tsutomu Ikeda; Yoshio Kawate; Yo Hirai

J. Vac. Sci. Technol. A 8, 3168–3174 (1990) https://doi.org/10.1116/1.576602

Abstract

View articletitled, Formation of cubic boron nitride films by arc‐like plasma‐enhanced ion plating method

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Deposition by etching‐enhanced reactive sputtering: A new high‐rate deposition method for SiO₂ and TiO₂

Randall C. Ross

J. Vac. Sci. Technol. A 8, 3175–3178 (1990) https://doi.org/10.1116/1.576603

Abstract

View articletitled, Deposition by etching‐enhanced reactive sputtering: A new high‐rate deposition method for SiO2 and TiO2

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High‐rate sputter deposition of SiO₂ and TiO₂ films for optical applications

S. S. Nandra

J. Vac. Sci. Technol. A 8, 3179–3185 (1990) https://doi.org/10.1116/1.576604

Abstract

View articletitled, High‐rate sputter deposition of SiO2 and TiO2 films for optical applications

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A further study of the state of residual stress in TiN films made by physical vapor deposition methods

A. J. Perry

J. Vac. Sci. Technol. A 8, 3186–3193 (1990) https://doi.org/10.1116/1.576605

Abstract

View articletitled, A further study of the state of residual stress in TiN films made by physical vapor deposition methods

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Optical second‐harmonic generation study of Si and Ge deposition on Si(001)

R. W. J. Hollering; A. J. Hoeven; J. M. Lenssinck

J. Vac. Sci. Technol. A 8, 3194–3197 (1990) https://doi.org/10.1116/1.576606

Abstract

View articletitled, Optical second‐harmonic generation study of Si and Ge deposition on Si(001)

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Yields, sensitivities, and natural line shapes of Auger lines. I. Ag, Si, Al, Mg, and Cu

S. Z. Weisz; O. Resto; Y. Goldstein; A. Many

J. Vac. Sci. Technol. A 8, 3198–3204 (1990) https://doi.org/10.1116/1.576563

Abstract

View articletitled, Yields, sensitivities, and natural line shapes of Auger lines. I. Ag, Si, Al, Mg, and Cu

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Photoemission study of the negative electron affinity surfaces of O/Cs/Si(001)2×1 and O/K/Si(001)2×1

T. Abukawa; Y. Enta; T. Kashiwakura; S. Suzuki; S. Kono; T. Sakamoto

J. Vac. Sci. Technol. A 8, 3205–3209 (1990) https://doi.org/10.1116/1.576564

Abstract

View articletitled, Photoemission study of the negative electron affinity surfaces of O/Cs/Si(001)2×1 and O/K/Si(001)2×1

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Slow positron annihilation spectroscopy and electron microscopy of electron beam evaporated cobalt and nickel silicides

R. L. Frost; A. B. DeWald; M. Zaluzec; J. M. Rigsbee; B. Nielsen; K. G. Lynn

J. Vac. Sci. Technol. A 8, 3210–3217 (1990) https://doi.org/10.1116/1.576565

Abstract

View articletitled, Slow positron annihilation spectroscopy and electron microscopy of electron beam evaporated cobalt and nickel silicides

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Segregation of Ca ions at the MgO(001) surface studied by neutral beam incidence ion scattering spectroscopy

R. Souda; T. Aizawa; Y. Ishizawa; C. Oshima

J. Vac. Sci. Technol. A 8, 3218–3223 (1990) https://doi.org/10.1116/1.576566

Abstract

View articletitled, Segregation of Ca ions at the MgO(001) surface studied by neutral beam incidence ion scattering spectroscopy

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Infrared characterization of methanol adsorbed on Cu(110)

A. Peremans; F. Maseri; J. Darville; J.‐M. Gilles

J. Vac. Sci. Technol. A 8, 3224–3228 (1990) https://doi.org/10.1116/1.576567

Abstract

View articletitled, Infrared characterization of methanol adsorbed on Cu(110)

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Desorption studies of hydrogen and carbon monoxide from nickel surfaces using thermal desorption spectroscopy

A. L. Cabrera

J. Vac. Sci. Technol. A 8, 3229–3236 (1990) https://doi.org/10.1116/1.576568

Abstract

View articletitled, Desorption studies of hydrogen and carbon monoxide from nickel surfaces using thermal desorption spectroscopy

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Methyl radical formation from filament pyrolysis of acetylene and acetylene/hydrogen mixtures within quartz tubes

E. Villa; J. A. Dagata; J. Horwitz; D. Squire; M. C. Lin

J. Vac. Sci. Technol. A 8, 3237–3240 (1990) https://doi.org/10.1116/1.576569

Abstract

View articletitled, Methyl radical formation from filament pyrolysis of acetylene and acetylene/hydrogen mixtures within quartz tubes

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Backstreaming of a perfluorinated polyether pump oil—an x‐ray photoelectron spectroscopy study

Robert Sherman; John Vossen

J. Vac. Sci. Technol. A 8, 3241–3243 (1990) https://doi.org/10.1116/1.576570

Abstract

View articletitled, Backstreaming of a perfluorinated polyether pump oil—an x‐ray photoelectron spectroscopy study

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An electrostatic quadrupole deflector for mass spectrometer applications

P. R. Mahaffy; K. Lai

J. Vac. Sci. Technol. A 8, 3244–3246 (1990) https://doi.org/10.1116/1.576571

Abstract

View articletitled, An electrostatic quadrupole deflector for mass spectrometer applications

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Fiber optic sensor for substrate temperature monitoring

Yunhae Yeh; Chung E. Lee; Robert A. Atkins; William N. Gibler; Henry F. Taylor

J. Vac. Sci. Technol. A 8, 3247–3250 (1990) https://doi.org/10.1116/1.576572

Abstract

View articletitled, Fiber optic sensor for substrate temperature monitoring

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Studies of the electrical and interface properties of the metal contacts to CuInSe₂ single crystals

F. A. Abou‐Elfotouh; L. L. Kazmerski; R. J. Matson; D. J. Dunlavy; T. J. Coutts

J. Vac. Sci. Technol. A 8, 3251–3254 (1990) https://doi.org/10.1116/1.576573

Abstract

View articletitled, Studies of the electrical and interface properties of the metal contacts to CuInSe2 single crystals

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Photoluminescence studies in Zn_xCd_1−xTe single crystals

J. González‐Hernández; Elías López‐Cruz; D. D. Allred; Worth P. Allred

J. Vac. Sci. Technol. A 8, 3255–3259 (1990) https://doi.org/10.1116/1.576574

Abstract

View articletitled, Photoluminescence studies in ZnxCd1−xTe single crystals

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Optical properties of electron‐beam evaporated TiO₂ films deposited in an ionized oxygen medium

K. Narashimha Rao; S. Mohan

J. Vac. Sci. Technol. A 8, 3260–3264 (1990) https://doi.org/10.1116/1.576575

Abstract

View articletitled, Optical properties of electron‐beam evaporated TiO2 films deposited in an ionized oxygen medium

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An anomalous diffusion barrier case: The Hg_1−xCd_xTe/Yb/Ag junction

A. Raisanen; G. Haugstad; X. Yu; G. Ceccone; A. Franciosi

J. Vac. Sci. Technol. A 8, 3265–3273 (1990) https://doi.org/10.1116/1.576576

Abstract

View articletitled, An anomalous diffusion barrier case: The Hg1−xCdxTe/Yb/Ag junction

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Evaluation of the stopping depth of nonradiative recombination centers in Al_0.5Ga_0.5As by Ar⁺ ion beam sputtering by photoluminescence measurements

K. Akita; M. Taneya; Y. Sugimoto; H. Hidaka; M. Tajima

J. Vac. Sci. Technol. A 8, 3274–3278 (1990) https://doi.org/10.1116/1.576577

Abstract

View articletitled, Evaluation of the stopping depth of nonradiative recombination centers in Al0.5Ga0.5As by Ar+ ion beam sputtering by photoluminescence measurements

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Anticipated performance of achromatic quadrupole focusing systems when used with liquid metal ion sources

L. R. Harriott; W. L. Brown; D. L. Barr

J. Vac. Sci. Technol. A 8, 3279–3283 (1990) https://doi.org/10.1116/1.576578

Abstract

View articletitled, Anticipated performance of achromatic quadrupole focusing systems when used with liquid metal ion sources

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Characterization of a large linear ion source

T. Ryan; P. Chamberlain; I. Brown; J. Celliers

J. Vac. Sci. Technol. A 8, 3284–3288 (1990) https://doi.org/10.1116/1.576579

Abstract

View articletitled, Characterization of a large linear ion source

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Microstructure of yttria‐stabilized zirconia overcoats for thin film recording media

A. S. Kao; C. Hwang

J. Vac. Sci. Technol. A 8, 3289–3294 (1990) https://doi.org/10.1116/1.576580

Abstract

View articletitled, Microstructure of yttria‐stabilized zirconia overcoats for thin film recording media

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Interplay of erosion and redeposition processes in seed cone formation

S. Morishita; F. Okuyama

J. Vac. Sci. Technol. A 8, 3295–3299 (1990) https://doi.org/10.1116/1.576581

Abstract

View articletitled, Interplay of erosion and redeposition processes in seed cone formation

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Evaluation of the electron attenuation length for the determination of the lubricant overlayer thickness on magnetic disks with x‐ray photoelectron spectroscopy

Ken‐ichi Nishimori; Kohichi Tanaka; Kazunori Sato

J. Vac. Sci. Technol. A 8, 3300–3303 (1990) https://doi.org/10.1116/1.576582

Abstract

View articletitled, Evaluation of the electron attenuation length for the determination of the lubricant overlayer thickness on magnetic disks with x‐ray photoelectron spectroscopy

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Adhesion studies of metals on fluorocarbon polymer films

Chin‐An Chang; Yong‐Kil Kim; A. G. Schrott

J. Vac. Sci. Technol. A 8, 3304–3309 (1990) https://doi.org/10.1116/1.576583

Abstract

View articletitled, Adhesion studies of metals on fluorocarbon polymer films

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Nonresonant multiphoton ionization of rare gases

Kiyohide Kokubun; Shingo Ichimura; Hiroko Hashizume; Hazime Shimizu; Yoshiro Oowadano; Yuji Matsumoto; Kazuhiro Endo

J. Vac. Sci. Technol. A 8, 3310–3313 (1990) https://doi.org/10.1116/1.576584

Abstract

View articletitled, Nonresonant multiphoton ionization of rare gases

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Thomson space charge in D–T gas

P. C. Souers; R. T. Tsugawa; C. L. Bisson; W. G. Wolfer

J. Vac. Sci. Technol. A 8, 3314–3318 (1990) https://doi.org/10.1116/1.576541

Abstract

View articletitled, Thomson space charge in D–T gas

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Uniform liquid‐fuel layer produced in a cryogenic inertial fusion target by a time‐dependent thermal gradient

R. Q. Gram; M. D. Wittman; C. Immesoete; H. Kim; R. S. Craxton; N. Sampat; S. Swales; G. Pien; J. M. Soures; H. Kong

J. Vac. Sci. Technol. A 8, 3319–3323 (1990) https://doi.org/10.1116/1.576542

Abstract

View articletitled, Uniform liquid‐fuel layer produced in a cryogenic inertial fusion target by a time‐dependent thermal gradient

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Computer‐assisted microballoon selection for inertial confinement fusion targets

C. K. Immesoete; S. Scarantino; H. Kim; L. Forsley

J. Vac. Sci. Technol. A 8, 3324–3326 (1990) https://doi.org/10.1116/1.576543

Abstract

View articletitled, Computer‐assisted microballoon selection for inertial confinement fusion targets

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New method for calculating the molecular flux from an inclined Knudsen cell

Akio Fujiwara

J. Vac. Sci. Technol. A 8, 3327–3332 (1990) https://doi.org/10.1116/1.576544

Abstract

View articletitled, New method for calculating the molecular flux from an inclined Knudsen cell

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An ultrahigh vacuum application of a refrigerator‐cooled cryopump

M. Kasuya; J. Yuyama

J. Vac. Sci. Technol. A 8, 3333–3336 (1990) https://doi.org/10.1116/1.576545

Abstract

View articletitled, An ultrahigh vacuum application of a refrigerator‐cooled cryopump

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Low outgassing and anticorrosive metal surface treatment for ultrahigh vacuum equipment

Kazuhiko Sugiyama; Tadahiro Ohmi; Mizuho Morita; Yoshiyuki Nakahara; Nobuhiro Miki

J. Vac. Sci. Technol. A 8, 3337–3340 (1990) https://doi.org/10.1116/1.576546

Abstract

View articletitled, Low outgassing and anticorrosive metal surface treatment for ultrahigh vacuum equipment

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Sensitivity variation of Bayard–Alpert gauges with and without closed grids from 10⁻⁴ to 1 Pa

R. N. Peacock; N. T. Peacock

J. Vac. Sci. Technol. A 8, 3341–3344 (1990) https://doi.org/10.1116/1.576547

Abstract

View articletitled, Sensitivity variation of Bayard–Alpert gauges with and without closed grids from 10−4 to 1 Pa

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Indirect band gap in α‐ZrO₂

Chee‐Kin Kwok; Carolyn Rubin Aita

J. Vac. Sci. Technol. A 8, 3345–3346 (1990) https://doi.org/10.1116/1.576548

Abstract

View articletitled, Indirect band gap in α‐ZrO2

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Comment on ‘‘aluminum deposition on polyimides: The effect of in situ ion bombardment’’

B. R. Strohmeier

J. Vac. Sci. Technol. A 8, 3347–3349 (1990) https://doi.org/10.1116/1.576549

View articletitled, Comment on ‘‘aluminum deposition on polyimides: The effect of in situ ion bombardment’’

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Amorphous NbO films prepared by reactive evaporation

J. R. Ding; X. Zhou; J. N. Bai; B. X. Liu

J. Vac. Sci. Technol. A 8, 3349–3351 (1990) https://doi.org/10.1116/1.576550

Abstract

View articletitled, Amorphous NbO films prepared by reactive evaporation

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The absence of contamination of mercury from a stainless steel molecular beam epitaxy mercury source

L. M. Mohnkern; K. A. Harris; R. W. Yanka; T. H. Myers; E. M. Skelly Frame

J. Vac. Sci. Technol. A 8, 3352–3354 (1990) https://doi.org/10.1116/1.576551

Abstract

View articletitled, The absence of contamination of mercury from a stainless steel molecular beam epitaxy mercury source

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X‐ray photoelectron spectroscopy peak assignment for perfluoropolyether oils

Shigeyuki Mori; Wilfredo Morales

J. Vac. Sci. Technol. A 8, 3354–3356 (1990) https://doi.org/10.1116/1.576552

View articletitled, X‐ray photoelectron spectroscopy peak assignment for perfluoropolyether oils

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The decomposition of formic acid on Pd(100)

D. Sander; W. Erley

J. Vac. Sci. Technol. A 8, 3357–3360 (1990) https://doi.org/10.1116/1.576553

Abstract

View articletitled, The decomposition of formic acid on Pd(100)

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The durability of ballscrews for ultrahigh vacuum

H. Saeki; J. Ikeda; I. Kohzu; H. Ishimaru

J. Vac. Sci. Technol. A 8, 3360–3362 (1990) https://doi.org/10.1116/1.576554

Abstract

View articletitled, The durability of ballscrews for ultrahigh vacuum

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A simple method for the determination of the angle of incidence for low‐energy electrons

R. Schneider; H. Dürr; Th. Fauster; V. Dose

J. Vac. Sci. Technol. A 8, 3363–3364 (1990) https://doi.org/10.1116/1.576555

View articletitled, A simple method for the determination of the angle of incidence for low‐energy electrons

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Probe position controller for plasma parameter measurement in vacuum

R. L. Abraham; M. A. Hayes

J. Vac. Sci. Technol. A 8, 3364–3368 (1990) https://doi.org/10.1116/1.576556

Abstract

View articletitled, Probe position controller for plasma parameter measurement in vacuum

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A 20–350 K variable‐temperature sample holder with sample interchangeability

I. M. Vitomirov; C. M. Aldao; G. D. Waddill; J. H. Weaver

J. Vac. Sci. Technol. A 8, 3368–3370 (1990) https://doi.org/10.1116/1.576557

Abstract

View articletitled, A 20–350 K variable‐temperature sample holder with sample interchangeability

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A fiberepoxy vacuum vessel with thin walls

H.‐W. Ortner; D. Malz; R. Müller

J. Vac. Sci. Technol. A 8, 3370–3371 (1990) https://doi.org/10.1116/1.576558

Abstract

View articletitled, A fiberepoxy vacuum vessel with thin walls

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Test of a visible/near‐ultraviolet transmitting, coherent fiber‐optic bundle for ultrahigh‐vacuum applications

C. C. Klepper; J. E. Simpkins

J. Vac. Sci. Technol. A 8, 3371–3372 (1990) https://doi.org/10.1116/1.576559

Abstract

View articletitled, Test of a visible/near‐ultraviolet transmitting, coherent fiber‐optic bundle for ultrahigh‐vacuum applications

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Erratum: Physical and chemical properties of the anodic oxide/HgCdTe interface [J. Vac. Sci. Technol. A 7, 474 (1989)]

C. M. Stahle; C. R. Helms; H. F. Schaake; R. L. Strong; A. Simmons; J. B. Pallix; C. H. Becker

J. Vac. Sci. Technol. A 8, 3373 (1990) https://doi.org/10.1116/1.576560

View articletitled, Erratum: Physical and chemical properties of the anodic oxide/HgCdTe interface [J. Vac. Sci. Technol. A 7, 474 (1989)]

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Erratum: Room temperature reaction between polycrystalline Ni/Al bilayers deposited in ultrahigh vacuum [J. Vac. Sci. Technol. A 8, 134 (1990)]

M. W. Ruckman; L. Jiang; Myron Strongin

J. Vac. Sci. Technol. A 8, 3374 (1990) https://doi.org/10.1116/1.576561

View articletitled, Erratum: Room temperature reaction between polycrystalline Ni/Al bilayers deposited in ultrahigh vacuum [J. Vac. Sci. Technol. A 8, 134 (1990)]

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Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface

C. K. Shih; R. M. Feenstra; P. Mårtensson

J. Vac. Sci. Technol. A 8, 3379–3385 (1990) https://doi.org/10.1116/1.576562

Abstract

View articletitled, Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface

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Microfabrication of cantilever styli for the atomic force microscope

T. R. Albrecht; S. Akamine; T. E. Carver; C. F. Quate

J. Vac. Sci. Technol. A 8, 3386–3396 (1990) https://doi.org/10.1116/1.576520

Abstract

View articletitled, Microfabrication of cantilever styli for the atomic force microscope

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Quantitative surface analysis at atomic resolution, atom‐probe field ion microscopy

Tien T. Tsong

J. Vac. Sci. Technol. A 8, 3397–3404 (1990) https://doi.org/10.1116/1.576521

Abstract

View articletitled, Quantitative surface analysis at atomic resolution, atom‐probe field ion microscopy

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Adsorption of boron on Si(111): Physics, chemistry, and atomic‐scale electronic devices

Ph. Avouris; In‐Whan Lyo; F. Bozso; E. Kaxiras

J. Vac. Sci. Technol. A 8, 3405–3411 (1990) https://doi.org/10.1116/1.576522

Abstract

View articletitled, Adsorption of boron on Si(111): Physics, chemistry, and atomic‐scale electronic devices

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Low‐energy electron diffraction intensity analysis of the atomic geometry of p(1×1) monolayers of bismuth on GaAs(110)

C. B. Duke; D. L. Lessor; T. Guo; W. K. Ford

J. Vac. Sci. Technol. A 8, 3412–3416 (1990) https://doi.org/10.1116/1.576523

Abstract

View articletitled, Low‐energy electron diffraction intensity analysis of the atomic geometry of p(1×1) monolayers of bismuth on GaAs(110)

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Slippage of simple liquid films adsorbed on silver and gold substrates

J. Krim; E. T. Watts; J. Digel

J. Vac. Sci. Technol. A 8, 3417–3420 (1990) https://doi.org/10.1116/1.576524

Abstract

View articletitled, Slippage of simple liquid films adsorbed on silver and gold substrates

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Surface segregation of Pt–Rh alloys

N. Sano; T. Sakurai

J. Vac. Sci. Technol. A 8, 3421–3424 (1990) https://doi.org/10.1116/1.576525

Abstract

View articletitled, Surface segregation of Pt–Rh alloys

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Atomic structure of alkali metal overlayers on the Si(001) surface

Inder P. Batra

J. Vac. Sci. Technol. A 8, 3425–3431 (1990) https://doi.org/10.1116/1.576526

Abstract

View articletitled, Atomic structure of alkali metal overlayers on the Si(001) surface

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Time‐resolved reaction studies on the atomic scale: NO and CO adsorption on stepped Rh surfaces

N. Kruse

J. Vac. Sci. Technol. A 8, 3432–3436 (1990) https://doi.org/10.1116/1.576527

Abstract

View articletitled, Time‐resolved reaction studies on the atomic scale: NO and CO adsorption on stepped Rh surfaces

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Characterization of the Pd/a‐Al₂O₃ supported cluster system

F. A. Marks; I. Lindau; R. Browning

J. Vac. Sci. Technol. A 8, 3437–3442 (1990) https://doi.org/10.1116/1.576528

Abstract

View articletitled, Characterization of the Pd/a‐Al2O3 supported cluster system

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Surface reconstructions induced by thin overlayers of indium on Si(111)

D. M. Cornelison; C. S. Chang; I. S. T. Tsong

J. Vac. Sci. Technol. A 8, 3443–3448 (1990) https://doi.org/10.1116/1.576529

Abstract

View articletitled, Surface reconstructions induced by thin overlayers of indium on Si(111)

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Nanomechanics of a Au–Ir contact using a bidirectional atomic force microscope

Sidney R. Cohen; Gabi Neubauer; Gary M. McClelland

J. Vac. Sci. Technol. A 8, 3449–3454 (1990) https://doi.org/10.1116/1.576530

Abstract

View articletitled, Nanomechanics of a Au–Ir contact using a bidirectional atomic force microscope

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Quasicrystalline phases and rational approximants obtained from vapor deposited Al–Mn thin films

J. Reyes‐Gasga; M. José‐Yacamán

J. Vac. Sci. Technol. A 8, 3455–3459 (1990) https://doi.org/10.1116/1.576531

Abstract

View articletitled, Quasicrystalline phases and rational approximants obtained from vapor deposited Al–Mn thin films

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Investigation of In contacts on atomically clean GaAs(110) surfaces

R. Cao; K. Miyano; I. Lindau; W. E. Spicer

J. Vac. Sci. Technol. A 8, 3460–3465 (1990) https://doi.org/10.1116/1.576532

Abstract

View articletitled, Investigation of In contacts on atomically clean GaAs(110) surfaces

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Synthesis and structural properties of ion‐beam sputtered Cu/Ni multilayers

C. Kim; S. B. Qadri; M. Twigg; A. S. Edelstein

J. Vac. Sci. Technol. A 8, 3466–3469 (1990) https://doi.org/10.1116/1.576533

Abstract

View articletitled, Synthesis and structural properties of ion‐beam sputtered Cu/Ni multilayers

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Scanning tunneling microscope observations of MgO fracture surfaces

S. C. Langford; Ma Zhenyi; L. C. Jensen; J. T. Dickinson

J. Vac. Sci. Technol. A 8, 3470–3478 (1990) https://doi.org/10.1116/1.576534

Abstract

View articletitled, Scanning tunneling microscope observations of MgO fracture surfaces

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The effect of surface roughness on reflection high‐energy electron diffraction rocking curves and impact on reflection high‐energy electron diffraction intensity oscillations

W. C. Fan; A. Ignatiev

J. Vac. Sci. Technol. A 8, 3479–3483 (1990) https://doi.org/10.1116/1.576535

Abstract

View articletitled, The effect of surface roughness on reflection high‐energy electron diffraction rocking curves and impact on reflection high‐energy electron diffraction intensity oscillations

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The surface electronic structure and scanning tunneling microscopy of WTe₂

S. L. Tang; R. V. Kasowski; A. Suna

J. Vac. Sci. Technol. A 8, 3484–3487 (1990) https://doi.org/10.1116/1.577106

Abstract

View articletitled, The surface electronic structure and scanning tunneling microscopy of WTe2

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Electronic states of an amorphous semiconductor cluster system: Ge on C

R. Q. Yu; J. Fortner; J. S. Lannin

J. Vac. Sci. Technol. A 8, 3488–3492 (1990) https://doi.org/10.1116/1.576536

Abstract

View articletitled, Electronic states of an amorphous semiconductor cluster system: Ge on C

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Raman scattering of amorphous germanium clusters and ultrathin films

J. Fortner; R. Q. Yu; J. S. Lannin

J. Vac. Sci. Technol. A 8, 3493–3495 (1990) https://doi.org/10.1116/1.576537

Abstract

View articletitled, Raman scattering of amorphous germanium clusters and ultrathin films

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Chemical reaction dynamics of F atom reaction with the dimer reconstructed Si{100}(2×1) surface

T. A. Schoolcraft; B. J. Garrison

J. Vac. Sci. Technol. A 8, 3496–3501 (1990) https://doi.org/10.1116/1.576538

Abstract

View articletitled, Chemical reaction dynamics of F atom reaction with the dimer reconstructed Si{100}(2×1) surface

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Surface force measurements on picometer and piconewton scales

P. J. Bryant; H. S. Kim; R. H. Deeken; Y. C. Cheng

J. Vac. Sci. Technol. A 8, 3502–3505 (1990) https://doi.org/10.1116/1.576539

Abstract

View articletitled, Surface force measurements on picometer and piconewton scales

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Growth mechanisms of Si and Ge epitaxial films on the dimer reconstructed Si{100} surface via molecular dynamics

Deepak Srivastava; Barbara J. Garrison

J. Vac. Sci. Technol. A 8, 3506–3511 (1990) https://doi.org/10.1116/1.576540

Abstract

View articletitled, Growth mechanisms of Si and Ge epitaxial films on the dimer reconstructed Si{100} surface via molecular dynamics

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Externally strained Si(100) observed with scanning tunneling microscopy

William E. Packard; Ning Dai; John D. Dow; Robert C. Jaklevic; William J. Kaiser; S. L. Tang

J. Vac. Sci. Technol. A 8, 3512–3515 (1990) https://doi.org/10.1116/1.576498

Abstract

View articletitled, Externally strained Si(100) observed with scanning tunneling microscopy

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Growth of multidimensional superlattices using step array templates: Evolution of the terrace size distribution

H.‐J. Gossmann; F. W. Sinden; L. C. Feldman

J. Vac. Sci. Technol. A 8, 3516–3519 (1990) https://doi.org/10.1116/1.576499

Abstract

View articletitled, Growth of multidimensional superlattices using step array templates: Evolution of the terrace size distribution

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Behavior of gallium on vicinal Si(100) surfaces

J. Nogami; A. A. Baski; C. F. Quate

J. Vac. Sci. Technol. A 8, 3520–3523 (1990) https://doi.org/10.1116/1.576500

Abstract

View articletitled, Behavior of gallium on vicinal Si(100) surfaces

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Surface photovoltage on Si(111)‐(7×7) probed by optically pumped scanning tunneling microscopy

R. J. Hamers; K. Markert

J. Vac. Sci. Technol. A 8, 3524–3530 (1990) https://doi.org/10.1116/1.576501

Abstract

View articletitled, Surface photovoltage on Si(111)‐(7×7) probed by optically pumped scanning tunneling microscopy

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Molecular dynamics simulations of metal adsorbates on metal surfaces: Rh on Ag(100)

Todd J. Raeker; David E. Sanders; Andrew E. DePristo

J. Vac. Sci. Technol. A 8, 3531–3536 (1990) https://doi.org/10.1116/1.576502

Abstract

View articletitled, Molecular dynamics simulations of metal adsorbates on metal surfaces: Rh on Ag(100)

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Modification of tantalum surfaces by scanning tunneling microscopy in an electrochemical cell

T. Thundat; L. A. Nagahara; P. I. Oden; S. M. Lindsay; M. A. George; W. S. Glaunsinger

J. Vac. Sci. Technol. A 8, 3537–3541 (1990) https://doi.org/10.1116/1.576503

Abstract

View articletitled, Modification of tantalum surfaces by scanning tunneling microscopy in an electrochemical cell

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Local order, epitaxy, and electronic structure of the Bi/III–V semiconductor interfaces

J. J. Joyce; M. M. Nelson; Ming Tang; Y. Meng; J. Anderson; G. J. Lapeyre

J. Vac. Sci. Technol. A 8, 3542–3547 (1990) https://doi.org/10.1116/1.576504

Abstract

View articletitled, Local order, epitaxy, and electronic structure of the Bi/III–V semiconductor interfaces

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The use of splines to analyze scanning tunneling microscopy data

H. Wormeester; H. J. P. van Midden; G. A. M. Kip; A. G. B. M. Sasse

J. Vac. Sci. Technol. A 8, 3548–3554 (1990) https://doi.org/10.1116/1.576505

Abstract

View articletitled, The use of splines to analyze scanning tunneling microscopy data

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Compact scanning tunneling microscope with easy‐to‐construct X–Z inertial sample translation

S. C. Meepagala; F. Real; C. B. Reyes; A. Novoselskaya; Z. Rong; E. L. Wolf

J. Vac. Sci. Technol. A 8, 3555–3557 (1990) https://doi.org/10.1116/1.576506

Abstract

View articletitled, Compact scanning tunneling microscope with easy‐to‐construct X–Z inertial sample translation

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Platinum/iridium tips with controlled geometry for scanning tunneling microscopy

Inga Holl Musselman; Phillip E. Russell

J. Vac. Sci. Technol. A 8, 3558–3562 (1990) https://doi.org/10.1116/1.576507

Abstract

View articletitled, Platinum/iridium tips with controlled geometry for scanning tunneling microscopy

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Lithographic studies of an e‐beam resist in a vacuum scanning tunneling microscope

C. R. K. Marrian; E. A. Dobisz; R. J. Colton

J. Vac. Sci. Technol. A 8, 3563–3569 (1990) https://doi.org/10.1116/1.576508

Abstract

View articletitled, Lithographic studies of an e‐beam resist in a vacuum scanning tunneling microscope

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On the electrochemical etching of tips for scanning tunneling microscopy

J. P. Ibe; P. P. Bey, Jr.; S. L. Brandow; R. A. Brizzolara; N. A. Burnham; D. P. DiLella; K. P. Lee; C. R. K. Marrian; R. J. Colton

J. Vac. Sci. Technol. A 8, 3570–3575 (1990) https://doi.org/10.1116/1.576509

Abstract

View articletitled, On the electrochemical etching of tips for scanning tunneling microscopy

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Vacuum microtriode characteristics

W. N. Carr; H. J. Wang; K. K. Chin; R. B. Marcus

J. Vac. Sci. Technol. A 8, 3581–3585 (1990) https://doi.org/10.1116/1.576510

Abstract

View articletitled, Vacuum microtriode characteristics

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Field emitter tips for vacuum microelectronic devices

K. Ken Chin; R. B. Marcus

J. Vac. Sci. Technol. A 8, 3586–3590 (1990) https://doi.org/10.1116/1.576511

Abstract

View articletitled, Field emitter tips for vacuum microelectronic devices

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Electrical properties, stability, and applications of ultrathin porous Pt films on SiO₂

Rasoul Nowroozi‐Esfahani; G. Jordan Maclay

J. Vac. Sci. Technol. A 8, 3591–3597 (1990) https://doi.org/10.1116/1.576512

Abstract

View articletitled, Electrical properties, stability, and applications of ultrathin porous Pt films on SiO2

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A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts

Don L. Kendall

J. Vac. Sci. Technol. A 8, 3598–3605 (1990) https://doi.org/10.1116/1.576513

Abstract

View articletitled, A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts

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Thin films for micromechanical sensors

D. W. Burns; H. Guckel

J. Vac. Sci. Technol. A 8, 3606–3613 (1990) https://doi.org/10.1116/1.576514

Abstract

View articletitled, Thin films for micromechanical sensors

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Principles in design and microfabrication of variable‐capacitance side‐drive motors

Mehran Mehregany; Stephen F. Bart; Lee S. Tavrow; Jeffrey H. Lang; Stephen D. Senturia

J. Vac. Sci. Technol. A 8, 3614–3624 (1990) https://doi.org/10.1116/1.576515

Abstract

View articletitled, Principles in design and microfabrication of variable‐capacitance side‐drive motors

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An investigation of electrowetting‐based microactuation

Ed Colgate; Hirofumi Matsumoto

J. Vac. Sci. Technol. A 8, 3625–3633 (1990) https://doi.org/10.1116/1.576516

Abstract

View articletitled, An investigation of electrowetting‐based microactuation

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Electrical properties of tungsten trioxide films

Z. Xu; J. F. Vetelino; R. Lec; D. C. Parker

J. Vac. Sci. Technol. A 8, 3634–3638 (1990) https://doi.org/10.1116/1.576517

Abstract

View articletitled, Electrical properties of tungsten trioxide films

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