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Annealing modulated microstructural and electrical properties of plasma-enhanced atomic layer deposition-derived HfO2/SiO2 nanolaminates on AlGaN/GaN
Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H2 reactant and its application to 2D WS2 photodetectors
Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon
Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen
Enhancing minority carrier lifetime in Ge: Insights from HF and HCl cleaning procedures
Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates
Active learning with moment tensor potentials to predict material properties: Ti0.5Al0.5N at elevated temperature
Issues
Letters
Oxidation properties of quaternary Zr-based diboride thin films grown by hybrid high-power impulse/DC magnetron co-sputtering
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 42, 010401 (2024)
https://doi.org/10.1116/6.0003197
Mechanical and tribological properties of diamondlike carbon-coated polycarbonate
Alexander S. Grenadyorov; Yuriy N. Yuriev; Аndrey А. Solovyev; Artem A. Runts; Konstantin V. Oskomov; Vyacheslav A. Semenov; Vladimir S. Sypchenko
J. Vac. Sci. Technol. A 42, 010402 (2024)
https://doi.org/10.1116/6.0003131
ARTICLES
2-D Materials
Effects of electron irradiation on graphene drums
J. Vac. Sci. Technol. A 42, 012201 (2024)
https://doi.org/10.1116/6.0003159
Atomic Layer Deposition (ALD)
Annealing modulated microstructural and electrical properties of plasma-enhanced atomic layer deposition-derived HfO2/SiO2 nanolaminates on AlGaN/GaN
In Special Collection:
Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 42, 012401 (2024)
https://doi.org/10.1116/6.0003000
Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition
In Special Collection:
Atomic Layer Deposition (ALD)
Benjamin L. Greenberg; Kevin P. Anderson; Alan G. Jacobs; Austin J. Cendejas; Jenifer R. Hajzus; Eric A. Patterson; James A. Wollmershauser; Boris N. Feigelson
J. Vac. Sci. Technol. A 42, 012402 (2024)
https://doi.org/10.1116/6.0003182
Exploring Al2O3 blister evolution through cathodoluminescence and attenuated total reflectance infrared analyses
Carolina Bohórquez; Jorge L. Vazquez; Luis E. López; Jorge A. Jurado; David Domínguez; Oscar E. Contreras; Hugo J. Tiznado
J. Vac. Sci. Technol. A 42, 012403 (2024)
https://doi.org/10.1116/6.0003177
Sequential infiltration of two-photon polymerized 3D photonic crystals for mid-IR spectroscopic applications
In Special Collection:
Atomic Layer Deposition (ALD)
Anuj Singhal; Ralu Divan; Anandvinod Dalmiya; Liliana Stan; Arian Ghiacy; Patrick T. Lynch; Igor Paprotny
J. Vac. Sci. Technol. A 42, 012404 (2024)
https://doi.org/10.1116/6.0003271
Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H2 reactant and its application to 2D WS2 photodetectors
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
Dain Shin; Inkyu Sohn; Donghyun Kim; Jaehyeok Kim; Taewook Nam; Youngjun Kim; Jusang Park; Tatsuya Nakazawa; Seung-min Chung; Hyungjun Kim
J. Vac. Sci. Technol. A 42, 012405 (2024)
https://doi.org/10.1116/6.0003194
Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
Adnan Mohammad; Krishna D. Joshi; Dhan Rana; Saidjafarzoda Ilhom; Barrett Wells; Boris Sinkovic; Ali K. Okyay; Necmi Biyikli
J. Vac. Sci. Technol. A 42, 012406 (2024)
https://doi.org/10.1116/6.0002988
Epitaxial Growth of Materials
Growth of large edge length two-dimensional using a custom 12-zone atmospheric pressure chemical vapor deposition system
J. Vac. Sci. Technol. A 42, 012701 (2024)
https://doi.org/10.1116/6.0002985
Near-surface electronic structure in strained Ni-ferrite films: An x-ray absorption spectroscopy study
In Special Collection:
Special Topic Collection Commemorating the Career of Frederick J. Walker
J. Vac. Sci. Technol. A 42, 012702 (2024)
https://doi.org/10.1116/6.0003095
Photovoltaics and Energy
Melt-grown semi-insulating Mn:β-Ga2O3 single crystals exhibiting unique visible absorptions and luminescence
In Special Collection:
Gallium Oxide Materials and Devices
Benjamin L. Dutton; Joel B. Varley; Cassandra Remple; Jani Jesenovec; Brooke K. Downing; Jimmy-Xuan Shen; Soroush Ghandiparsi; Adam T. Neal; Yunjo Kim; Andrew J. Green; Lars F. Voss; Matthew D. McCluskey; John S. McCloy
J. Vac. Sci. Technol. A 42, 012801 (2024)
https://doi.org/10.1116/6.0003212
Plasma Science and Technology
Optimizing impedance matching parameters for single-frequency capacitively coupled plasma via machine learning
J. Vac. Sci. Technol. A 42, 013001 (2024)
https://doi.org/10.1116/5.0173921
Surface Engineering and Coatings
Preparation and performance analysis of Ti-25Nb-3Zr-2Sn-3Mo microarc oxidized macro-micro-nano tertiary structure film layers
J. Vac. Sci. Technol. A 42, 013101 (2024)
https://doi.org/10.1116/6.0003218
Enhancement of hardness and corrosion resistance of Al-Si-N multilayer color coating via SiN/AlSiN/AlN compositional gradient interlayer
Xunwang Shi; Sam Zhang; Jingchuan Li; Yuhang You; Xiuhan Yu; Deen Sun; Yong Shao; Hongji Du; Dawen Wang; Minghua Zhao; Moshu Zhu; Fengji Li
J. Vac. Sci. Technol. A 42, 013102 (2024)
https://doi.org/10.1116/6.0003112
Mechanical and tribological properties of (AlCoCrNiSi)100−xNx thin films
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 42, 013103 (2024)
https://doi.org/10.1116/6.0003253
Statistically distributed nano-scratch testing of AlFeMnNb, AlFeMnNi, and TiN/Si3N4 thin films on silicon
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 42, 013104 (2024)
https://doi.org/10.1116/6.0003189
Surfaces and Interfaces
Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen
J. Vac. Sci. Technol. A 42, 013201 (2024)
https://doi.org/10.1116/6.0003153
Determination of the X-Auger electron spectroscopy evolution of indium in InSb by linear and nonlinear least squares approaches
J. Vac. Sci. Technol. A 42, 013202 (2024)
https://doi.org/10.1116/6.0003086
Enhancing minority carrier lifetime in Ge: Insights from HF and HCl cleaning procedures
Alexandre Chapotot; Jérémie Chrétien; Oleh Fesiienko; Erwine Pargon; Jinyoun Cho; Kristof Dessein; Abderraouf Boucherif; Gwenaëlle Hamon; Maxime Darnon
J. Vac. Sci. Technol. A 42, 013203 (2024)
https://doi.org/10.1116/6.0003236
Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates
J. Vac. Sci. Technol. A 42, 013205 (2024)
https://doi.org/10.1116/6.0003183
Thin Films
Enhanced antifouling and antibacterial performances on polytetrafluoroethylene microporous membranes sputtered with silver nanoparticles
J. Vac. Sci. Technol. A 42, 013402 (2024)
https://doi.org/10.1116/6.0002874
Dynamical reverse folding and residual gas expansion models of flexible thin films
J. Vac. Sci. Technol. A 42, 013403 (2024)
https://doi.org/10.1116/6.0003224
High power pulsed magnetron sputtering tailored low temperature CrAlN + MoWS coatings for dry tribological contacts
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 42, 013404 (2024)
https://doi.org/10.1116/6.0003259
Selective strategy of reactive hysteresis loop for coatings on alloy substrates with different moduli
J. Vac. Sci. Technol. A 42, 013405 (2024)
https://doi.org/10.1116/6.0003127
Effect of He diluted plasma on the deposition of flexible low-temperature polycrystalline silicon thin film
J. Vac. Sci. Technol. A 42, 013407 (2024)
https://doi.org/10.1116/6.0003174
Preparation of p/n-type YBa2Cu3O7−δ/Nd1.85Ce0.15CuO4 superconducting heterostructures
J. Vac. Sci. Technol. A 42, 013408 (2024)
https://doi.org/10.1116/6.0003200
Cu2O/ZnO heterojunction self-powered photodetector performance regulation
J. Vac. Sci. Technol. A 42, 013409 (2024)
https://doi.org/10.1116/6.0003274
Effects of the growth parameters on the surface quality of InN films
J. Vac. Sci. Technol. A 42, 013410 (2024)
https://doi.org/10.1116/6.0003205
Formation of ZnWO4/WO3 composite film by RF magnetron sputtering and calcination
J. Vac. Sci. Technol. A 42, 013411 (2024)
https://doi.org/10.1116/6.0003180
Active learning with moment tensor potentials to predict material properties: Ti0.5Al0.5N at elevated temperature
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 42, 013412 (2024)
https://doi.org/10.1116/6.0003260
Suppression of phase segregations in Ge–Fe–Co–Ni–Mn films by high-entropy effect
Sen Sun; Wenyu Jiang; Qinxin Liu; Yueyong Jiang; Tianyi Zhu; Jie Hu; Honglian Song; Zheng Yang; Xinfeng Hui; Yuanxia Lao
J. Vac. Sci. Technol. A 42, 013413 (2024)
https://doi.org/10.1116/6.0003164
Errata
Surface passivation approaches for silicon, germanium, and III–V semiconductors
Roel J. Theeuwes, Wilhelmus M. M. Kessels, et al.
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
Thorsten Lill, Mingmei Wang, et al.
Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success
Brian C. Welch, Jeanne Casetta, et al.