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Issues
December 2023
ISSN 0734-2101
EISSN 1520-8559
ARTICLES
2-D Materials
Enhancing the reactivity of clean, defect-free epitaxial graphene by the substrate—Experiment and theory
J. Vac. Sci. Technol. A 41, 062201 (2023)
https://doi.org/10.1116/6.0002948
Anticorrosive coatings made from polydopamine modified graphitic C3N4 composites with synergistic anticorrosion effects
J. Vac. Sci. Technol. A 41, 062202 (2023)
https://doi.org/10.1116/6.0002769
Atomic Layer Deposition (ALD)
Plasma Science and Technology
Plasma functionalization mechanism to modify isocyanate groups on multiwalled carbon nanotubes
J. Vac. Sci. Technol. A 41, 063001 (2023)
https://doi.org/10.1116/6.0002835
Selective mask deposition using SiCl4 plasma for highly selective etching process
J. Vac. Sci. Technol. A 41, 063002 (2023)
https://doi.org/10.1116/6.0002773
Surface Engineering and Coatings
Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium
J. Vac. Sci. Technol. A 41, 063101 (2023)
https://doi.org/10.1116/6.0002878
Preparation and hot corrosion properties of the AlCrFeCoNi0.5Si high-entropy alloy coating deposited by the air plasma spraying
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
J. Vac. Sci. Technol. A 41, 063102 (2023)
https://doi.org/10.1116/6.0002951
Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings
J. Vac. Sci. Technol. A 41, 063103 (2023)
https://doi.org/10.1116/6.0002885
Self-joule heating assisted field emission following the Child–Langmuir law
J. Vac. Sci. Technol. A 41, 063104 (2023)
https://doi.org/10.1116/5.0159964
Tissue evolution and properties of plasma solid-state surface metallurgical TiCoCrNiWMo high-entropy alloy coatings
Xin Li; Zixiang Zhou; Chenglei Wang; Haiqing Qin; Jijie Yang; Weijie Liu; Mulin Liang; Chong Liu; Hong Tan; Zhenjun Zhang
J. Vac. Sci. Technol. A 41, 063105 (2023)
https://doi.org/10.1116/6.0002872
Surfaces and Interfaces
Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times
In Special Collection:
Atomic Layer Deposition (ALD)
Partha Sarathi Padhi; R. S. Ajimsha; S. K. Rai; Sushmita Bhartiya; Aniruddha Bose; Bidyadhar Das; Manoj Kumar Tiwari; Pankaj Misra
J. Vac. Sci. Technol. A 41, 063201 (2023)
https://doi.org/10.1116/6.0002849
Application of machine learning to spectrum and image data
In Special Collection:
Reproducibility Challenges and Solutions II with a Focus on Surface and Interface Analysis
J. Vac. Sci. Technol. A 41, 063202 (2023)
https://doi.org/10.1116/6.0002858
Thermal transport and structural improvements due to annealing of wafer bonded β-Ga2O3|4H-SiC
In Special Collection:
Gallium Oxide Materials and Devices
J. Vac. Sci. Technol. A 41, 063203 (2023)
https://doi.org/10.1116/6.0002693
Effect of data preprocessing and machine learning hyperparameters on mass spectrometry imaging models
In Special Collection:
Reproducibility Challenges and Solutions II with a Focus on Surface and Interface Analysis
Wil Gardner; David A. Winkler; David L. J. Alexander; Davide Ballabio; Benjamin W. Muir; Paul J. Pigram
J. Vac. Sci. Technol. A 41, 063204 (2023)
https://doi.org/10.1116/6.0002788
β-Ga2O3 orientation dependence of band offsets with SiO2 and Al2O3
Hsiao-Hsuan Wan; Jian-Sian Li; Chao-Ching Chiang; Xinyi Xia; David C. Hays; Fan Ren; Stephen J. Pearton
J. Vac. Sci. Technol. A 41, 063205 (2023)
https://doi.org/10.1116/6.0003039
Thin Films
Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array
J. Vac. Sci. Technol. A 41, 063401 (2023)
https://doi.org/10.1116/6.0002875
Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
In Special Collection:
Celebrating the Achievements and Life of Joe Greene
Faezeh A. F. Lahiji; Samiran Bairagi; Roger Magnusson; Mauricio A. Sortica; Daniel Primetzhofer; Erik Ekström; Biplab Paul; Arnaud le Febvrier; Per Eklund
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Si-containing interlayer using tetramethylsilene for diamondlike carbon film adhesion on low-alloy steel: The role of the interlayer deposition time
Jennifer Stefani Weber; Vanessa Piroli; Michael Cristian Goldbeck; Bruna Louise Perotti; Carla Daniela Boeira; Newton Kiyoshi Fukumasu; Alexandre Fassini Michels; Carlos Alejandro Figueroa
J. Vac. Sci. Technol. A 41, 063403 (2023)
https://doi.org/10.1116/6.0002911