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Review Articles

Review of major technologies improving surface performances of Ti alloys for implant biomaterials

S. X. Liang; K. Y. Liu; L. X. Yin; G. W. Huang; Y. D. Shi; L. Y. Zheng; Z. G. Xing

J. Vac. Sci. Technol. A 40, 030801 (2022) https://doi.org/10.1116/6.0001801

Abstract

View articletitled, Review of major technologies improving surface performances of Ti alloys for implant biomaterials

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Review of recent studies on nanoscale electrical junctions and contacts: Quantum tunneling, current crowding, and interface engineering

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Sneha Banerjee; Peng Zhang

J. Vac. Sci. Technol. A 40, 030802 (2022) https://doi.org/10.1116/6.0001724

Abstract

View articletitled, Review of recent studies on nanoscale electrical junctions and contacts: Quantum tunneling, current crowding, and interface engineering

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Commemorating the Career of Pat Thiel

Preface

Preface for the special collection commemorating the career of Pat Thiel

In Special Collection: Commemorating the Career of Pat Thiel

Donna A. Chen; Ann Lii-Rosales; James W. Evans

J. Vac. Sci. Technol. A 40, 031601 (2022) https://doi.org/10.1116/6.0001807

Extract

View articletitled, Preface for the special collection commemorating the career of Pat Thiel

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ARTICLES

2-D Materials

Effect of substrate and substrate temperature on the deposition of MoS₂ by radio frequency magnetron sputtering

Valiyaparambil J. Cicily Rigi; Madambi K. Jayaraj; Kachirayil J. Saji

J. Vac. Sci. Technol. A 40, 032201 (2022) https://doi.org/10.1116/6.0001685

Abstract

View articletitled, Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering

Supplementary Material

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Selective vapor sensors with thin-film MoS₂-coated optical fibers

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Michael Motala; Lucas K. Beagle; Jason Lynch; David C. Moore; Peter R. Stevenson; Anna Benton; Ly D. Tran; Luke A. Baldwin; Drake Austin; Christopher Muratore; Deep Jariwala; Nicholas R. Glavin

J. Vac. Sci. Technol. A 40, 032202 (2022) https://doi.org/10.1116/6.0001759

Abstract

View articletitled, Selective vapor sensors with thin-film MoS2-coated optical fibers

Supplementary Material

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Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Mehmet Fidan; Özhan Ünverdi; Cem Çelebi

J. Vac. Sci. Technol. A 40, 032203 (2022) https://doi.org/10.1116/6.0001758

Abstract

View articletitled, Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers

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Atomic Layer Deposition (ALD)

Flexible atomic layer deposition system for coating porous materials

In Special Collection: Atomic Layer Deposition (ALD)

Woo-Jae Lee; Ohhun Kwon; Renjing Huang; Chao Lin; Raymond J. Gorte; John M. Vohs

J. Vac. Sci. Technol. A 40, 032401 (2022) https://doi.org/10.1116/6.0001679

Abstract

View articletitled, Flexible atomic layer deposition system for coating porous materials

Supplementary Material

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CHORUS

Plasma-enhanced atomic layer deposition of aluminum-indium oxide thin films and associated device applications

In Special Collection: Atomic Layer Deposition (ALD)

Won-Bum Lee; Hyun-Jun Jeong; Hye-Mi Kim; Jin-Seong Park

J. Vac. Sci. Technol. A 40, 032402 (2022) https://doi.org/10.1116/6.0001643

Abstract

View articletitled, Plasma-enhanced atomic layer deposition of aluminum-indium oxide thin films and associated device applications

Supplementary Material

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Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

In Special Collection: Atomic Layer Deposition (ALD)

Daniela Fontecha; R. Blake Nuwayhid; Alexander C. Kozen; David M. Stewart; Gary W. Rubloff; Keith E. Gregorczyk

J. Vac. Sci. Technol. A 40, 032403 (2022) https://doi.org/10.1116/6.0001752

Abstract

View articletitled, Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

Supplementary Material

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Atomic Layer Etching (ALE)

Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing

In Special Collection: Atomic Layer Etching (ALE)

Nobuya Miyoshi; Nicholas McDowell; Hiroyuki Kobayashi

J. Vac. Sci. Technol. A 40, 032601 (2022) https://doi.org/10.1116/6.0001827

Abstract

View articletitled, Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing

Supplementary Material

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In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride

In Special Collection: Atomic Layer Etching (ALE)

Johanna Reif; Martin Knaut; Sebastian Killge; Matthias Albert; Thomas Mikolajick; Johann W. Bartha

J. Vac. Sci. Technol. A 40, 032602 (2022) https://doi.org/10.1116/6.0001630

Abstract

View articletitled, In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride

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Atomic layer etching of Al₂O₃ with NF₃ plasma fluorination and trimethylaluminum ligand exchange

In Special Collection: Atomic Layer Etching (ALE)

Jihyun Kim; Dahee Shim; Yongjae Kim; Heeyeop Chae

J. Vac. Sci. Technol. A 40, 032603 (2022) https://doi.org/10.1116/6.0001616

Abstract

View articletitled, Atomic layer etching of Al2O3 with NF3 plasma fluorination and trimethylaluminum ligand exchange

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Epitaxial Growth of Materials

Crystal structure analysis of stacking faults through scanning transmission electron microscopy of β-Ga₂O₃ (001) layer grown via halide vapor phase epitaxy

In Special Collection: Gallium Oxide Materials and Devices

Kenichi Ogawa; Kenji Kobayashi; Noriyuki Hasuike; Toshiyuki Isshiki

J. Vac. Sci. Technol. A 40, 032701 (2022) https://doi.org/10.1116/6.0001799

Abstract

View articletitled, Crystal structure analysis of stacking faults through scanning transmission electron microscopy of β-Ga2O3 (001) layer grown via halide vapor phase epitaxy

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Effect of V/III ratio and growth pressure on surface and crystal quality of AlN grown on sapphire by metal-organic chemical vapor deposition

Isabel Streicher; Stefano Leone; Lutz Kirste; Oliver Ambacher

J. Vac. Sci. Technol. A 40, 032702 (2022) https://doi.org/10.1116/6.0001794

Abstract

View articletitled, Effect of V/III ratio and growth pressure on surface and crystal quality of AlN grown on sapphire by metal-organic chemical vapor deposition

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Investigation of the growth mechanism and crystallographic structures of GaSb dots nucleation layer and GaSb thin film grown on Si(001) substrate by molecular beam epitaxy

Ryuto Machida; Ryusuke Toda; Shinsuke Hara; Issei Watanabe; Kouichi Akahane; Sachie Fujikawa; Akifumi Kasamatsu; Hiroki I. Fujishiro

J. Vac. Sci. Technol. A 40, 032703 (2022) https://doi.org/10.1116/6.0001810

Abstract

View articletitled, Investigation of the growth mechanism and crystallographic structures of GaSb dots nucleation layer and GaSb thin film grown on Si(001) substrate by molecular beam epitaxy

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Photovoltaics and Energy

Assessing thermodynamical properties of Al_1−xGa_xSb alloys and optical modes for Al_1−xGa_xSb/GaAs epifilms and (AlSb)_m/(GaSb)_n superlattices

Devki N. Talwar; Hao-Hsiung Lin

J. Vac. Sci. Technol. A 40, 032801 (2022) https://doi.org/10.1116/6.0001611

Abstract

View articletitled, Assessing thermodynamical properties of Al1−xGaxSb alloys and optical modes for Al1−xGaxSb/GaAs epifilms and (AlSb)m/(GaSb)n superlattices

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Plasma Science and Technology

Comparative studies of cold/hot probe techniques for accurate plasma measurements

Jian-quan Li; Qing-he Zhang; Zan-yang Xing; Wen-qi Lu

J. Vac. Sci. Technol. A 40, 033001 (2022) https://doi.org/10.1116/6.0001461

Abstract

View articletitled, Comparative studies of cold/hot probe techniques for accurate plasma measurements

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Surfaces and Interfaces

Early stage nucleation mechanism for SiC(0001) surface epitaxial growth

Wensen Ai; Xuejiang Chen; Jianmei Feng

J. Vac. Sci. Technol. A 40, 033201 (2022) https://doi.org/10.1116/6.0001684

Abstract

View articletitled, Early stage nucleation mechanism for SiC(0001) surface epitaxial growth

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Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

Farzin Abadizaman; Jaden Love; Stefan Zollner

J. Vac. Sci. Technol. A 40, 033202 (2022) https://doi.org/10.1116/6.0001763

Abstract

View articletitled, Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements

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Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Abdulhakim Bake; Weiyao Zhao; David Mitchell; Xiaolin Wang; Mitchell Nancarrow; David Cortie

J. Vac. Sci. Technol. A 40, 033203 (2022) https://doi.org/10.1116/6.0001771

Abstract

View articletitled, Lamellae preparation for atomic-resolution STEM imaging from ion-beam-sensitive topological insulator crystals

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Who were the founders of synchrotron radiation? Historical facts and misconceptions

In Special Collection: Commemorating the Career of David Arthur Shirley

Giorgio Margaritondo

J. Vac. Sci. Technol. A 40, 033204 (2022) https://doi.org/10.1116/6.0001686

Abstract

View articletitled, Who were the founders of synchrotron radiation? Historical facts and misconceptions

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Thorium model and weak 5f delocalization

J. G. Tobin; S. Nowak; S.-W. Yu; P. Roussel; R. Alonso-Mori; T. Kroll; D. Nordlund; T.-C. Weng; D. Sokaras

J. Vac. Sci. Technol. A 40, 033205 (2022) https://doi.org/10.1116/6.0001754

Abstract

View articletitled, Thorium model and weak 5f delocalization

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CHORUS

Technical and personal remembrances of David A. Shirley in studies of surface magnetism, photoelectron spectroscopy, EUV lithography, and hydrogen storage

In Special Collection: Commemorating the Career of David Arthur Shirley

L. E. Klebanoff

J. Vac. Sci. Technol. A 40, 033206 (2022) https://doi.org/10.1116/6.0001816

Abstract

View articletitled, Technical and personal remembrances of David A. Shirley in studies of surface magnetism, photoelectron spectroscopy, EUV lithography, and hydrogen storage

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CHORUS

Thin Films

Phase transition behavior in nanostructured VO₂ with M1, M2, and R phases observed via temperature-dependent XRD measurements

Kazutaka Nishikawa; Masamichi Yoshimura; Yoshihide Watanabe

J. Vac. Sci. Technol. A 40, 033401 (2022) https://doi.org/10.1116/6.0001705

Abstract

View articletitled, Phase transition behavior in nanostructured VO2 with M1, M2, and R phases observed via temperature-dependent XRD measurements

Supplementary Material

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Phase evolution and morphology in Cu-In-Ga sputtered precursors

Isaac K. Lam; Kyeongchan Moon; Sina Soltanmohammad; Gregory M. Hanket; Woo Kyoung Kim; William N. Shafarman

J. Vac. Sci. Technol. A 40, 033402 (2022) https://doi.org/10.1116/6.0001712

Abstract

View articletitled, Phase evolution and morphology in Cu-In-Ga sputtered precursors

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CHORUS

Evolving surface morphology during epitaxy of NiO on Ag(001)

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Hanno D. Goldbach; Joachim Wollschläger

J. Vac. Sci. Technol. A 40, 033403 (2022) https://doi.org/10.1116/6.0001446

Abstract

View articletitled, Evolving surface morphology during epitaxy of NiO on Ag(001)

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Chemical vapor deposition of sp²-boron nitride films on Al₂O₃ (0001), $(11 \bar{2})$ ⁠, $(1 \bar{1} 02)$ ⁠, and $(10 \bar{1})$ substrates

Sachin Sharma; Laurent Souqui; Henrik Pedersen; Hans Högberg

J. Vac. Sci. Technol. A 40, 033404 (2022) https://doi.org/10.1116/6.0001672

Abstract

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Effect of interface roughness on the tribo-corrosion behavior of diamond like carbon coatings on titanium alloy

In Special Collection: Functional Coatings

Fabrice Pougoum; Anna Jedrzejczak; Marwan Azzi; Ludvik Martinu; Jolanta E. Klemberg-Sapieha

J. Vac. Sci. Technol. A 40, 033405 (2022) https://doi.org/10.1116/6.0001657

Abstract

View articletitled, Effect of interface roughness on the tribo-corrosion behavior of diamond like carbon coatings on titanium alloy

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All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Yifan Cheng; Alexandra Khlyustova; Rong Yang

J. Vac. Sci. Technol. A 40, 033406 (2022) https://doi.org/10.1116/6.0001718

Abstract

View articletitled, All-dry free radical polymerization inside nanopores: Ion-milling-enabled coating thickness profiling revealed “necking” phenomena

Supplementary Material

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CHORUS

Manipulation of thin metal film morphology on weakly interacting substrates via selective deployment of alloying species

In Special Collection: Functional Coatings

Andreas Jamnig; Nikolaos Pliatsikas; Gregory Abadias; Kostas Sarakinos

J. Vac. Sci. Technol. A 40, 033407 (2022) https://doi.org/10.1116/6.0001700

Abstract

View articletitled, Manipulation of thin metal film morphology on weakly interacting substrates via selective deployment of alloying species

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Relationship between local coordinates and thermal conductivity in amorphous carbon

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Emi Minamitani; Takuma Shiga; Makoto Kashiwagi; Ippei Obayashi

J. Vac. Sci. Technol. A 40, 033408 (2022) https://doi.org/10.1116/6.0001744

Abstract

View articletitled, Relationship between local coordinates and thermal conductivity in amorphous carbon

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CHORUS

Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

In Special Collection: Gallium Oxide Materials and Devices

Dmitry Kalanov; Yeliz Unutulmazsoy; Daniel Spemann; Jens Bauer; André Anders; Carsten Bundesmann

J. Vac. Sci. Technol. A 40, 033409 (2022) https://doi.org/10.1116/6.0001825

Abstract

View articletitled, Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

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Magnetron sputtered NiAl/TiB_x multilayer thin films

In Special Collection: Functional Coatings

Tomasz Wojcik; Vincent Ott; Sedat Özbilen; Harald Leiste; Sven Ulrich; Paul Heinz Mayrhofer; Helmut Riedl; Michael Stueber

J. Vac. Sci. Technol. A 40, 033410 (2022) https://doi.org/10.1116/6.0001734

Abstract

View articletitled, Magnetron sputtered NiAl/TiBx multilayer thin films

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Experimental analysis of folic acid adsorption on TiO₂ thin-films

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Linda Bertel; Rogelio Ospina; José Miguel García-Martín; David A. Miranda

J. Vac. Sci. Technol. A 40, 033411 (2022) https://doi.org/10.1116/6.0001762

Abstract

View articletitled, Experimental analysis of folic acid adsorption on TiO2 thin-films

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Optical dielectric properties of HfO₂-based films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Hongyi Dou; Nives Strkalj; Yizhi Zhang; Judith L. MacManus-Driscoll; Quanxi Jia; Haiyan Wang

J. Vac. Sci. Technol. A 40, 033412 (2022) https://doi.org/10.1116/6.0001651

Abstract

View articletitled, Optical dielectric properties of HfO2-based films

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CHORUS

Design of sphere seeds for glancing angle deposition

Chuang Qu; Shamus McNamara; Kevin Walsh

J. Vac. Sci. Technol. A 40, 033413 (2022) https://doi.org/10.1116/6.0001770

Abstract

View articletitled, Design of sphere seeds for glancing angle deposition

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CHORUS

Structure evolution and mechanical properties of co-sputtered Zr-Al-B₂ thin films

Tomáš Fiantok; Viktor Šroba; Nikola Koutná; Vitalii Izai; Tomáš Roch; Martin Truchlý; Marek Vidiš; Leonid Satrapinskyy; Štefan Nagy; Branislav Grančič; Peter Kúš; Marián Mikula

J. Vac. Sci. Technol. A 40, 033414 (2022) https://doi.org/10.1116/6.0001802

Abstract

View articletitled, Structure evolution and mechanical properties of co-sputtered Zr-Al-B2 thin films

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On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal–carbon nanotube coating properties on silica substrates

Tairan da Cunha; Noureddine Adjeroud; Jérôme Guillot; Benoit Duez; Damien Lenoble; Didier Arl

J. Vac. Sci. Technol. A 40, 033415 (2022) https://doi.org/10.1116/6.0001806

Abstract

View articletitled, On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal–carbon nanotube coating properties on silica substrates

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Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons

In Special Collection: Gallium Oxide Materials and Devices

T.-Huong Dang; M. Konczykowski; H. Jaffrès; V. I. Safarov; H.-J. Drouhin

J. Vac. Sci. Technol. A 40, 033416 (2022) https://doi.org/10.1116/6.0001821

Abstract

View articletitled, Modification of β-gallium oxide electronic properties by irradiation with high-energy electrons

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Energy storage performance in lead-free antiferroelectric 0.92(Bi_0.54Na_0.46)TiO₃-0.08BaTiO₃ ultrathin films by pulsed laser deposition

José de Jesús Serralta-Macías; Rodolfo Antonio Rodriguez-Davila; Manuel Quevedo-Lopez; Daniel Olguín; Santos Jesús Castillo; Chadwin D. Young; José Martin Yáñez-Limón

J. Vac. Sci. Technol. A 40, 033417 (2022) https://doi.org/10.1116/6.0001755

Abstract

View articletitled, Energy storage performance in lead-free antiferroelectric 0.92(Bi0.54Na0.46)TiO3-0.08BaTiO3 ultrathin films by pulsed laser deposition

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Issues

Cover Image

Review Articles

Commemorating the Career of Pat Thiel

Preface

ARTICLES

2-D Materials

Atomic Layer Deposition (ALD)

Atomic Layer Etching (ALE)

Epitaxial Growth of Materials

Photovoltaics and Energy

Plasma Science and Technology

Surfaces and Interfaces

Thin Films

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