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Letters

Betavoltaic cell based on Ni/β-Ga₂O₃ and ⁶³Ni source

In Special Collection: Gallium Oxide Materials and Devices

Eugene B. Yakimov; Alexander Y. Polyakov; Stephen J. Pearton

J. Vac. Sci. Technol. A 40, 010401 (2022) https://doi.org/10.1116/6.0001533

Abstract

View articletitled, Betavoltaic cell based on Ni/β-Ga2O3 and 63Ni source

Supplementary Material

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CHORUS

Review Articles

Epitaxial oxide thin films for oxygen electrocatalysis: A tutorial review

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Prajwal Adiga; Kelsey A. Stoerzinger

J. Vac. Sci. Technol. A 40, 010801 (2022) https://doi.org/10.1116/6.0001429

Abstract

View articletitled, Epitaxial oxide thin films for oxygen electrocatalysis: A tutorial review

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CHORUS

Self-assembled vertically aligned nanocomposite systems integrated on silicon substrate: Progress and future perspectives

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Di Zhang; Matias Kalaswad; Haiyan Wang

J. Vac. Sci. Technol. A 40, 010802 (2022) https://doi.org/10.1116/6.0001479

Abstract

View articletitled, Self-assembled vertically aligned nanocomposite systems integrated on silicon substrate: Progress and future perspectives

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CHORUS

Many routes to ferroelectric HfO₂: A review of current deposition methods

Hanan Alexandra Hsain; Younghwan Lee; Monica Materano; Terence Mittmann; Alexis Payne; Thomas Mikolajick; Uwe Schroeder; Gregory N. Parsons; Jacob L. Jones

J. Vac. Sci. Technol. A 40, 010803 (2022) https://doi.org/10.1116/6.0001317

Abstract

View articletitled, Many routes to ferroelectric HfO2: A review of current deposition methods

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CHORUS

Probing the polar-nonpolar oxide interfaces using resonant x-ray standing wave techniques

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Cheng-Tai Kuo; Shih-Chieh Lin; Yi-De Chuang

J. Vac. Sci. Technol. A 40, 010804 (2022) https://doi.org/10.1116/6.0001484

Abstract

View articletitled, Probing the polar-nonpolar oxide interfaces using resonant x-ray standing wave techniques

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CHORUS

Low-energy ion scattering from quasicrystals

In Special Collection: Commemorating the Career of Pat Thiel

Robert Bastasz

J. Vac. Sci. Technol. A 40, 010805 (2022) https://doi.org/10.1116/6.0001502

Abstract

View articletitled, Low-energy ion scattering from quasicrystals

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Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Takeo Ohsawa

J. Vac. Sci. Technol. A 40, 010806 (2022) https://doi.org/10.1116/6.0001469

Abstract

View articletitled, Atomic-scale growth, imaging, spectroscopy, and electronic transport properties of metal-oxide films and interfaces

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Anisotropic magnetoresistance and planar Hall effect in correlated and topological materials

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Tianlin Li; Le Zhang; Xia Hong

J. Vac. Sci. Technol. A 40, 010807 (2022) https://doi.org/10.1116/6.0001443

Abstract

View articletitled, Anisotropic magnetoresistance and planar Hall effect in correlated and topological materials

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CHORUS

In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges

In Special Collection: Commemorating the Career of Charles S. Fadley

Sungun Wi; Vaithiyalingam Shutthanandan; Bhuvaneswari M. Sivakumar; Suntharampillai Thevuthasan; Venkateshkumar Prabhakaran; Swadipta Roy; Ajay Karakoti; Vijayakumar Murugesan

J. Vac. Sci. Technol. A 40, 010808 (2022) https://doi.org/10.1116/6.0001460

Abstract

View articletitled, In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges

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CHORUS

ARTICLES

2-D Materials

Nucleation, growth, and stability of WSe₂ thin films deposited on HOPG examined using in situ, real-time synchrotron x-ray radiation

In Special Collection: Commemorating the Career of Pat Thiel

Hugh J. Bullen; Suresh Vishwanath; Rambert K. Nahm; H. Grace Xing; James R. Engstrom

J. Vac. Sci. Technol. A 40, 012201 (2022) https://doi.org/10.1116/6.0001407

Abstract

View articletitled, Nucleation, growth, and stability of WSe2 thin films deposited on HOPG examined using in situ, real-time synchrotron x-ray radiation

Supplementary Material

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Thermodynamics and kinetics of H adsorption and intercalation for graphene on 6H-SiC(0001) from first-principles calculations

In Special Collection: Commemorating the Career of Pat Thiel

Yong Han; James W. Evans; Michael C. Tringides

J. Vac. Sci. Technol. A 40, 012202 (2022) https://doi.org/10.1116/6.0001343

Abstract

View articletitled, Thermodynamics and kinetics of H adsorption and intercalation for graphene on 6H-SiC(0001) from first-principles calculations

Supplementary Material

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Two-dimensional metal structures revealed by evolutionary computations: Pb/Al₁₃Co₄(100) as a case study

In Special Collection: Commemorating the Career of Pat Thiel

Florian Brix; Émilie Gaudry

J. Vac. Sci. Technol. A 40, 012203 (2022) https://doi.org/10.1116/6.0001439

Abstract

View articletitled, Two-dimensional metal structures revealed by evolutionary computations: Pb/Al13Co4(100) as a case study

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Atomic Layer Deposition (ALD)

Epitaxial growth by atomic layer deposition and properties of high-k barium strontium titanate on Zintl-templated Ge (001) substrates

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Thanh Tung Le; Chon Hei Lam; Agham B. Posadas; Alexander A. Demkov; John G. Ekerdt

J. Vac. Sci. Technol. A 40, 012401 (2022) https://doi.org/10.1116/6.0001445

Abstract

View articletitled, Epitaxial growth by atomic layer deposition and properties of high-k barium strontium titanate on Zintl-templated Ge (001) substrates

Supplementary Material

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Modulating the optoelectronic properties of hybrid Mo-thiolate thin films

In Special Collection: Functional Coatings

Jingwei Shi; Li Zeng; Shayla Nikzad; David M. Koshy; Arun S. Asundi; Callisto MacIsaac; Stacey F. Bent

J. Vac. Sci. Technol. A 40, 012402 (2022) https://doi.org/10.1116/6.0001378

Abstract

View articletitled, Modulating the optoelectronic properties of hybrid Mo-thiolate thin films

Supplementary Material

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CHORUS

Area-selective atomic layer deposition of Al₂O₃ on SiN_x with SiO₂ as the nongrowth surface

In Special Collection: Celebrating the Early Career Professionals Contributing to the Advancement of Thin Films, Surfaces, Interfaces, and Plasmas

Wanxing Xu; Ryan J. Gasvoda; Paul C. Lemaire; Kashish Sharma; Dennis M. Hausmann; Sumit Agarwal

J. Vac. Sci. Technol. A 40, 012403 (2022) https://doi.org/10.1116/6.0001449

Abstract

View articletitled, Area-selective atomic layer deposition of Al2O3 on SiNx with SiO2 as the nongrowth surface

Supplementary Material

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Comparison of AlF₃ thin films grown by thermal and plasma enhanced atomic layer deposition

In Special Collection: Atomic Layer Deposition (ALD)

Daniel C. Messina; Brianna S. Eller; Paul A. Scowen; Robert J. Nemanich

J. Vac. Sci. Technol. A 40, 012404 (2022) https://doi.org/10.1116/6.0001468

Abstract

View articletitled, Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition

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CHORUS

Machine learning approach to thickness prediction from in situ spectroscopic ellipsometry data for atomic layer deposition processes

In Special Collection: Atomic Layer Deposition (ALD)

Ayush Arunachalam; S. Novia Berriel; Corbin Feit; Udit Kumar; Sudipta Seal; Kanad Basu; Parag Banerjee

J. Vac. Sci. Technol. A 40, 012405 (2022) https://doi.org/10.1116/6.0001482

Abstract

View articletitled, Machine learning approach to thickness prediction from in situ spectroscopic ellipsometry data for atomic layer deposition processes

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CHORUS

Atomic Layer Etching (ALE)

Atomic layer etching of SiO₂ with self-limiting behavior on the surface modification step using sequential exposure of HF and NH₃

In Special Collection: Atomic Layer Etching (ALE)

Nobuya Miyoshi; Hiroyuki Kobayashi; Kazunori Shinoda; Masaru Kurihara; Kohei Kawamura; Yutaka Kouzuma; Masaru Izawa

J. Vac. Sci. Technol. A 40, 012601 (2022) https://doi.org/10.1116/6.0001517

Abstract

View articletitled, Atomic layer etching of SiO2 with self-limiting behavior on the surface modification step using sequential exposure of HF and NH3

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Photovoltaics and Energy

Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)₃

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Jingjing Liu; Sa Zhang; Ming Jiang; Haiyan Xiao; Shan Feng; Liang Qiao

J. Vac. Sci. Technol. A 40, 012801 (2022) https://doi.org/10.1116/6.0001471

Abstract

View articletitled, Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)3

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Plasma Science and Technology

Various evolution trends of sample thickness in fluorocarbon film deposition on SiO₂

Youngseok Lee; Inho Seong; Jangjae Lee; Sangho Lee; Chulhee Cho; Sijun Kim; ShinJae You

J. Vac. Sci. Technol. A 40, 013001 (2022) https://doi.org/10.1116/6.0001466

Abstract

View articletitled, Various evolution trends of sample thickness in fluorocarbon film deposition on SiO2

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Optical emission spectroscopy and Langmuir probe studies of an intermediate pressure, supersonic microplasma jet deposition source

Katherine E. Mackie; Michael J. Gordon

J. Vac. Sci. Technol. A 40, 013002 (2022) https://doi.org/10.1116/6.0001386

Abstract

View articletitled, Optical emission spectroscopy and Langmuir probe studies of an intermediate pressure, supersonic microplasma jet deposition source

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Surfaces and Interfaces

Phase-separated indenofluorene arrays stabilized by hydrogen and halogen bonds on Au(111)

Jong Hwan Park; Min Hui Chang; Won Jun Jang; Seungwu Han; Se-Jong Kahng

J. Vac. Sci. Technol. A 40, 013201 (2022) https://doi.org/10.1116/6.0001345

Abstract

View articletitled, Phase-separated indenofluorene arrays stabilized by hydrogen and halogen bonds on Au(111)

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Detection of H₂ facilitated by ionic liquid gating of tungsten oxide films

In Special Collection: Functional Coatings

Martin S. Barbosa; Ranilson A. da Silva; Clara Santato; Marcelo O. Orlandi

J. Vac. Sci. Technol. A 40, 013202 (2022) https://doi.org/10.1116/6.0001405

Abstract

View articletitled, Detection of H2 facilitated by ionic liquid gating of tungsten oxide films

Supplementary Material

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Reflection absorption infrared spectroscopy of the surface chemistry of furfural on Pd(111)

In Special Collection: Commemorating the Career of Pat Thiel

Robert Bavisotto; Sree Pradipta Roy; Wilfred T. Tysoe

J. Vac. Sci. Technol. A 40, 013203 (2022) https://doi.org/10.1116/6.0001355

Abstract

View articletitled, Reflection absorption infrared spectroscopy of the surface chemistry of furfural on Pd(111)

Supplementary Material

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CHORUS

X-ray photoelectron spectroscopy study of Pt-cluster-induced electronic-state change of CeO₂(111) surfaces

Syed Mohammad Fakruddin Shahed; Atsushi Beniya; Hirohito Hirata; Yoshihide Watanabe

J. Vac. Sci. Technol. A 40, 013204 (2022) https://doi.org/10.1116/6.0001382

Abstract

View articletitled, X-ray photoelectron spectroscopy study of Pt-cluster-induced electronic-state change of CeO2(111) surfaces

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Polarization fluctuation of BaTiO₃ at unit cell level mapped by four-dimensional scanning transmission electron microscopy

Tim B. Eldred; Jacob G. Smith; Wenpei Gao

J. Vac. Sci. Technol. A 40, 013205 (2022) https://doi.org/10.1116/6.0001451

Abstract

View articletitled, Polarization fluctuation of BaTiO3 at unit cell level mapped by four-dimensional scanning transmission electron microscopy

Supplementary Material

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CHORUS

Effect of buffer termination on intermixing and conductivity in LaTiO₃/SrTiO₃ heterostructures integrated on Si(100)

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Tongjie Chen; Kamyar Ahmadi-Majlan; Zheng Hui Lim; Zhan Zhang; Joseph H. Ngai; Divine P. Kumah

J. Vac. Sci. Technol. A 40, 013206 (2022) https://doi.org/10.1116/6.0001464

Abstract

View articletitled, Effect of buffer termination on intermixing and conductivity in LaTiO3/SrTiO3 heterostructures integrated on Si(100)

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CHORUS

Prospects for the expansion of standing wave ambient pressure photoemission spectroscopy to reactions at elevated temperatures

In Special Collection: Commemorating the Career of Charles S. Fadley

Osman Karslıoğlu; Lena Trotochaud; Farhad Salmassi; Eric M. Gullikson; Andrey Shavorskiy; Slavomir Nemšák; Hendrik Bluhm

J. Vac. Sci. Technol. A 40, 013207 (2022) https://doi.org/10.1116/6.0001353

Abstract

View articletitled, Prospects for the expansion of standing wave ambient pressure photoemission spectroscopy to reactions at elevated temperatures

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CHORUS

Effect of capping layers on the near-surface region of SrVO₃ films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Shaked Caspi; Lishai Shoham; Maria Baskin; Kamira Weinfeld; Cinthia Piamonteze; Kelsey A. Stoerzinger; Lior Kornblum

J. Vac. Sci. Technol. A 40, 013208 (2022) https://doi.org/10.1116/6.0001419

Abstract

View articletitled, Effect of capping layers on the near-surface region of SrVO3 films

Supplementary Material

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Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO₂(111) thin films: The role of the ceria support

In Special Collection: Commemorating the Career of Pat Thiel

Erik W. Peterson; Huanru Wang; Zongyuan Liu; Tasnim Ara; Sanjaya D. Senanayake; Jose A. Rodriguez; Jing Zhou

J. Vac. Sci. Technol. A 40, 013209 (2022) https://doi.org/10.1116/6.0001409

Abstract

View articletitled, Infrared reflection absorption spectroscopy and temperature-programmed desorption studies of CO adsorption on Ni/CeO2(111) thin films: The role of the ceria support

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CHORUS

Step barrier effects during early stages of the kinetic roughening of fcc(111) surfaces

In Special Collection: Commemorating the Career of Pat Thiel

Joachim Wollschläger; Mats I. Larsson

J. Vac. Sci. Technol. A 40, 013210 (2022) https://doi.org/10.1116/6.0001410

Abstract

View articletitled, Step barrier effects during early stages of the kinetic roughening of fcc(111) surfaces

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Growth of pentacene molecules on Tsai-type quasicrystals and related crystal surfaces

In Special Collection: Commemorating the Career of Pat Thiel

H. R. Sharma; S. Coates; A. Alofi; R. McGrath

J. Vac. Sci. Technol. A 40, 013211 (2022) https://doi.org/10.1116/6.0001412

Abstract

View articletitled, Growth of pentacene molecules on Tsai-type quasicrystals and related crystal surfaces

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Quantum size effects in Ag thin films grown on the fivefold surface of the icosahedral Al-Cu-Fe quasicrystal: Influence of the growth temperature

In Special Collection: Commemorating the Career of Pat Thiel

A. K. Shukla; J. Ledieu; E. Gaudry; D. M. Wu; T. A. Lograsso; V. Fournée

J. Vac. Sci. Technol. A 40, 013212 (2022) https://doi.org/10.1116/6.0001450

Abstract

View articletitled, Quantum size effects in Ag thin films grown on the fivefold surface of the icosahedral Al-Cu-Fe quasicrystal: Influence of the growth temperature

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Disclosing the response of the surface electronic structure in SrTiO₃ (001) to strain

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Eduardo Bonini Guedes; Tobias Willemoes Jensen; Muntaser Naamneh; Alla Chikina; Ramus T. Dahm; Shinhee Yun; Francesco M. Chiabrera; Nicholas C. Plumb; J. Hugo Dil; Ming Shi; Dennis Valbjørn Christensen; Walber Hugo Brito; Nini Pryds; Milan Radović

J. Vac. Sci. Technol. A 40, 013213 (2022) https://doi.org/10.1116/6.0001480

Abstract

View articletitled, Disclosing the response of the surface electronic structure in SrTiO3 (001) to strain

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Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La₂CuO₄ thin films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Y. Eren Suyolcu; Georg Christiani; Patrick T. Gemperline; Sydney R. Provence; Annette Bussmann-Holder; Ryan B. Comes; Peter A. van Aken; Gennady Logvenov

J. Vac. Sci. Technol. A 40, 013214 (2022) https://doi.org/10.1116/6.0001473

Abstract

View articletitled, Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La2CuO4 thin films

Supplementary Material

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Hard x-ray photoelectron spectroscopy of tunable oxide interfaces

In Special Collection: Commemorating the Career of Charles S. Fadley

Martina Müller; Patrick Lömker; Paul Rosenberger; Mai Hussein Hamed; David N. Mueller; Ronja A. Heinen; Thomas Szyjka; Lutz Baumgarten

J. Vac. Sci. Technol. A 40, 013215 (2022) https://doi.org/10.1116/6.0001491

Abstract

View articletitled, Hard x-ray photoelectron spectroscopy of tunable oxide interfaces

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Oxygen reduction reaction properties of vacuum-deposited Pt on thermally grown epitaxial graphene layers

Masashi Watanabe; Takafumi Kanauchi; Yoshihiro Chida; Kenta Hayashi; Naoto Todoroki; Toshimasa Wadayama

J. Vac. Sci. Technol. A 40, 013216 (2022) https://doi.org/10.1116/6.0001379

Abstract

View articletitled, Oxygen reduction reaction properties of vacuum-deposited Pt on thermally grown epitaxial graphene layers

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Thin Films

Optical properties of La_1−xSr_xVO₃ (0 ≤ x ≤ 1) films grown on LSAT substrates using radio frequency sputtering deposition

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Ye Jin Oh; Dae Ho Jung; Jae Jun Lee; Thi Thu Nguyen; Jong Soo Rhyee; Hosun Lee

J. Vac. Sci. Technol. A 40, 013401 (2022) https://doi.org/10.1116/6.0001438

Abstract

View articletitled, Optical properties of La1−xSrxVO3 (0 ≤ x ≤ 1) films grown on LSAT substrates using radio frequency sputtering deposition

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Influence of substrate temperature on graphene oxide thin films synthesis by laser ablation technique

Juan D. Lopez; Manuel A. Castellanos; Henry Riascos

J. Vac. Sci. Technol. A 40, 013402 (2022) https://doi.org/10.1116/6.0001153

Abstract

View articletitled, Influence of substrate temperature on graphene oxide thin films synthesis by laser ablation technique

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Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Chuan Li; Jang Hsing Hsieh; Chuan Ming Su; Nai-Yun Chang

J. Vac. Sci. Technol. A 40, 013403 (2022) https://doi.org/10.1116/6.0001404

Abstract

View articletitled, Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

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Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Alessandro R. Mazza; Xingyao Gao; Daniel J. Rossi; Brianna L. Musico; Tyler W. Valentine; Zachary Kennedy; Jie Zhang; Jason Lapano; Veerle Keppens; Robert G. Moore; Matthew Brahlek; Christina M. Rost; Thomas Z. Ward

J. Vac. Sci. Technol. A 40, 013404 (2022) https://doi.org/10.1116/6.0001441

Abstract

View articletitled, Searching for superconductivity in high entropy oxide Ruddlesden–Popper cuprate films

Supplementary Material

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CHORUS

Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering

Nilton Francelosi A. Neto; Cristiane Stegemann; Lucas J. Affonço; Douglas M. G. Leite; José H. D. da Silva

J. Vac. Sci. Technol. A 40, 013405 (2022) https://doi.org/10.1116/6.0001418

Abstract

View articletitled, Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering

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Effect of heat treatment on the optical, structural, and morphological properties of Eu³⁺-doped CaTa₄O₁₁ thin films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Shinho Cho

J. Vac. Sci. Technol. A 40, 013406 (2022) https://doi.org/10.1116/6.0001440

Abstract

View articletitled, Effect of heat treatment on the optical, structural, and morphological properties of Eu3+-doped CaTa4O11 thin films

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Transparent conductive properties of TiON thin films

Housei Akazawa

J. Vac. Sci. Technol. A 40, 013407 (2022) https://doi.org/10.1116/6.0001434

Abstract

View articletitled, Transparent conductive properties of TiON thin films

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Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment

Minglei Yang; Guangyu He; Jiao Chen; Zhaolu Zhang; Guanjun Yang; Zezhou Sun

J. Vac. Sci. Technol. A 40, 013408 (2022) https://doi.org/10.1116/6.0001346

Abstract

View articletitled, Research on the preparation and performance of anti-dust self-cleaning film on Mars dusty environment

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Hole selective nickel oxide as transparent conductive oxide

David Tröger; Johanna Reif; Thomas Mikolajick; Matthias Grube

J. Vac. Sci. Technol. A 40, 013409 (2022) https://doi.org/10.1116/6.0001391

Abstract

View articletitled, Hole selective nickel oxide as transparent conductive oxide

Supplementary Material

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Growth of flat-topped, mound-shaped grains with voids when depositing silver thin films at high substrate temperatures using direct-current magnetron sputtering

Eiji Kusano

J. Vac. Sci. Technol. A 40, 013410 (2022) https://doi.org/10.1116/6.0001476

Abstract

View articletitled, Growth of flat-topped, mound-shaped grains with voids when depositing silver thin films at high substrate temperatures using direct-current magnetron sputtering

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Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO₃ thin films

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Claudia Lau; Nicholas G. Combs; Evguenia Karapetrova; Juan Jiang; Susanne Stemmer; Charles H. Ahn; Frederick J. Walker

J. Vac. Sci. Technol. A 40, 013411 (2022) https://doi.org/10.1116/6.0001454

Abstract

View articletitled, Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO3 thin films

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CHORUS

Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films

In Special Collection: Functional Coatings

Arnaud Krumpmann; Rony Snyders

J. Vac. Sci. Technol. A 40, 013412 (2022) https://doi.org/10.1116/6.0001423

Abstract

View articletitled, Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films

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Epitaxial growth of metastable La_0.67Sr_0.33MnO_3−δ films by using Sr₃Al₂O₆ as multifunctional buffer layers

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Yanhan Fang; Wenjie Sun; Lu Han; Zeya Li; Haoying Sun; Hongtao Yuan; Zhengbin Gu; Yuefeng Nie

J. Vac. Sci. Technol. A 40, 013413 (2022) https://doi.org/10.1116/6.0001428

Abstract

View articletitled, Epitaxial growth of metastable La0.67Sr0.33MnO3−δ films by using Sr3Al2O6 as multifunctional buffer layers

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CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

In Special Collection: Functional Coatings

K. Bobzin; T. Brögelmann; N. C. Kruppe; H. J. Maier; T. Heidenblut; H.-B. Besserer; C. Kahra; J. Janowitz

J. Vac. Sci. Technol. A 40, 013414 (2022) https://doi.org/10.1116/6.0001462

Abstract

View articletitled, CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

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Functionalized carbon nanotubes for thermionic emission and cooling applications

In Special Collection: Functional Coatings

Feng Jin; Ansibert Miruko; Daniel Litt; Karolena Zhou

J. Vac. Sci. Technol. A 40, 013415 (2022) https://doi.org/10.1116/6.0001467

Abstract

View articletitled, Functionalized carbon nanotubes for thermionic emission and cooling applications

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CHORUS

Facile growth of epitaxial vanadium monoxide on SrTiO₃ via substrate oxygen scavenging

In Special Collection: Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films

Agham B. Posadas; Sunah Kwon; Adam Christensen; Moon J. Kim; Alexander A. Demkov

J. Vac. Sci. Technol. A 40, 013416 (2022) https://doi.org/10.1116/6.0001539

Abstract

View articletitled, Facile growth of epitaxial vanadium monoxide on SrTiO3 via substrate oxygen scavenging

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Crystal-phase-specific near-infrared photoluminescence from Er³⁺-doped Bi₂O₃ thin films

Housei Akazawa

J. Vac. Sci. Technol. A 40, 013417 (2022) https://doi.org/10.1116/6.0001597

Abstract

View articletitled, Crystal-phase-specific near-infrared photoluminescence from Er3+-doped Bi2O3 thin films

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Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl₄ + H₂O

Kristina L. Malinowski; Shawn A. Gregory; Jamie P. Wooding; Oliver B. Hvidsten; Alexandra Jungreis; Mark D. Losego

J. Vac. Sci. Technol. A 40, 013418 (2022) https://doi.org/10.1116/6.0001544

Abstract

View articletitled, Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O

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