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First principles investigation of chemisorption of moderately heavy atoms on semiconductor surfaces—bromine on silicon
J. Vac. Sci. Technol. A 4, 2441–2446 (1986)
https://doi.org/10.1116/1.574088
Hydrogen isotope sorption and recovery by a nonevaporable getter combined with a chemical compressor material
J. Vac. Sci. Technol. A 4, 2447–2451 (1986)
https://doi.org/10.1116/1.574089
Surface processes leading to carbon contamination of photochemically deposited copper films
J. Vac. Sci. Technol. A 4, 2452–2458 (1986)
https://doi.org/10.1116/1.574090
An x‐ray photoelectron spectroscopy study of poly(methylmethacrylate) and poly(α‐methylstyrene) surfaces irradiated by excimer lasers
J. Vac. Sci. Technol. A 4, 2459–2462 (1986)
https://doi.org/10.1116/1.574091
Surface analyses of the CdSe0.65Te0.35/aqueous polysulfide interface in relation to its photoelectrochemical properties
J. Vac. Sci. Technol. A 4, 2470–2476 (1986)
https://doi.org/10.1116/1.574093
The influence of substrate temperature on the optical losses of ZnS film
J. Vac. Sci. Technol. A 4, 2477–2481 (1986)
https://doi.org/10.1116/1.574094
Surface morphology of chemical vapor deposition grown Ge on Ge substrates
J. Vac. Sci. Technol. A 4, 2482–2491 (1986)
https://doi.org/10.1116/1.573715
The determination of amorphous layer thickness in ion implanted silicon using secondary ion mass spectrometry
J. Vac. Sci. Technol. A 4, 2492–2498 (1986)
https://doi.org/10.1116/1.573716
Properties of a‐Si,Ge:H,F alloys prepared by rf glow discharge in an ultrahigh vacuum reactor
J. Vac. Sci. Technol. A 4, 2499–2504 (1986)
https://doi.org/10.1116/1.573717
Radio frequency‐plasma oxidation of fine‐grained Pb‐alloy films formed by codeposition at 90 K
J. Vac. Sci. Technol. A 4, 2505–2509 (1986)
https://doi.org/10.1116/1.573718
Aluminum alloy ultrahigh vacuum system for molecular beam epitaxy
J. Vac. Sci. Technol. A 4, 2515–2519 (1986)
https://doi.org/10.1116/1.573720
Data analysis for particle balance studies on the axially symmetric divertor experiment
J. Vac. Sci. Technol. A 4, 2520–2525 (1986)
https://doi.org/10.1116/1.573721
A three‐point‐pressure method for measuring the gas‐flow rate through a conducting pipe
J. Vac. Sci. Technol. A 4, 2526–2530 (1986)
https://doi.org/10.1116/1.573722
The advantages of vertical turbomolecular vacuum pumps with an upper journal bearing
J. Vac. Sci. Technol. A 4, 2531–2532 (1986)
https://doi.org/10.1116/1.573723
An extended core‐hole Hamiltonian for a combined study of electron stimulated desorption and photoemission
J. Vac. Sci. Technol. A 4, 2533–2536 (1986)
https://doi.org/10.1116/1.573724
TiN high temperature diffusion barrier for copper‐gasketed stainless‐steel flanges
J. Vac. Sci. Technol. A 4, 2537–2538 (1986)
https://doi.org/10.1116/1.573725
Erratum: Summary Abstract: Aluminum deposition on low‐temperature GaAs [J. Vac. Sci. Technol. A 4, 882 (1986)]
J. Vac. Sci. Technol. A 4, 2539 (1986)
https://doi.org/10.1116/1.573726
Evaluation of sputter ion plated CoCrAlY and NiCrAlTi coatings for gas turbines
J. Vac. Sci. Technol. A 4, 2557–2564 (1986)
https://doi.org/10.1116/1.573727
Titanium distribution in multilayer oxide scales on oxidized INCOLOY 800H
J. Vac. Sci. Technol. A 4, 2565–2570 (1986)
https://doi.org/10.1116/1.573728
Structure and 700 °C hot corrosion behavior of chromium modified platinum–aluminide coatings
J. Vac. Sci. Technol. A 4, 2571–2576 (1986)
https://doi.org/10.1116/1.573729
The oxidation behavior of some FeCrAlY, FeCrAl, and yttrium ion‐implanted FeCrAl alloys compared and contrasted
J. Vac. Sci. Technol. A 4, 2577–2582 (1986)
https://doi.org/10.1116/1.573730
High‐temperature behavior of different coatings in high‐performance gas turbines and in laboratory tests
J. Vac. Sci. Technol. A 4, 2583–2592 (1986)
https://doi.org/10.1116/1.573731
The development of electrodeposits for high‐temperature oxidation/corrosion resistance
J. Vac. Sci. Technol. A 4, 2593–2597 (1986)
https://doi.org/10.1116/1.573732
Stabilized zirconia–alumina thin films
J. Vac. Sci. Technol. A 4, 2598–2600 (1986)
https://doi.org/10.1116/1.573733
A study of yttrium‐modified aluminide coatings on IN 738 alloy
J. Vac. Sci. Technol. A 4, 2601–2608 (1986)
https://doi.org/10.1116/1.573734
Thin‐film temperature sensors for gas turbine engines: Problems and prospects
J. Vac. Sci. Technol. A 4, 2609–2617 (1986)
https://doi.org/10.1116/1.573735
Coatings for performance retention
J. Vac. Sci. Technol. A 4, 2624–2628 (1986)
https://doi.org/10.1116/1.573693
A new chromium carbide‐based tribological coating for use to 900 °C with particular reference to the Stirling engine
J. Vac. Sci. Technol. A 4, 2629–2632 (1986)
https://doi.org/10.1116/1.573694
Properties of Co+Cr2O3: A wear protective dispersion coating for use at high temperatures
J. Vac. Sci. Technol. A 4, 2633–2637 (1986)
https://doi.org/10.1116/1.573695
Characterization of coating processes and coatings for steam turbine blades
J. Vac. Sci. Technol. A 4, 2638–2647 (1986)
https://doi.org/10.1116/1.573696
Calculations and experimental study of the thermally affected layer caused by friction
J. Vac. Sci. Technol. A 4, 2648–2651 (1986)
https://doi.org/10.1116/1.573697
Ionization assisted physical vapor deposition of zirconia thermal barrier coatings
J. Vac. Sci. Technol. A 4, 2656–2660 (1986)
https://doi.org/10.1116/1.573699
Material selection for hard coatings
J. Vac. Sci. Technol. A 4, 2661–2669 (1986)
https://doi.org/10.1116/1.573700
The color of TiN and HfN: Aging effects
J. Vac. Sci. Technol. A 4, 2670–2673 (1986)
https://doi.org/10.1116/1.573701
Summary Abstract: Hard composite coatings of TiN with C or BN
J. Vac. Sci. Technol. A 4, 2678–2679 (1986)
https://doi.org/10.1116/1.573703
Summary Abstract: The use of intermediate layers to improve the adherence of diamondlike carbon films on ZnS and ZnSe
J. Vac. Sci. Technol. A 4, 2680–2681 (1986)
https://doi.org/10.1116/1.573704
A transmission electron microscopy study on Ti–N films deposited by ion plating
J. Vac. Sci. Technol. A 4, 2682–2685 (1986)
https://doi.org/10.1116/1.573705
Turning performance of reactively ion plated Ti–N coatings
J. Vac. Sci. Technol. A 4, 2686–2690 (1986)
https://doi.org/10.1116/1.573706
Electrochemically measured porosity of magnetron sputtered TiN films deposited at various substrate orientations
J. Vac. Sci. Technol. A 4, 2691–2694 (1986)
https://doi.org/10.1116/1.573707
On structure and properties of sputtered Ti and Al based hard compound films
J. Vac. Sci. Technol. A 4, 2695–2700 (1986)
https://doi.org/10.1116/1.573708
Composition, structure, and wear resistance of TiAlOC coatings deposited by chemical vapor deposition
J. Vac. Sci. Technol. A 4, 2707–2712 (1986)
https://doi.org/10.1116/1.573711
The role of interface development during chemical vapor deposition in the performance of TiC‐coated cemented carbide cutting tools
J. Vac. Sci. Technol. A 4, 2713–2716 (1986)
https://doi.org/10.1116/1.573712
Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition process
J. Vac. Sci. Technol. A 4, 2726–2730 (1986)
https://doi.org/10.1116/1.573714
Problems encountered with the introduction of ion plating to large‐scale coating of tools
J. Vac. Sci. Technol. A 4, 2731–2739 (1986)
https://doi.org/10.1116/1.573671
TiN‐coated high‐speed steel cutting tools
J. Vac. Sci. Technol. A 4, 2755–2758 (1986)
https://doi.org/10.1116/1.573674
Spalling resistance of physical vapor deposited and chemical vapor deposited TiN coated carbide indexable inserts in a short duration milling test
J. Vac. Sci. Technol. A 4, 2759–2762 (1986)
https://doi.org/10.1116/1.573675
Comparison of wear characteristics and properties of TiN‐coated gear cutting hobs
J. Vac. Sci. Technol. A 4, 2763–2767 (1986)
https://doi.org/10.1116/1.573676
Some observations of gear‐cutting operations with TiN‐coated hobs and shaper cutters
J. Vac. Sci. Technol. A 4, 2768–2769 (1986)
https://doi.org/10.1116/1.573677
Microstructural and microchemical characterization of hard coatings
J. Vac. Sci. Technol. A 4, 2770–2783 (1986)
https://doi.org/10.1116/1.573678
Low temperature oxidation behavior of reactively sputtered TiN by x‐ray photoelectron spectroscopy and contact resistance measurements
J. Vac. Sci. Technol. A 4, 2784–2788 (1986)
https://doi.org/10.1116/1.573679
Characterization of nitride coatings by Auger electron spectroscopy and x‐ray photoelectron spectroscopy
J. Vac. Sci. Technol. A 4, 2789–2796 (1986)
https://doi.org/10.1116/1.573680
Studies of interfacial composition of TiN films formed by plasma‐assisted chemical vapor deposition using an in situ scratching device
J. Vac. Sci. Technol. A 4, 2797–2800 (1986)
https://doi.org/10.1116/1.573681
Very hard W–C coatings on stainless steel by rf reactive magnetron sputtering
J. Vac. Sci. Technol. A 4, 2819–2826 (1986)
https://doi.org/10.1116/1.573685
On the morphology of thermochemically produced Fe2B/Fe interfaces
J. Vac. Sci. Technol. A 4, 2827–2831 (1986)
https://doi.org/10.1116/1.573686
Chemical vapor deposition and physical vapor deposition coatings: Properties, tribological behavior, and applications
J. Vac. Sci. Technol. A 4, 2832–2843 (1986)
https://doi.org/10.1116/1.573687
Friction and wear reduction in tool steel by ion beam enhanced TiN deposition
J. Vac. Sci. Technol. A 4, 2844–2849 (1986)
https://doi.org/10.1116/1.573688
Tribological properties of MoNx coatings in contact with copper
J. Vac. Sci. Technol. A 4, 2850–2854 (1986)
https://doi.org/10.1116/1.573689
Improving the wear resistance by forming hard metal matrix–ceramic composite surface layers
J. Vac. Sci. Technol. A 4, 2857–2861 (1986)
https://doi.org/10.1116/1.573691
The effect of crystallization on the wear resistance of electroless deposited Ni–P amorphous coatings
J. Vac. Sci. Technol. A 4, 2862–2866 (1986)
https://doi.org/10.1116/1.573692
Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium
J. Vac. Sci. Technol. A 4, 2874–2878 (1986)
https://doi.org/10.1116/1.573651
Characterization of hard nitride and carbide titanium and zirconium coatings on high‐speed steel cutting tool inserts
J. Vac. Sci. Technol. A 4, 2879–2884 (1986)
https://doi.org/10.1116/1.573652
Ion implantation of Ti and C in 440C steel for enhanced resistance to lubricated sliding wear
J. Vac. Sci. Technol. A 4, 2885–2891 (1986)
https://doi.org/10.1116/1.573653
Structure property relationships of carbonaceous films grown under ion enhancement
J. Vac. Sci. Technol. A 4, 2892–2899 (1986)
https://doi.org/10.1116/1.573654
Summary Abstract: The characterization and microanalysis of films with Auger and x‐ray photoelectron spectroscopies
J. Vac. Sci. Technol. A 4, 2900–2901 (1986)
https://doi.org/10.1116/1.573655
Summary Abstract: Characterization of thin films by analytical electron microscopy
J. Vac. Sci. Technol. A 4, 2902–2904 (1986)
https://doi.org/10.1116/1.573656
Summary Abstract: Effects of superalloy and coating structures on hot corrosion
J. Vac. Sci. Technol. A 4, 2905–2906 (1986)
https://doi.org/10.1116/1.573657
Thermal stability of heat‐reflective films consisting of oxide–Ag–oxide deposited by dc magnetron sputtering
J. Vac. Sci. Technol. A 4, 2907–2910 (1986)
https://doi.org/10.1116/1.573658
A study of defects in sputtered TiN coatings by electrochemical polarization
J. Vac. Sci. Technol. A 4, 2911–2914 (1986)
https://doi.org/10.1116/1.573659
Transmission electron microscopy characterization of the microstructure of a CoCrAlY electron beam physical vapor deposition coating on IN738
J. Vac. Sci. Technol. A 4, 2915–2921 (1986)
https://doi.org/10.1116/1.573660
Summary Abstract: Structural consequences of ion assisted deposition
J. Vac. Sci. Technol. A 4, 2922–2924 (1986)
https://doi.org/10.1116/1.573661
Adhesion and structure of rf‐sputtered magnesium oxide coatings on various metal substrates
J. Vac. Sci. Technol. A 4, 2932–2937 (1986)
https://doi.org/10.1116/1.573663
Effect of film composition and microstructure on microindentation response in amorphous alloy coatings
J. Vac. Sci. Technol. A 4, 2943–2948 (1986)
https://doi.org/10.1116/1.573665
Ultralow load hardness testing of coatings in a scanning electron microscope
J. Vac. Sci. Technol. A 4, 2956–2958 (1986)
https://doi.org/10.1116/1.573668
Raman determination of molecular structure and physical properties of dielectric coatings
J. Vac. Sci. Technol. A 4, 2962–2968 (1986)
https://doi.org/10.1116/1.573609
Modifying structure and properties of optical films by coevaporation
J. Vac. Sci. Technol. A 4, 2969–2974 (1986)
https://doi.org/10.1116/1.573610
Effect of nucleation layers on the growth and magnetic properties of CoCr and CoCr‐X films
J. Vac. Sci. Technol. A 4, 2975–2987 (1986)
https://doi.org/10.1116/1.573611
Nanosecond pulsed laser‐induced segregation of Te in TeOx films
J. Vac. Sci. Technol. A 4, 2988–2992 (1986)
https://doi.org/10.1116/1.573612
Wear and friction measurements of ion beam induced Fe–Ti surface alloys on AISI 304 stainless steel
J. Vac. Sci. Technol. A 4, 2997–3001 (1986)
https://doi.org/10.1116/1.573614
Friction, wear, and corrosion control in rolling bearings through coatings and surface modification: A review
J. Vac. Sci. Technol. A 4, 3002–3006 (1986)
https://doi.org/10.1116/1.573615
A microtribometer for measurement of friction and adhesion of coatings
J. Vac. Sci. Technol. A 4, 3015–3018 (1986)
https://doi.org/10.1116/1.573617
Summary Abstract: Oxygen enhanced adhesion of platinum films deposited on thermally grown alumina surfaces
J. Vac. Sci. Technol. A 4, 3023–3024 (1986)
https://doi.org/10.1116/1.573619
Summary Abstract: The requirements for developing corrosion resistant coatings
J. Vac. Sci. Technol. A 4, 3025–3026 (1986)
https://doi.org/10.1116/1.573620
Summary Abstract: Comparison of protective coatings for infrared transmitting windows
J. Vac. Sci. Technol. A 4, 3030–3031 (1986)
https://doi.org/10.1116/1.573622
Morphology and erosive wear of Fe–Cr coatings for gun bores deposited by physical vapor deposition
J. Vac. Sci. Technol. A 4, 3032–3037 (1986)
https://doi.org/10.1116/1.573623
Coatings in magnetic fusion devices
J. Vac. Sci. Technol. A 4, 3038–3045 (1986)
https://doi.org/10.1116/1.573624
Structure and thermal resistance of chemically vapor deposited molybdenum on graphite
J. Vac. Sci. Technol. A 4, 3046–3049 (1986)
https://doi.org/10.1116/1.573625
Co60 radiation control using thin film coatings
J. Vac. Sci. Technol. A 4, 3055–3058 (1986)
https://doi.org/10.1116/1.573627
Thermal stability and nitrogen redistribution in the 〈Si〉/Ti/W–N/Al metallization scheme
J. Vac. Sci. Technol. A 4, 3078–3081 (1986)
https://doi.org/10.1116/1.573631
The effects of deposition variables on the electrical properties of silicon nitride films by chemical vapor deposition
J. Vac. Sci. Technol. A 4, 3082–3084 (1986)
https://doi.org/10.1116/1.573632
Investigation of reactively sputtered tungsten nitride as high temperature stable Schottky contacts to GaAs
J. Vac. Sci. Technol. A 4, 3091–3094 (1986)
https://doi.org/10.1116/1.573634
Structure and electrical resistivity of low pressure chemical vapor deposited silicon
J. Vac. Sci. Technol. A 4, 3095–3100 (1986)
https://doi.org/10.1116/1.573635
Effects of oxygen on the growth of vapor‐deposited aluminium films
J. Vac. Sci. Technol. A 4, 3101–3105 (1986)
https://doi.org/10.1116/1.573636
Effects of deposition methods on the temperature‐dependent resistivity of tungsten films
J. Vac. Sci. Technol. A 4, 3106–3110 (1986)
https://doi.org/10.1116/1.573637
Properties of reactively sputtered tungsten films in nitrogen and oxygen
J. Vac. Sci. Technol. A 4, 3111–3116 (1986)
https://doi.org/10.1116/1.573638
Metastable phase formation in reactively sputtered WxSiy films
J. Vac. Sci. Technol. A 4, 3117–3120 (1986)
https://doi.org/10.1116/1.573639
Hydrogen induced changes in the metallurgical interactions at PtSi–Si interfaces
J. Vac. Sci. Technol. A 4, 3121–3126 (1986)
https://doi.org/10.1116/1.573640
Multilevel interconnections for wafer scale integration
J. Vac. Sci. Technol. A 4, 3127–3138 (1986)
https://doi.org/10.1116/1.573641
Reaction of thin metal films with crystalline and amorphous Al2O3
J. Vac. Sci. Technol. A 4, 3139–3141 (1986)
https://doi.org/10.1116/1.573642
Al‐doped Ni–Cr for temperature coefficient of resistance control in hybrid thin‐film resistors
J. Vac. Sci. Technol. A 4, 3142–3145 (1986)
https://doi.org/10.1116/1.573643
Mechanisms of Al film growth by ultraviolet laser photolysis of trimethylaluminum
J. Vac. Sci. Technol. A 4, 3146–3152 (1986)
https://doi.org/10.1116/1.573644
X‐ray diffraction characterization of multilayer semiconductor structures
J. Vac. Sci. Technol. A 4, 3153–3159 (1986)
https://doi.org/10.1116/1.573645
Silicon films on amorphous substrates: Influence of boundaries and barriers
J. Vac. Sci. Technol. A 4, 3160–3164 (1986)
https://doi.org/10.1116/1.573646
Growth, composition, and surface structure of Hg(1−x)CdxTe plasma oxides
J. Vac. Sci. Technol. A 4, 3169–3173 (1986)
https://doi.org/10.1116/1.573648
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
Thorsten Lill, Mingmei Wang, et al.