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Volume 37, Issue 4

July 2019

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Cover Image

Cover Image

ISSN 0734-2101

EISSN 1520-8559

In this Issue

Letters
Review Articles
Articles

Letters

New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Erwine Pargon; Camille Petit-Etienne; Laurène Youssef; Gaspard Thomachot; Sylvain David

J. Vac. Sci. Technol. A 37, 040601 (2019) https://doi.org/10.1116/1.5100087

Abstract

View articletitled, New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

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Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Janne-Petteri Niemelä; Morteza Aghaee; Wilhelmus M. M. (Erwin) Kessels; Mariadriana Creatore; Marcel A. Verheijen

J. Vac. Sci. Technol. A 37, 040602 (2019) https://doi.org/10.1116/1.5105348

Abstract

View articletitled, Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Supplementary Material

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Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Henrik Pedersen; Björn Alling; Hans Högberg; Annop Ektarawong

J. Vac. Sci. Technol. A 37, 040603 (2019) https://doi.org/10.1116/1.5107455

Abstract

View articletitled, Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Supplementary Material

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Review Articles

Review Article: Crystal alignment for high performance organic electronics devices

Zhengran He; Jihua Chen; Dawen Li

J. Vac. Sci. Technol. A 37, 040801 (2019) https://doi.org/10.1116/1.5094904

Abstract

View articletitled, Review Article: Crystal alignment for high performance organic electronics devices

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CHORUS

Review Article: Tools and trends for probing brain neurochemistry

Abraham G. Beyene; Sarah J. Yang; Markita P. Landry

J. Vac. Sci. Technol. A 37, 040802 (2019) https://doi.org/10.1116/1.5051047

Abstract

View articletitled, Review Article: Tools and trends for probing brain neurochemistry

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CHORUS

Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Wei Ni; Lingying Shi

J. Vac. Sci. Technol. A 37, 040803 (2019) https://doi.org/10.1116/1.5095413

Abstract

View articletitled, Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Supplementary Material

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Articles

Atomic Layer Deposition (ALD)

Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Fatemeh S. M. Hashemi; LiAo Cao; Felix Mattelaer; Timo Sajavaara; J. Ruud van Ommen; Christophe Detavernier

J. Vac. Sci. Technol. A 37, 040901 (2019) https://doi.org/10.1116/1.5093402

Abstract

View articletitled, Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Supplementary Material

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Atomic Layer Etching (ALE)

Cl₂/Ar based atomic layer etching of AlGaN layers

Sébastien Aroulanda; Olivier Patard; Philippe Altuntas; Nicolas Michel; Jorge Pereira; Cédric Lacam; Piero Gamarra; Sylvain L. Delage; Nicolas Defrance; Jean-Claude de Jaeger; Christophe Gaquière

J. Vac. Sci. Technol. A 37, 041001 (2019) https://doi.org/10.1116/1.5090106

Abstract

View articletitled, Cl2/Ar based atomic layer etching of AlGaN layers

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Interfaces

Surface energy engineering for LiTaO₃ and α-quartz SiO₂ for low temperature (<220 °C) wafer bonding

In Special Collection: Special Topic Collection on Complex Oxides

Brian Baker; Nicole Herbots; Shawn D. Whaley; Mohammed Sahal; Jacob Kintz; Aliya Yano; Saaketh Narayan; Alex L. Brimhall; Wey-Lyn Lee; Yuko Akabane; Robert J. Culbertson

J. Vac. Sci. Technol. A 37, 041101 (2019) https://doi.org/10.1116/1.5095157

Abstract

View articletitled, Surface energy engineering for LiTaO3 and α-quartz SiO2 for low temperature (<220 °C) wafer bonding

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Photovoltaics and Energy

Cu depletion on Cu(In,Ga)Se₂ surfaces investigated by chemical engineering: An x-ray photoelectron spectroscopy approach

Anais Loubat; Solène Béchu; Muriel Bouttemy; Jackie Vigneron; Daniel Lincot; Jean-François Guillemoles; Arnaud Etcheberry

J. Vac. Sci. Technol. A 37, 041201 (2019) https://doi.org/10.1116/1.5097353

Abstract

View articletitled, Cu depletion on Cu(In,Ga)Se2 surfaces investigated by chemical engineering: An x-ray photoelectron spectroscopy approach

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Surfaces

Thermal cyclic oxidation behavior of γ-TiAl with in situ post-annealed Al-Si-Y coating

Kirsten Bobzin; Tobias Brögelmann; Christian Kalscheuer; Tiancheng Liang

J. Vac. Sci. Technol. A 37, 041401 (2019) https://doi.org/10.1116/1.5094835

Abstract

View articletitled, Thermal cyclic oxidation behavior of γ-TiAl with in situ post-annealed Al-Si-Y coating

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Facile benchtop reactor design using dendrimer-templating technology for the fabrication of polyethyleneimine-coated CuO nanoparticles on the gram scale

Aiesha L. Ethridge; Miranda J. Gallagher; Natalie V. Hudson-Smith; Demetrius Finley; Ariful Ahsan; D. Howard Fairbrother; Christy L. Haynes; Robert J. Hamers; Michael L. Curry

J. Vac. Sci. Technol. A 37, 041402 (2019) https://doi.org/10.1116/1.5089593

Abstract

View articletitled, Facile benchtop reactor design using dendrimer-templating technology for the fabrication of polyethyleneimine-coated CuO nanoparticles on the gram scale

Supplementary Material

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Thin Films

Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros; Marco Colangelo; Ilya Charaev; Karl K. Berggren

J. Vac. Sci. Technol. A 37, 041501 (2019) https://doi.org/10.1116/1.5088061

Abstract

View articletitled, Measuring thickness in thin NbN films for superconducting devices

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Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Philipp Hönicke; Blanka Detlefs; Emmanuel Nolot; Yves Kayser; Uwe Mühle; Beatrix Pollakowski; Burkhard Beckhoff

J. Vac. Sci. Technol. A 37, 041502 (2019) https://doi.org/10.1116/1.5094891

Abstract

View articletitled, Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

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On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. I

Christian Martin Koller; Alexander Kirnbauer; Valentin Dalbauer; Szilárd Kolozsvári; Jürgen Ramm; Paul-Heinz Mayrhofer

J. Vac. Sci. Technol. A 37, 041503 (2019) https://doi.org/10.1116/1.5093659

Abstract

View articletitled, On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. I

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On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al_0.675Cr_0.275Fe_0.05-based films

Christian Martin Koller; Alexander Kirnbauer; Szilárd Kolozsvári; Jürgen Ramm; Paul-Heinz Mayrhofer

J. Vac. Sci. Technol. A 37, 041504 (2019) https://doi.org/10.1116/1.5099123

Abstract

View articletitled, On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al0.675Cr0.275Fe0.05-based films

Supplementary Material

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Atomic layer deposition of BN as a novel capping barrier for B₂O₃

Aparna Pilli; Jessica Jones; Natasha Chugh; Jeffry Kelber; Frank Pasquale; Adrien LaVoie

J. Vac. Sci. Technol. A 37, 041505 (2019) https://doi.org/10.1116/1.5092806

Abstract

View articletitled, Atomic layer deposition of BN as a novel capping barrier for B2O3

Supplementary Material

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Characterization of bubbler performance for low-volatility liquid precursor delivery

James E. Maslar; William A. Kimes; Brent A. Sperling; Ravindra K. Kanjolia

J. Vac. Sci. Technol. A 37, 041506 (2019) https://doi.org/10.1116/1.5099264

Abstract

View articletitled, Characterization of bubbler performance for low-volatility liquid precursor delivery

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Water adsorption on Al doped silicatene films grown on Mo(112)

M. T. Nayakasinghe; U. Burghaus

J. Vac. Sci. Technol. A 37, 041507 (2019) https://doi.org/10.1116/1.5100610

Abstract

View articletitled, Water adsorption on Al doped silicatene films grown on Mo(112)

Supplementary Material

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Vacuum Science and Technology

Commissioning of vacuum system for SuperKEKB positron damping ring

Kyo Shibata; Yusuke Suetsugu; Takuya Ishibashi; Mitsuru Shirai; Shinji Terui; Ken-ichi Kanazawa; Hiromi Hisamatsu

J. Vac. Sci. Technol. A 37, 041601 (2019) https://doi.org/10.1116/1.5092956

Abstract

View articletitled, Commissioning of vacuum system for SuperKEKB positron damping ring

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Low-resistivity molybdenum obtained by atomic layer deposition

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Many routes to ferroelectric HfO₂: A review of current deposition methods

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Observation of an abrupt 3D-2D morphological transition in thin Al layers grown by MBE on InGaAs surface

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Letters

New route for selective etching in remote plasma source: Application to the fabrication of horizontal stacked Si nanowires for gate all around devices

Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Thermodynamic stability of hexagonal and rhombohedral boron nitride under chemical vapor deposition conditions from van der Waals corrected first principles calculations

Review Articles

Review Article: Crystal alignment for high performance organic electronics devices

Review Article: Tools and trends for probing brain neurochemistry

Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Articles

Atomic Layer Deposition (ALD)

Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Atomic Layer Etching (ALE)

Cl₂/Ar based atomic layer etching of AlGaN layers

Interfaces

Surface energy engineering for LiTaO₃ and α-quartz SiO₂ for low temperature (<220 °C) wafer bonding

Photovoltaics and Energy

Cu depletion on Cu(In,Ga)Se₂ surfaces investigated by chemical engineering: An x-ray photoelectron spectroscopy approach

Surfaces

Thermal cyclic oxidation behavior of γ-TiAl with in situ post-annealed Al-Si-Y coating

Facile benchtop reactor design using dendrimer-templating technology for the fabrication of polyethyleneimine-coated CuO nanoparticles on the gram scale

Thin Films

Measuring thickness in thin NbN films for superconducting devices

Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. I

On the oxidation behavior of cathodic arc evaporated Al-Cr-Fe and Al-Cr-Fe-O coatings. II. Transmission electron microscopy investigations of Al_0.675Cr_0.275Fe_0.05-based films

Atomic layer deposition of BN as a novel capping barrier for B₂O₃

Characterization of bubbler performance for low-volatility liquid precursor delivery

Water adsorption on Al doped silicatene films grown on Mo(112)

Vacuum Science and Technology

Commissioning of vacuum system for SuperKEKB positron damping ring

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Issues

Cover Image

Letters

Review Articles

Articles

Atomic Layer Deposition (ALD)

Atomic Layer Etching (ALE)

Interfaces

Photovoltaics and Energy

Surfaces

Thin Films

Vacuum Science and Technology

RSS

Resources

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pubs.aip.org

Connect with AIP Publishing

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