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LETTERS
Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates
J. Vac. Sci. Technol. A 37, 010601 (2019)
https://doi.org/10.1116/1.5058729
Atomic Layer Deposition (ALD)
MoS2 thin films from a (NtBu)2(NMe2)2Mo and 1-propanethiol atomic layer deposition process
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010901 (2019)
https://doi.org/10.1116/1.5059424
Atomic-layer-deposited TiO2 with vapor-grown MAPbI3−xClx for planar perovskite solar cells
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010902 (2019)
https://doi.org/10.1116/1.5052287
Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010904 (2019)
https://doi.org/10.1116/1.5062842
Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010905 (2019)
https://doi.org/10.1116/1.5058171
Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)2(THF) and H2O
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010908 (2019)
https://doi.org/10.1116/1.5066638
Atomic Layer Deposition
Atomic layer deposition of cobalt oxide on oxide substrates and low temperature reduction to form ultrathin cobalt metal films
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010903 (2019)
https://doi.org/10.1116/1.5063669
Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010906 (2019)
https://doi.org/10.1116/1.5075491
Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
In Special Collection:
2019 Special Collection on Atomic Layer Deposition (ALD)
J. Vac. Sci. Technol. A 37, 010907 (2019)
https://doi.org/10.1116/1.5074201
Atomic Layer Etching
Low-k dielectric etch challenges at the 7 nm logic node and beyond: Continuous-wave versus quasiatomic layer plasma etching performance review
In Special Collection:
2019 Special Collection on Atomic Layer Etching (ALE)
J. Vac. Sci. Technol. A 37, 011001 (2019)
https://doi.org/10.1116/1.5079410
Articles
Interfaces
Photovoltaics and Energy
High stability near-broken gap junction for multijunction photovoltaics
In Special Collection:
Special Topic Collection on Complex Oxides
J. Vac. Sci. Technol. A 37, 011201 (2019)
https://doi.org/10.1116/1.5054401
Plasma Science and Technology
Study of plasma induced nanostructure formation and surface morphology changes on tungsten and stainless steel at atmospheric pressure
J. Vac. Sci. Technol. A 37, 011301 (2019)
https://doi.org/10.1116/1.5030887
Mass ablated controlled laser induced V2O5 plasma parameters for controllable VO2 films growth
J. Vac. Sci. Technol. A 37, 011302 (2019)
https://doi.org/10.1116/1.5053981
Controlling surface chemical states for selective patterning of CoFeB
J. Vac. Sci. Technol. A 37, 011303 (2019)
https://doi.org/10.1116/1.5063662
Characterization of the distribution of defects introduced by plasma exposure in Si substrate
J. Vac. Sci. Technol. A 37, 011304 (2019)
https://doi.org/10.1116/1.5048027
Thin Films
Effect of microstructural changes in the biological behavior of magnetron sputtered ZnO thin films
J. Vac. Sci. Technol. A 37, 011501 (2019)
https://doi.org/10.1116/1.5048785
Epitaxial growth and dielectric characterization of atomically smooth 0.5Ba(Zr0.2Ti0.8)O3–0.5(Ba0.7Ca0.3)TiO3 thin films
In Special Collection:
Special Topic Collection on Complex Oxides
J. Vac. Sci. Technol. A 37, 011502 (2019)
https://doi.org/10.1116/1.5054130
Photoluminescence properties of Eu-doped CaNb2O6 thin films grown by radio-frequency magnetron sputtering
In Special Collection:
Special Topic Collection on Complex Oxides
J. Vac. Sci. Technol. A 37, 011503 (2019)
https://doi.org/10.1116/1.5063388
Mechanistic study of the atomic layer deposition of scandium oxide films using Sc(MeCp)2(Me2pz) and ozone
In Special Collection:
Special Topic Collection on Complex Oxides
J. Vac. Sci. Technol. A 37, 011504 (2019)
https://doi.org/10.1116/1.5059695