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Functional fatigue of submicrometer NiTi shape memory alloy thin films

Huilong Hou; Yuan Tang; Reginald F. Hamilton; Mark W. Horn

J. Vac. Sci. Technol. A 35, 040601 (2017) https://doi.org/10.1116/1.4983011

Abstract

View articletitled, Functional fatigue of submicrometer NiTi shape memory alloy thin films

Supplementary Material

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CHORUS

Articles

Reactive ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

Thomas Lautenschläger; Carsten Bundesmann

J. Vac. Sci. Technol. A 35, 041001 (2017) https://doi.org/10.1116/1.4985050

Abstract

View articletitled, Reactive ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

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Interfaces

Efficacy of atmospheric pressure dielectric barrier discharge for inactivating airborne pathogens

Jaione Romero-Mangado; Avishek Dey; Diana C. Diaz-Cartagena; Nadja E. Solis-Marcano; Marjorie López-Nieves; Vilynette Santiago-García; Dennis Nordlund; Satheesh Krishnamurthy; M. Meyyappan; Jessica E. Koehne; Ram P. Gandhiraman

J. Vac. Sci. Technol. A 35, 041101 (2017) https://doi.org/10.1116/1.4990654

Abstract

View articletitled, Efficacy of atmospheric pressure dielectric barrier discharge for inactivating airborne pathogens

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Plasma Science and Technology

Inductively coupled plasma reactive-ion etching of β-Ga₂O₃: Comprehensive investigation of plasma chemistry and temperature

Amit P. Shah; Arnab Bhattacharya

J. Vac. Sci. Technol. A 35, 041301 (2017) https://doi.org/10.1116/1.4983078

Abstract

View articletitled, Inductively coupled plasma reactive-ion etching of β-Ga2O3: Comprehensive investigation of plasma chemistry and temperature

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Single-step inductively coupled plasma etching of sputtered Nb₂O₅/SiO₂ multilayer stacks using chromium etch mask

Muhammad Taimoor; Abdullah Alatawi; Sabrina Reuter; Hartmut Hillmer; Thomas Kusserow

J. Vac. Sci. Technol. A 35, 041302 (2017) https://doi.org/10.1116/1.4983683

Abstract

View articletitled, Single-step inductively coupled plasma etching of sputtered Nb2O5/SiO2 multilayer stacks using chromium etch mask

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Transition between stable hydrophilization and fast etching/hydrophilization of poly(methyl)methacrylate polymer using a novel atmospheric pressure dielectric barrier discharge source

Panagiotis Dimitrakellis; Evangelos Gogolides; Angelos Zeniou; Kamil Awsiuk; Jakub Rysz; Mateusz M. Marzec

J. Vac. Sci. Technol. A 35, 041303 (2017) https://doi.org/10.1116/1.4984613

Abstract

View articletitled, Transition between stable hydrophilization and fast etching/hydrophilization of poly(methyl)methacrylate polymer using a novel atmospheric pressure dielectric barrier discharge source

Supplementary Material

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Surfaces

Analysis of trace n-alkane in air by cryogenic-temperature programmed desorption

Taku T. Suzuki; Isao Sakaguchi

J. Vac. Sci. Technol. A 35, 041401 (2017) https://doi.org/10.1116/1.4982930

Abstract

View articletitled, Analysis of trace n-alkane in air by cryogenic-temperature programmed desorption

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Epitaxial multilayers of β-FeSi₂ nanodots/Si for Si-based nanostructured electronic materials

Shunya Sakane; Masayuki Isogawa; Kentaro Watanabe; Jun Kikkawa; Shotaro Takeuchi; Akira Sakai; Yoshiaki Nakamura

J. Vac. Sci. Technol. A 35, 041402 (2017) https://doi.org/10.1116/1.4984107

Abstract

View articletitled, Epitaxial multilayers of β-FeSi2 nanodots/Si for Si-based nanostructured electronic materials

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Influence of Si precursor type on the surface roughening of SiGe epitaxial layers deposited by ultrahigh vacuum chemical vapor deposition method

Youngmo Kim; Sungyeol Yoon; Daehong Ko; Hyunchul Sohn

J. Vac. Sci. Technol. A 35, 041403 (2017) https://doi.org/10.1116/1.4986490

Abstract

View articletitled, Influence of Si precursor type on the surface roughening of SiGe epitaxial layers deposited by ultrahigh vacuum chemical vapor deposition method

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Influence of surface roughness on secondary electron emission from graphite

Thomas S. Burton; Tyson C. Back; Steven B. Fairchild; Gregory B. Thompson

J. Vac. Sci. Technol. A 35, 041404 (2017) https://doi.org/10.1116/1.4986629

Abstract

View articletitled, Influence of surface roughness on secondary electron emission from graphite

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Manipulation of single Si adatoms and observation of fast diffusion of Si dimers on a Pb-covered Si(111) surface

Rakesh Kumar; Chih-Hao Lee; Ing-Shouh Hwang

J. Vac. Sci. Technol. A 35, 041405 (2017) https://doi.org/10.1116/1.4990658

Abstract

View articletitled, Manipulation of single Si adatoms and observation of fast diffusion of Si dimers on a Pb-covered Si(111) surface

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Thin Films

Catalyst free growth of highly crystalline ZnO nanopillars on c-GaN/sapphire templates by chemical vapor deposition technique

Rajendra K. Saroj; Barun K. Barick; Shubhabrata Dhar

J. Vac. Sci. Technol. A 35, 041501 (2017) https://doi.org/10.1116/1.4983209

Abstract

View articletitled, Catalyst free growth of highly crystalline ZnO nanopillars on c-GaN/sapphire templates by chemical vapor deposition technique

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Effects of the Ar and He dilution gas mixture ratio on the hardness of a-C:H films synthesized by atmospheric pressure plasma enhanced chemical vapor deposition

Eiichi Kishimoto; Shunto Maegawa; Akira Shirakura; Tetsuya Suzuki

J. Vac. Sci. Technol. A 35, 041502 (2017) https://doi.org/10.1116/1.4983374

Abstract

View articletitled, Effects of the Ar and He dilution gas mixture ratio on the hardness of a-C:H films synthesized by atmospheric pressure plasma enhanced chemical vapor deposition

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Growth mode of alumina atomic layer deposition on nanopowders

Kedar Manandhar; James A. Wollmershauser; Boris N. Feigelson

J. Vac. Sci. Technol. A 35, 041503 (2017) https://doi.org/10.1116/1.4983445

Abstract

View articletitled, Growth mode of alumina atomic layer deposition on nanopowders

Supplementary Material

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Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

Roland Lorenz; Michael O'Sullivan; Dietmar Sprenger; Bernhard Lang; Christian Mitterer

J. Vac. Sci. Technol. A 35, 041504 (2017) https://doi.org/10.1116/1.4983689

Abstract

View articletitled, Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

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Transport and magnetic properties of amorphous SiC/Cu ultrathin multilayer films

Ning Sun; Yi Zhu; Yuting Fu; Shuai Wen; Long Feng; Yukai An; Jiwen Liu

J. Vac. Sci. Technol. A 35, 041505 (2017) https://doi.org/10.1116/1.4984018

Abstract

View articletitled, Transport and magnetic properties of amorphous SiC/Cu ultrathin multilayer films

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Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

Jere Tupala; Marianna Kemell; Miika Mattinen; Kristoffer Meinander; Sanni Seppälä; Timo Hatanpää; Jyrki Räisänen; Mikko Ritala; Markku Leskelä

J. Vac. Sci. Technol. A 35, 041506 (2017) https://doi.org/10.1116/1.4984279

Abstract

View articletitled, Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

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Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target

Yuji Isosaki; Yuichiro Yamashita; Takashi Yagi; Junjun Jia; Naoyuki Taketoshi; Shinichi Nakamura; Yuzo Shigesato

J. Vac. Sci. Technol. A 35, 041507 (2017) https://doi.org/10.1116/1.4985182

Abstract

View articletitled, Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target

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Low temperature SiO_x thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications

Young-Soo Lee; Ju-Hwan Han; Jin-Seong Park; Jozeph Park

J. Vac. Sci. Technol. A 35, 041508 (2017) https://doi.org/10.1116/1.4985140

Abstract

View articletitled, Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications

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Growth of coherent BGaN films using BBr₃ gas as a boron source in plasma assisted molecular beam epitaxy

Richard C. Cramer; Bastien Bonef; John English; Cyrus E. Dreyer; Chris G. Van de Walle; James S. Speck

J. Vac. Sci. Technol. A 35, 041509 (2017) https://doi.org/10.1116/1.4986185

Abstract

View articletitled, Growth of coherent BGaN films using BBr3 gas as a boron source in plasma assisted molecular beam epitaxy

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CHORUS

Effect of ultrathin Fe dusting layer on electrical transport properties of few-layer MoS₂ field-effect transistors

Ying Wang; Long Qi; Yihong Wu

J. Vac. Sci. Technol. A 35, 041510 (2017) https://doi.org/10.1116/1.4986195

Abstract

View articletitled, Effect of ultrathin Fe dusting layer on electrical transport properties of few-layer MoS2 field-effect transistors

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Nucleation and growth of CuCl thin films on commercially available SnO₂/glass substrates by the sublimation method

Anthony P. Nicholson; Davis R. Hemenway; Walajabad S. Sampath; Kurt L. Barth

J. Vac. Sci. Technol. A 35, 041511 (2017) https://doi.org/10.1116/1.4986944

Abstract

View articletitled, Nucleation and growth of CuCl thin films on commercially available SnO2/glass substrates by the sublimation method

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CHORUS

Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications

John Hennessy; Christopher S. Moore; Kunjithapatham Balasubramanian; April D. Jewell; Kevin France; Shouleh Nikzad

J. Vac. Sci. Technol. A 35, 041512 (2017) https://doi.org/10.1116/1.4986945

Abstract

View articletitled, Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications

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CHORUS

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Thomas Dobbelaere; Felix Mattelaer; Philippe M. Vereecken; Christophe Detavernier

J. Vac. Sci. Technol. A 35, 041513 (2017) https://doi.org/10.1116/1.4987131

Abstract

View articletitled, Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

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Room temperature thermally evaporated thin Au film on Si suitable for application of thiol self-assembled monolayers in micro/nano-electro-mechanical-systems sensors

Nasim Mahmoodi; Abduljabbar I. Rushdi; James Bowen; Aydin Sabouri; Carl J. Anthony; Paula M. Mendes; Jon A. Preece

J. Vac. Sci. Technol. A 35, 041514 (2017) https://doi.org/10.1116/1.4990026

Abstract

View articletitled, Room temperature thermally evaporated thin Au film on Si suitable for application of thiol self-assembled monolayers in micro/nano-electro-mechanical-systems sensors

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Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

Housei Akazawa

J. Vac. Sci. Technol. A 35, 041515 (2017) https://doi.org/10.1116/1.4990538

Abstract

View articletitled, Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

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Influence of Ag volume fraction on microstructure and optical constants of Ag-WO₃ thin films

Xishun Jiang; Qibin Lin; Yongchun Zhang; Yonghua Shi; Xinyi Li; Yangyi Zhang; Kexiu Dong; Zhaoqi Sun

J. Vac. Sci. Technol. A 35, 041516 (2017) https://doi.org/10.1116/1.4990645

Abstract

View articletitled, Influence of Ag volume fraction on microstructure and optical constants of Ag-WO3 thin films

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Vacuum Science and Technology

Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers

Makfir Sefa; James A. Fedchak; Julia Scherschligt

J. Vac. Sci. Technol. A 35, 041601 (2017) https://doi.org/10.1116/1.4983211

Abstract

View articletitled, Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers

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Vacuum properties and operation stability of the radio-frequency quadrupole accelerator in Japan Proton Accelerator Research Complex linac

Takatoshi Morishita; Yasuhiro Kondo; Hidetomo Oguri; Kazuo Hasegawa

J. Vac. Sci. Technol. A 35, 041602 (2017) https://doi.org/10.1116/1.4983527

Abstract

View articletitled, Vacuum properties and operation stability of the radio-frequency quadrupole accelerator in Japan Proton Accelerator Research Complex linac

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Comparison of permeation of atmospheric gases through Viton O-ring gaskets for different initial conditions

Makfir Sefa; Janez Setina

J. Vac. Sci. Technol. A 35, 041603 (2017) https://doi.org/10.1116/1.4984292

Abstract

View articletitled, Comparison of permeation of atmospheric gases through Viton O-ring gaskets for different initial conditions

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Special Issue: PACSURF 2016

Hydrogen permeability of diamondlike amorphous carbons

Motonori Tamura; Tai Kumagai

J. Vac. Sci. Technol. A 35, 04D101 (2017) https://doi.org/10.1116/1.4977106

Abstract

View articletitled, Hydrogen permeability of diamondlike amorphous carbons

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Unoccupied surface state induced by ozone and ammonia on H-terminated diamond electrodes for photocatalytic ammonia synthesis

Idris Boukahil; Phillip S. Johnson; F. J. Himpsel; Ruimin Qiao; Jason A. Bandy; Robert J. Hamers

J. Vac. Sci. Technol. A 35, 04D102 (2017) https://doi.org/10.1116/1.4980041

Abstract

View articletitled, Unoccupied surface state induced by ozone and ammonia on H-terminated diamond electrodes for photocatalytic ammonia synthesis

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CHORUS

Characterization of PECVD a-C:H:Si:O:Cl films

Diego Rossi; Richard Landers; José R. R. Bortoleto; Steven F. Durrant

J. Vac. Sci. Technol. A 35, 04D103 (2017) https://doi.org/10.1116/1.4982711

Abstract

View articletitled, Characterization of PECVD a-C:H:Si:O:Cl films

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Effects of photogenerated carrier scattering on the decay process of coherent longitudinal optical phonons in an undoped GaAs/n-type GaAs epitaxial structure investigated by terahertz time-domain spectroscopy

Hideo Takeuchi; Takahiro Sumioka; Masaaki Nakayama

J. Vac. Sci. Technol. A 35, 04D104 (2017) https://doi.org/10.1116/1.4983637

Abstract

View articletitled, Effects of photogenerated carrier scattering on the decay process of coherent longitudinal optical phonons in an undoped GaAs/n-type GaAs epitaxial structure investigated by terahertz time-domain spectroscopy

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Special Issue: PACSURF 2016

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