Skip Nav Destination

Issues

Select Year

Issue

Letters

Formation of Si¹⁺ in the early stages of the oxidation of the Si[001] 2 × 1 surface

Alberto Herrera-Gomez; Francisco-Servando Aguirre-Tostado; Piero Pianetta

J. Vac. Sci. Technol. A 34, 020601 (2016) https://doi.org/10.1116/1.4936336

Abstract

View articletitled, Formation of Si1+ in the early stages of the oxidation of the Si[001] 2 × 1 surface

Open the PDF for in another window

Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals

Huanyao Cun; Annina Spescha; Adrian Schuler; Matthias Hengsberger; Jürg Osterwalder; Thomas Greber

J. Vac. Sci. Technol. A 34, 020602 (2016) https://doi.org/10.1116/1.4939507

Abstract

View articletitled, Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals

Open the PDF for in another window

Solid phase epitaxial regrowth of (001) anatase titanium dioxide

David Eitan Barlaz; Edmund G. Seebauer

J. Vac. Sci. Technol. A 34, 020603 (2016) https://doi.org/10.1116/1.4941446

Abstract

View articletitled, Solid phase epitaxial regrowth of (001) anatase titanium dioxide

Open the PDF for in another window

CHORUS

Interfaces

Effect of intermetallic compounds on the thermal conductivity of Ti-Cu composites

K. Jagannadham

J. Vac. Sci. Technol. A 34, 021101 (2016) https://doi.org/10.1116/1.4939142

Abstract

View articletitled, Effect of intermetallic compounds on the thermal conductivity of Ti-Cu composites

Open the PDF for in another window

Photovoltaics and Energy

Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr

Timothy J. Peshek; James M. Burst; Timothy J. Coutts; Timothy A. Gessert

J. Vac. Sci. Technol. A 34, 021201 (2016) https://doi.org/10.1116/1.4939830

Abstract

View articletitled, Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr

Open the PDF for in another window

Single vacuum chamber with multiple close space sublimation sources to fabricate CdTe solar cells

Drew E. Swanson; Jason M. Kephart; Pavel S. Kobyakov; Kevin Walters; Kevan C. Cameron; Kurt L. Barth; Walajabad S. Sampath; Jennifer Drayton; James R. Sites

J. Vac. Sci. Technol. A 34, 021202 (2016) https://doi.org/10.1116/1.4941071

Abstract

View articletitled, Single vacuum chamber with multiple close space sublimation sources to fabricate CdTe solar cells

Open the PDF for in another window

CHORUS

Plasma Science and Technology

Modification of a metal nanoparticle beam by a hollow electrode discharge

Amir Mohammad Ahadi; Alexander Hinz; Oleksandr Polonskyi; Thomas Trottenberg; Thomas Strunskus; Holger Kersten; Franz Faupel

J. Vac. Sci. Technol. A 34, 021301 (2016) https://doi.org/10.1116/1.4936188

Abstract

View articletitled, Modification of a metal nanoparticle beam by a hollow electrode discharge

Supplementary Material

Open the PDF for in another window

One-dimensional Ar-SF₆ hydromodel at low-pressure in e-beam generated plasmas

George M. Petrov; David R. Boris; Tzvetelina B. Petrova; Scott G. Walton

J. Vac. Sci. Technol. A 34, 021302 (2016) https://doi.org/10.1116/1.4940885

Abstract

View articletitled, One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas

Open the PDF for in another window

Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath

Nathaniel B. Moore; Walter Gekelman; Patrick Pribyl

J. Vac. Sci. Technol. A 34, 021303 (2016) https://doi.org/10.1116/1.4941069

Abstract

View articletitled, Ion energy distribution function measurements by laser-induced fluorescence in a dual radio frequency sheath

Open the PDF for in another window

CHORUS

Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Robert Franz; Francisca Mendez Martin; Gerhard Hawranek; Peter Polcik

J. Vac. Sci. Technol. A 34, 021304 (2016) https://doi.org/10.1116/1.4941409

Abstract

View articletitled, Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Open the PDF for in another window

In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources

Daniel T. Elg; John R. Sporre; Gianluca A. Panici; Shailendra N. Srivastava; David N. Ruzic

J. Vac. Sci. Technol. A 34, 021305 (2016) https://doi.org/10.1116/1.4942456

Abstract

View articletitled, In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources

Open the PDF for in another window

CHORUS

Surfaces

Enhanced quantum efficiency of photoelectron emission, through surface textured metal electrodes

Anna Alexander; Nathan A. Moody; Prabhakar R. Bandaru

J. Vac. Sci. Technol. A 34, 021401 (2016) https://doi.org/10.1116/1.4936082

Abstract

View articletitled, Enhanced quantum efficiency of photoelectron emission, through surface textured metal electrodes

Open the PDF for in another window

Adsorption kinetics of benzene on graphene: An ultrahigh vacuum study

Ashish Chakradhar; Nilushni Sivapragasam; Mindika T. Nayakasinghe; Uwe Burghaus

J. Vac. Sci. Technol. A 34, 021402 (2016) https://doi.org/10.1116/1.4936337

Abstract

View articletitled, Adsorption kinetics of benzene on graphene: An ultrahigh vacuum study

Supplementary Material

Open the PDF for in another window

Composition and surface deformation variance in highly strained In_xGa_1−xSb structures on (100) GaSb

Connor Wolenski; Weinan Zhang; Charles Meyer; Gregory Triplett; Nicholas Cole

J. Vac. Sci. Technol. A 34, 021403 (2016) https://doi.org/10.1116/1.4942467

Abstract

View articletitled, Composition and surface deformation variance in highly strained InxGa1−xSb structures on (100) GaSb

Open the PDF for in another window

Thin Films

Effects of inclination angle during Al-doped ZnO film deposition and number of bending cycles on electrical, piezoelectric, optical, and mechanical properties and fatigue life

Tse-Chang Li; Ta-Hsuan Kuan; Jen-Fin Lin

J. Vac. Sci. Technol. A 34, 021501 (2016) https://doi.org/10.1116/1.4936093

Abstract

View articletitled, Effects of inclination angle during Al-doped ZnO film deposition and number of bending cycles on electrical, piezoelectric, optical, and mechanical properties and fatigue life

Open the PDF for in another window

Growth and characterization of α and β-phase tungsten films on various substrates

Jeong-Seop Lee; Jaehun Cho; Chun-Yeol You

J. Vac. Sci. Technol. A 34, 021502 (2016) https://doi.org/10.1116/1.4936261

Abstract

View articletitled, Growth and characterization of α and β-phase tungsten films on various substrates

Open the PDF for in another window

Comparative study of ITO and TiN fabricated by low-temperature RF biased sputtering

Daniel K. Simon; David Tröger; Tony Schenk; Ingo Dirnstorfer; Franz P. G. Fengler; Paul M. Jordan; Andreas Krause; Thomas Mikolajick

J. Vac. Sci. Technol. A 34, 021503 (2016) https://doi.org/10.1116/1.4936257

Abstract

View articletitled, Comparative study of ITO and TiN fabricated by low-temperature RF biased sputtering

Open the PDF for in another window

Growth of single and bilayer graphene by filtered cathodic vacuum arc technique

A. K. Kesarwani; O. S. Panwar; S. R. Dhakate; R. K. Rakshit; V. N. Singh; Atul Bisht; Ashish Kumar

J. Vac. Sci. Technol. A 34, 021504 (2016) https://doi.org/10.1116/1.4936258

Abstract

View articletitled, Growth of single and bilayer graphene by filtered cathodic vacuum arc technique

Open the PDF for in another window

Microstructural, nanomechanical, and microtribological properties of Pb thin films prepared by pulsed laser deposition and thermal evaporation techniques

Esteban Broitman; Francisco J. Flores-Ruiz; Massimo Di Giulio; Francisco Gontad; Antonella Lorusso; Alessio Perrone

J. Vac. Sci. Technol. A 34, 021505 (2016) https://doi.org/10.1116/1.4936080

Abstract

View articletitled, Microstructural, nanomechanical, and microtribological properties of Pb thin films prepared by pulsed laser deposition and thermal evaporation techniques

Open the PDF for in another window

Magnetic and electronic properties of La_0.7Ca_0.3MnO₃/h-YMnO₃ bilayer

Manish Kumar; R. J. Choudhary; D. M. Phase

J. Vac. Sci. Technol. A 34, 021506 (2016) https://doi.org/10.1116/1.4937356

Abstract

View articletitled, Magnetic and electronic properties of La0.7Ca0.3MnO3/h-YMnO3 bilayer

Open the PDF for in another window

Structural and growth aspects of electron beam physical vapor deposited NiO-CeO₂ nanocomposite films

Sushil Kumar Kuanr; Suresh Babu K

J. Vac. Sci. Technol. A 34, 021507 (2016) https://doi.org/10.1116/1.4937357

Abstract

View articletitled, Structural and growth aspects of electron beam physical vapor deposited NiO-CeO2 nanocomposite films

Open the PDF for in another window

Flexible antibacterial Zr-Cu-N thin films resistant to cracking

Jindřich Musil; Michal Zítek; Karel Fajfrlík; Radomír Čerstvý

J. Vac. Sci. Technol. A 34, 021508 (2016) https://doi.org/10.1116/1.4937727

Abstract

View articletitled, Flexible antibacterial Zr-Cu-N thin films resistant to cracking

Open the PDF for in another window

Effect of Sb thickness on the performance of bialkali-antimonide photocathodes

Md Abdullah A. Mamun; Abdelmageed A. Elmustafa; Carlos Hernandez-Garcia; Russell Mammei; Matthew Poelker

J. Vac. Sci. Technol. A 34, 021509 (2016) https://doi.org/10.1116/1.4939563

Abstract

View articletitled, Effect of Sb thickness on the performance of bialkali-antimonide photocathodes

Open the PDF for in another window

CHORUS

Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films

Melissa R. Beebe; Douglas B. Beringer; Matthew C. Burton; Kaida Yang; R. Alejandra Lukaszew

J. Vac. Sci. Technol. A 34, 021510 (2016) https://doi.org/10.1116/1.4940132

Abstract

View articletitled, Stoichiometry and thickness dependence of superconducting properties of niobium nitride thin films

Open the PDF for in another window

CHORUS

Ti-Nb thin films deposited by magnetron sputtering on stainless steel

E. David Gonzalez; Terlize C. Niemeyer; Conrado R. M. Afonso; Pedro A. P. Nascente

J. Vac. Sci. Technol. A 34, 021511 (2016) https://doi.org/10.1116/1.4940753

Abstract

View articletitled, Ti-Nb thin films deposited by magnetron sputtering on stainless steel

Open the PDF for in another window

Morphological and microstructural stability of N-polar InAlN thin films grown on free-standing GaN substrates by molecular beam epitaxy

Matthew T. Hardy; Thomas O. McConkie; David J. Smith; David F. Storm; Brian P. Downey; D. Scott Katzer; David J. Meyer; Neeraj Nepal

J. Vac. Sci. Technol. A 34, 021512 (2016) https://doi.org/10.1116/1.4940759

Abstract

View articletitled, Morphological and microstructural stability of N-polar InAlN thin films grown on free-standing GaN substrates by molecular beam epitaxy

Open the PDF for in another window

Nitrogen incorporation in sputter deposited molybdenum nitride thin films

Laura Stöber; Jens Peter Konrath; Verena Haberl; Florian Patocka; Michael Schneider; Ulrich Schmid

J. Vac. Sci. Technol. A 34, 021513 (2016) https://doi.org/10.1116/1.4941141

Abstract

View articletitled, Nitrogen incorporation in sputter deposited molybdenum nitride thin films

Open the PDF for in another window

Influence of RF excitation during pulsed laser deposition in oxygen atmosphere on the structural properties and luminescence of nanocrystalline ZnO:Al thin films

Daniel Meljanac; Krunoslav Juraić; Milivoj Plodinec; Zdravko Siketić; Davor Gracin; Nikša Krstulović; Krešimir Salamon; Hrvoje Skenderović; Zlatko Kregar; Iva Šrut Rakić; Sigrid Bernstorff

J. Vac. Sci. Technol. A 34, 021514 (2016) https://doi.org/10.1116/1.4941197

Abstract

View articletitled, Influence of RF excitation during pulsed laser deposition in oxygen atmosphere on the structural properties and luminescence of nanocrystalline ZnO:Al thin films

Open the PDF for in another window

Atomic layer deposition of two dimensional MoS₂ on 150 mm substrates

Arturo Valdivia; Douglas J. Tweet; John F. Conley, Jr.

J. Vac. Sci. Technol. A 34, 021515 (2016) https://doi.org/10.1116/1.4941245

Abstract

View articletitled, Atomic layer deposition of two dimensional MoS2 on 150 mm substrates

Open the PDF for in another window

Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Carl Hägglund; Thomas Grehl; Jukka T. Tanskanen; Ye Sheng Yee; Marja N. Mullings; Adriaan J. M. Mackus; Callisto MacIsaac; Bruce M. Clemens; Hidde H. Brongersma; Stacey F. Bent

J. Vac. Sci. Technol. A 34, 021516 (2016) https://doi.org/10.1116/1.4941411

Abstract

View articletitled, Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Open the PDF for in another window

CHORUS

Black-wax assisted lift-off and transfer of CVD grown graphene from copper foil substrates to various foreign substrates

Hongfei Liu; Ah Bian Chew; Lee Kheng Tan; Jinghua Teng; Dongzhi Chi

J. Vac. Sci. Technol. A 34, 021517 (2016) https://doi.org/10.1116/1.4941732

Abstract

View articletitled, Black-wax assisted lift-off and transfer of CVD grown graphene from copper foil substrates to various foreign substrates

Supplementary Material

Open the PDF for in another window

Superconducting NbTiN thin films for superconducting radio frequency accelerator cavity applications

Matthew C. Burton; Melissa R. Beebe; Kaida Yang; Rosa A. Lukaszew; Anne-Marie Valente-Feliciano; Charles Reece

J. Vac. Sci. Technol. A 34, 021518 (2016) https://doi.org/10.1116/1.4941735

Abstract

View articletitled, Superconducting NbTiN thin films for superconducting radio frequency accelerator cavity applications

Open the PDF for in another window

CHORUS

Growth per cycle of alumina atomic layer deposition on nano- and micro-powders

Kedar Manandhar; James A. Wollmershauser; Janice E. Boercker; Boris N. Feigelson

J. Vac. Sci. Technol. A 34, 021519 (2016) https://doi.org/10.1116/1.4941918

Abstract

View articletitled, Growth per cycle of alumina atomic layer deposition on nano- and micro-powders

Open the PDF for in another window

CHORUS

Influence of deposition atmosphere and substrate temperature on the structure, morphology, and photoluminescence of pulsed laser deposited La_0.5Gd_1.5SiO₅:Dy³⁺

Simon N. Ogugua; Raphael L. Nyenge; Phillip T. Sechogela; Hendrik C. Swart; Odireleng M. Ntwaeaborwa

J. Vac. Sci. Technol. A 34, 021520 (2016) https://doi.org/10.1116/1.4942502

Abstract

View articletitled, Influence of deposition atmosphere and substrate temperature on the structure, morphology, and photoluminescence of pulsed laser deposited La0.5Gd1.5SiO5:Dy3+

Open the PDF for in another window

Vacuum Science and Technology

Thermal outgassing rates of low-carbon steels

Chongdo Park; Taekyun Ha; Boklae Cho

J. Vac. Sci. Technol. A 34, 021601 (2016) https://doi.org/10.1116/1.4936840

Abstract

View articletitled, Thermal outgassing rates of low-carbon steels

Open the PDF for in another window

Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

Chun-Yueh Lin; Wei-Tse Chang; Yi-Sheng Chen; En-Te Hwu; Chia-Seng Chang; Ing-Shouh Hwang; Wei-Hao Hsu

J. Vac. Sci. Technol. A 34, 021602 (2016) https://doi.org/10.1116/1.4938408

Abstract

View articletitled, Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source

Open the PDF for in another window

Microstructural modifications in powder-metallurgically produced Al_0.675Cr_0.275Fe_0.05 targets during cathodic arc evaporation

Christian M. Koller; Rainer Hahn; Jürgen Ramm; Szilárd Kolozsvári; Paul H. Mayrhofer

J. Vac. Sci. Technol. A 34, 021603 (2016) https://doi.org/10.1116/1.4938407

Abstract

View articletitled, Microstructural modifications in powder-metallurgically produced Al0.675Cr0.275Fe0.05 targets during cathodic arc evaporation

Open the PDF for in another window

In situ baking method for degassing of a kicker magnet in accelerator beam line

Junichiro Kamiya; Norio Ogiwara; Toru Yanagibashi; Michikazu Kinsho; Yuichi Yasuda

J. Vac. Sci. Technol. A 34, 021604 (2016) https://doi.org/10.1116/1.4941369

Abstract

View articletitled, In situ baking method for degassing of a kicker magnet in accelerator beam line

Open the PDF for in another window

Results and problems in the construction phase of the SuperKEKB vacuum system

Yusuke Suetsugu; Ken-ichi Kanazawa; Kyo Shibata; Takuya Ishibashi; Hiromi Hisamatsu; Mitsuru Shirai; Shinji Terui

J. Vac. Sci. Technol. A 34, 021605 (2016) https://doi.org/10.1116/1.4942455

Abstract

View articletitled, Results and problems in the construction phase of the SuperKEKB vacuum system

Open the PDF for in another window

Shop Notes

Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy

Yoshihide Watanabe; Yusaku F. Nishimura; Ryo Suzuki; Hiromitsu Uehara; Tomoyuki Nimura; Atsushi Beniya; Noritake Isomura; Kiyotaka Asakura; Satoru Takakusagi

J. Vac. Sci. Technol. A 34, 023201 (2016) https://doi.org/10.1116/1.4936344

Abstract

View articletitled, Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy

Open the PDF for in another window

Papers from the 13th International Symposium on Sputtering and Plasma Processes

Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition

Yukio Fukuda; Daichi Yamada; Tomoya Yokohira; Kosei Yanachi; Chiaya Yamamoto; Byeonghak Yoo; Junji Yamanaka; Tetsuya Sato; Toshiyuki Takamatsu; Hiroshi Okamoto

J. Vac. Sci. Technol. A 34, 02D101 (2016) https://doi.org/10.1116/1.4932039

Abstract

View articletitled, Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition

Open the PDF for in another window

Resistive memory properties of an electrochemical SiO₂-based device without an active electrode

Chih-Yi Liu; Kun-Chi Chiang; Chun-Hung Lai

J. Vac. Sci. Technol. A 34, 02D102 (2016) https://doi.org/10.1116/1.4933077

Abstract

View articletitled, Resistive memory properties of an electrochemical SiO2-based device without an active electrode

Open the PDF for in another window

Internal oxidation of laminated Hf–Ru coatings

Yung-I Chen; Yu-Ren Huang; Li-Chun Chang

J. Vac. Sci. Technol. A 34, 02D103 (2016) https://doi.org/10.1116/1.4935653

Abstract

View articletitled, Internal oxidation of laminated Hf–Ru coatings

Open the PDF for in another window

NiO/GaN heterojunction diode deposited through magnetron reactive sputtering

Liuan Li; Xinzhi Wang; Yang Liu; Jin-Ping Ao

J. Vac. Sci. Technol. A 34, 02D104 (2016) https://doi.org/10.1116/1.4937737

Abstract

View articletitled, NiO/GaN heterojunction diode deposited through magnetron reactive sputtering

Open the PDF for in another window

Catalyst film preparation for efficient growth of carbon nanotubes filled with iron nanowires

Eisuke Tamaki; Hideki Sato; Nobuo Kubonaka; Yuji Fujiwara

J. Vac. Sci. Technol. A 34, 02D105 (2016) https://doi.org/10.1116/1.4938055

Abstract

View articletitled, Catalyst film preparation for efficient growth of carbon nanotubes filled with iron nanowires

Open the PDF for in another window

Enhanced UV photodetector response and recovery times using a nonpolar ZnO sensing layer

Chung-Hua Chao; Wei-Jie Weng; Da-Hua Wei

J. Vac. Sci. Technol. A 34, 02D106 (2016) https://doi.org/10.1116/1.4939751

Abstract

View articletitled, Enhanced UV photodetector response and recovery times using a nonpolar ZnO sensing layer

Open the PDF for in another window

Mechanical properties and oxidation behavior of ZrN_x thin films fabricated through high-power impulse magnetron sputtering deposition

Li-Chun Chang; Ching-Yen Chang; Yung-I Chen; Hsuan-Ling Kao

J. Vac. Sci. Technol. A 34, 02D107 (2016) https://doi.org/10.1116/1.4941070

Abstract

View articletitled, Mechanical properties and oxidation behavior of ZrNx thin films fabricated through high-power impulse magnetron sputtering deposition

Open the PDF for in another window

Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Mitsuaki Takeuchi; Yuki Hoshide; Hiromichi Ryuto; Gikan H. Takaoka

J. Vac. Sci. Technol. A 34, 02D108 (2016) https://doi.org/10.1116/1.4942996

Abstract

View articletitled, Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids

Supplementary Material

Open the PDF for in another window

Issues

Letters

Interfaces

Photovoltaics and Energy

Plasma Science and Technology

Surfaces

Thin Films

Vacuum Science and Technology

Shop Notes

Papers from the 13th International Symposium on Sputtering and Plasma Processes

RSS

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only