Skip Nav Destination
Issues
May 2013
ISSN 0734-2101
EISSN 1520-8559
Letters
ToF-SIMS depth profiling of organic solar cell layers using an Ar cluster ion source
Vincent S. Smentkowski; Gilad Zorn; Amanda Misner; Gautam Parthasarathy; Aaron Couture; Elke Tallarek; Birgit Hagenhoff
J. Vac. Sci. Technol. A 31, 030601 (2013)
https://doi.org/10.1116/1.4793730
Theoretical investigation of cubic B1-like and corundum (Cr1−xAlx)2O3 solid solutions
J. Vac. Sci. Technol. A 31, 030602 (2013)
https://doi.org/10.1116/1.4795392
Enhancement of solution-processed zinc tin oxide thin film transistors by silicon incorporation
J. Vac. Sci. Technol. A 31, 030603 (2013)
https://doi.org/10.1116/1.4795760
Low-temperature CVD of η-Mn3N2−x from bis[di(tert-butyl)amido]manganese(II) and ammonia
Teresa S. Spicer; Charles W. Spicer; Andrew N. Cloud; Luke M. Davis; Gregory S. Girolami; John R. Abelson
J. Vac. Sci. Technol. A 31, 030604 (2013)
https://doi.org/10.1116/1.4799036
Review Article
Molecular dynamics simulation of atomic friction: A review and guide
J. Vac. Sci. Technol. A 31, 030801 (2013)
https://doi.org/10.1116/1.4794357
Interfaces
Electron-injecting properties of Rb2CO3-doped Alq3 thin films in organic light-emitting diodes
Jin Woo Park; Jong Tae Lim; Jong Sik Oh; Sung Hee Kim; Phuong Pham Viet; Myung S. Jhon; Geun Young Yeom
J. Vac. Sci. Technol. A 31, 031101 (2013)
https://doi.org/10.1116/1.4798302
Characterization of thin film adhesion by MEMS shaft-loading blister testing
Maria Berdova; Jussi Lyytinen; Kestutis Grigoras; Anu Baby; Lauri Kilpi; Helena Ronkainen; Sami Franssila; Jari Koskinen
J. Vac. Sci. Technol. A 31, 031102 (2013)
https://doi.org/10.1116/1.4801921
Beyond hard x-ray photoelectron spectroscopy: Simultaneous combination with x-ray diffraction
J. Vac. Sci. Technol. A 31, 031103 (2013)
https://doi.org/10.1116/1.4801915
Photovoltaics and Energy
Investigation of shunt path evolution originated from transparent conductive oxides in Si-based thin film solar cells
J. Vac. Sci. Technol. A 31, 031201 (2013)
https://doi.org/10.1116/1.4802023
Plasma Science and Technology
Characteristics of silicon etching by silicon chloride ions
J. Vac. Sci. Technol. A 31, 031301 (2013)
https://doi.org/10.1116/1.4793426
Real-time control of electron density in a capacitively coupled plasma
J. Vac. Sci. Technol. A 31, 031302 (2013)
https://doi.org/10.1116/1.4795207
Nitrogen actinometry for measurement of nitrogen radical spatial distribution in large-area plasma-enhanced chemical vapor deposition
J. Vac. Sci. Technol. A 31, 031303 (2013)
https://doi.org/10.1116/1.4798772
Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments
J. Vac. Sci. Technol. A 31, 031304 (2013)
https://doi.org/10.1116/1.4798362
Selective etching of TiN over TaN and vice versa in chlorine-containing plasmas
Hyungjoo Shin; Weiye Zhu; Lei Liu; Shyam Sridhar; Vincent M. Donnelly; Demetre J. Economou; Chet Lenox; Tom Lii
J. Vac. Sci. Technol. A 31, 031305 (2013)
https://doi.org/10.1116/1.4801883
Impact of static magnetic fields on the radial line slot antenna plasma source
J. Vac. Sci. Technol. A 31, 031306 (2013)
https://doi.org/10.1116/1.4802737
Surfaces
Measurement of the Auger parameter and Wagner plot for uranium compounds
J. Vac. Sci. Technol. A 31, 031401 (2013)
https://doi.org/10.1116/1.4793477
In situ formation and electron-spectroscopic study of bis(arene) V and Cr compounds on a graphite surface
J. Vac. Sci. Technol. A 31, 031402 (2013)
https://doi.org/10.1116/1.4794194
Subnanometer-resolution depth profiling of boron atoms and lattice defects in silicon ultrashallow junctions by ion beam techniques
Lakshmanan H. Vanamurthy; Mengbing Huang; Hassaram Bakhru; Toshiharu Furukawa; Nathaniel Berliner; Joshua Herman; Zhengmao Zhu; Paul Ronsheim; Bruce Doris
J. Vac. Sci. Technol. A 31, 031403 (2013)
https://doi.org/10.1116/1.4795208
Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
Jingming Liu; Youwen Zhao; Zhiyuan Dong; Fengyun Yang; Fenghua Wang; Kewei Cao; Tong Liu; Hui Xie; Teng Chen
J. Vac. Sci. Technol. A 31, 031404 (2013)
https://doi.org/10.1116/1.4798309
Vibronic fine structure in high-resolution x-ray absorption spectra from ion-bombarded boron nitride nanotubes
J. Vac. Sci. Technol. A 31, 031405 (2013)
https://doi.org/10.1116/1.4798271
Thin Films
Effect of quantum dot length on the degree of electron localization in polymer wires grown by molecular layer deposition
J. Vac. Sci. Technol. A 31, 031501 (2013)
https://doi.org/10.1116/1.4793478
Validity of automated x-ray photoelectron spectroscopy algorithm to determine the amount of substance and the depth distribution of atoms
J. Vac. Sci. Technol. A 31, 031503 (2013)
https://doi.org/10.1116/1.4795246
Polarity control and transport properties of Mg-doped (0001) InN by plasma-assisted molecular beam epitaxy
J. Vac. Sci. Technol. A 31, 031504 (2013)
https://doi.org/10.1116/1.4795811
Influence of plasma treatment on optical and electrical properties of a-InGaZnO films
J. Vac. Sci. Technol. A 31, 031505 (2013)
https://doi.org/10.1116/1.4798297
Effects of preparation conditions on the magnetocaloric properties of Gd thin films
J. Vac. Sci. Technol. A 31, 031506 (2013)
https://doi.org/10.1116/1.4795817
Glancing angle deposition on a roll: Towards high-throughput nanostructured thin films
J. Vac. Sci. Technol. A 31, 031507 (2013)
https://doi.org/10.1116/1.4798947
Effects of gas environment on electronic and optical properties of amorphous indium zinc tin oxide thin films
Yus Rama Denny; Sunyoung Lee; Kangil Lee; Soonjoo Seo; Suhk Kun Oh; Hee Jae Kang; Sung Heo; Jae Gwan Chung; Jae Cheol Lee; Sven Tougaard
J. Vac. Sci. Technol. A 31, 031508 (2013)
https://doi.org/10.1116/1.4801023
Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
J. Vac. Sci. Technol. A 31, 031509 (2013)
https://doi.org/10.1116/1.4798385
Vacuum Science and Technology
Electron stimulated desorption from the 316 L stainless steel as a function of impact electron energy
J. Vac. Sci. Technol. A 31, 031601 (2013)
https://doi.org/10.1116/1.4798256
Investigation of the time evolution of STM-tip temperature during electron bombardment
J. Vac. Sci. Technol. A 31, 031602 (2013)
https://doi.org/10.1116/1.4802967
Brief Reports and Comments
Versatile Rb vapor cells with long lifetimes
John F. Hulbert; Matthieu Giraud-Carrier; Tom Wall; Aaron R. Hawkins; Scott Bergeson; Jennifer Black; Holger Schmidt
J. Vac. Sci. Technol. A 31, 033001 (2013)
https://doi.org/10.1116/1.4795759
Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)
George H. Major, Joshua W. Pinder, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy
Tiffany C. Kaspar, Sarah Akers, et al.