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Issues

Letters

J. Vac. Sci. Technol. A 30, 060601 (2012) https://doi.org/10.1116/1.4754292

Review Article

J. Vac. Sci. Technol. A 30, 060801 (2012) https://doi.org/10.1116/1.4759260

Plasma Science and Technology

J. Vac. Sci. Technol. A 30, 061301 (2012) https://doi.org/10.1116/1.4754695
J. Vac. Sci. Technol. A 30, 061302 (2012) https://doi.org/10.1116/1.4755898
J. Vac. Sci. Technol. A 30, 061303 (2012) https://doi.org/10.1116/1.4756694
J. Vac. Sci. Technol. A 30, 061304 (2012) https://doi.org/10.1116/1.4758788
J. Vac. Sci. Technol. A 30, 061305 (2012) https://doi.org/10.1116/1.4758790
J. Vac. Sci. Technol. A 30, 061306 (2012) https://doi.org/10.1116/1.4762815

Surfaces

J. Vac. Sci. Technol. A 30, 061401 (2012) https://doi.org/10.1116/1.4748801
J. Vac. Sci. Technol. A 30, 061402 (2012) https://doi.org/10.1116/1.4750474
J. Vac. Sci. Technol. A 30, 061403 (2012) https://doi.org/10.1116/1.4754804
J. Vac. Sci. Technol. A 30, 061404 (2012) https://doi.org/10.1116/1.4754811
J. Vac. Sci. Technol. A 30, 061405 (2012) https://doi.org/10.1116/1.4757594
J. Vac. Sci. Technol. A 30, 061406 (2012) https://doi.org/10.1116/1.4758134
J. Vac. Sci. Technol. A 30, 061407 (2012) https://doi.org/10.1116/1.4759238

Thin Films

J. Vac. Sci. Technol. A 30, 061501 (2012) https://doi.org/10.1116/1.4748802
J. Vac. Sci. Technol. A 30, 061502 (2012) https://doi.org/10.1116/1.4748804
J. Vac. Sci. Technol. A 30, 061503 (2012) https://doi.org/10.1116/1.4748803
J. Vac. Sci. Technol. A 30, 061504 (2012) https://doi.org/10.1116/1.4750485
J. Vac. Sci. Technol. A 30, 061505 (2012) https://doi.org/10.1116/1.4752084
J. Vac. Sci. Technol. A 30, 061506 (2012) https://doi.org/10.1116/1.4757953
J. Vac. Sci. Technol. A 30, 061507 (2012) https://doi.org/10.1116/1.4758789
J. Vac. Sci. Technol. A 30, 061508 (2012) https://doi.org/10.1116/1.4762800
J. Vac. Sci. Technol. A 30, 061509 (2012) https://doi.org/10.1116/1.4764049
J. Vac. Sci. Technol. A 30, 061510 (2012) https://doi.org/10.1116/1.4758132
J. Vac. Sci. Technol. A 30, 061511 (2012) https://doi.org/10.1116/1.4766194
J. Vac. Sci. Technol. A 30, 061512 (2012) https://doi.org/10.1116/1.4766193

Vacuum Science and Technology

J. Vac. Sci. Technol. A 30, 061601 (2012) https://doi.org/10.1116/1.4750482
J. Vac. Sci. Technol. A 30, 061602 (2012) https://doi.org/10.1116/1.4757950
J. Vac. Sci. Technol. A 30, 061603 (2012) https://doi.org/10.1116/1.4764509
J. Vac. Sci. Technol. A 30, 061604 (2012) https://doi.org/10.1116/1.4764933

Shop Notes

J. Vac. Sci. Technol. A 30, 063201 (2012) https://doi.org/10.1116/1.4754700
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