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Optimizing charge neutralization for a magnetic sector SIMS instrument in negative mode

Alexander L. Pivovarov; Georgiy M. Guryanov

J. Vac. Sci. Technol. A 30, 040601 (2012) https://doi.org/10.1116/1.4719960

Abstract

View articletitled, Optimizing charge neutralization for a magnetic sector SIMS instrument in negative mode

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Selective chemical etch of gallium nitride by phosphoric acid

Chongmin Lee; Jennifer K. Hite; Michael A. Mastro; Jaime A. Freitas, Jr.; Charles R. Eddy, Jr.; Hong-Yeol Kim; Jihyun Kim

J. Vac. Sci. Technol. A 30, 040602 (2012) https://doi.org/10.1116/1.4719528

Abstract

View articletitled, Selective chemical etch of gallium nitride by phosphoric acid

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Effect of p-type doping on the oxidation of H–Si(111) studied by second-harmonic generation

Bilal Gokce; Daniel B. Dougherty; Kenan Gundogdu

J. Vac. Sci. Technol. A 30, 040603 (2012) https://doi.org/10.1116/1.4721329

Abstract

View articletitled, Effect of p-type doping on the oxidation of H–Si(111) studied by second-harmonic generation

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Evaporation-assisted high-power impulse magnetron sputtering: The deposition of tungsten oxide as a case study

Axel Hemberg; Jean-Pierre Dauchot; Rony Snyders; Stephanos Konstantinidis

J. Vac. Sci. Technol. A 30, 040604 (2012) https://doi.org/10.1116/1.4722728

Abstract

View articletitled, Evaporation-assisted high-power impulse magnetron sputtering: The deposition of tungsten oxide as a case study

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Characterization of geometrical factors for quantitative angle-resolved photoelectron spectroscopy

Eugenie Martinez; Alberto Herrera-Gomez; Mickael Allain; Olivier Renault; Alain Faure; Amal Chabli; Francois Bertin

J. Vac. Sci. Technol. A 30, 040605 (2012) https://doi.org/10.1116/1.4723827

Abstract

View articletitled, Characterization of geometrical factors for quantitative angle-resolved photoelectron spectroscopy

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Nanopillar ITO electrodes via argon plasma etching

Jaron G. Van Dijken; Michael J. Brett

J. Vac. Sci. Technol. A 30, 040606 (2012) https://doi.org/10.1116/1.4729592

Abstract

View articletitled, Nanopillar ITO electrodes via argon plasma etching

Supplementary Material

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Review Article

Pulsed high-density plasmas for advanced dry etching processes

Samer Banna; Ankur Agarwal; Gilles Cunge; Maxime Darnon; Erwine Pargon; Olivier Joubert

J. Vac. Sci. Technol. A 30, 040801 (2012) https://doi.org/10.1116/1.4716176

Abstract

View articletitled, Pulsed high-density plasmas for advanced dry etching processes

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Status and prospects of Al₂O₃-based surface passivation schemes for silicon solar cells

G. Dingemans; W. M. M. Kessels

J. Vac. Sci. Technol. A 30, 040802 (2012) https://doi.org/10.1116/1.4728205

Abstract

View articletitled, Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells

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Plasma Science and Technology

Dry etching characteristics of TaN absorber for extreme ultraviolet mask with Ru buffer layer

Wanjae Park; Ohyung Kwon; Ki-Woong Whang; Jeongyun Lee

J. Vac. Sci. Technol. A 30, 041301 (2012) https://doi.org/10.1116/1.4718420

Abstract

View articletitled, Dry etching characteristics of TaN absorber for extreme ultraviolet mask with Ru buffer layer

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Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction

Francisco J. Jimenez; Steven K. Dew

J. Vac. Sci. Technol. A 30, 041302 (2012) https://doi.org/10.1116/1.4712534

Abstract

View articletitled, Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction

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Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. I. Ar/O₂ and He/H₂ plasmas

Juline Shoeb; Ming Mei Wang; Mark J. Kushner

J. Vac. Sci. Technol. A 30, 041303 (2012) https://doi.org/10.1116/1.4718444

Abstract

View articletitled, Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. I. Ar/O2 and He/H2 plasmas

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Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. II. Water uptake and change in dielectric constant

Juline Shoeb; Mark J. Kushner

J. Vac. Sci. Technol. A 30, 041304 (2012) https://doi.org/10.1116/1.4718447

Abstract

View articletitled, Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. II. Water uptake and change in dielectric constant

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Role of surface temperature in fluorocarbon plasma-surface interactions

Caleb T. Nelson; Lawrence J. Overzet; Matthew J. Goeckner

J. Vac. Sci. Technol. A 30, 041305 (2012) https://doi.org/10.1116/1.4729445

Abstract

View articletitled, Role of surface temperature in fluorocarbon plasma-surface interactions

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Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions

Gregory De Temmerman; Kirill Bystrov; Jakub J. Zielinski; Martin Balden; Gabriele Matern; Cecile Arnas; Laurent Marot

J. Vac. Sci. Technol. A 30, 041306 (2012) https://doi.org/10.1116/1.4731196

Abstract

View articletitled, Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions

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Surfaces

Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy

Aloke Kanjilal; Mark Catalfano; Sivanandan S. Harilal; Ahmed Hassanein; Bryan Rice

J. Vac. Sci. Technol. A 30, 041401 (2012) https://doi.org/10.1116/1.4718426

Abstract

View articletitled, Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy

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Effect of surface contamination on electron tunneling in the high bias range

Hailang Qin; Kuan Eng Johnson Goh; Michel Bosman; Xiang Li; Kin Leong Pey; Cedric Troadec

J. Vac. Sci. Technol. A 30, 041402 (2012) https://doi.org/10.1116/1.4721640

Abstract

View articletitled, Effect of surface contamination on electron tunneling in the high bias range

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Photoemission band mapping with a tunable femtosecond source using nonequilibrium absorption resonances

Mehmet B. Yilmaz; Jerry I. Dadap; Kevin R. Knox; Nader Zaki; Zhaofeng Hao; Peter D. Johnson; Richard M. Osgood, Jr.

J. Vac. Sci. Technol. A 30, 041403 (2012) https://doi.org/10.1116/1.4725477

Abstract

View articletitled, Photoemission band mapping with a tunable femtosecond source using nonequilibrium absorption resonances

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In situ laser processing in a scanning electron microscope

Nicholas A. Roberts; Gregory A. Magel; Cheryl D. Hartfield; Thomas M. Moore; Jason D. Fowlkes; Philip D. Rack

J. Vac. Sci. Technol. A 30, 041404 (2012) https://doi.org/10.1116/1.4731254

Abstract

View articletitled, In situ laser processing in a scanning electron microscope

Supplementary Material

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Thin Films

Atomic layer deposited iridium oxide thin film as microelectrode coating in stem cell applications

Tomi Ryynänen; Laura Ylä-Outinen; Susanna Narkilahti; Jarno M. A. Tanskanen; Jari Hyttinen; Jani Hämäläinen; Markku Leskelä; Jukka Lekkala

J. Vac. Sci. Technol. A 30, 041501 (2012) https://doi.org/10.1116/1.4709447

Abstract

View articletitled, Atomic layer deposited iridium oxide thin film as microelectrode coating in stem cell applications

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Characterization studies of aluminum oxide barrier coatings on polymeric substrates

Carolin F. Struller; Peter J. Kelly; Nick J. Copeland; Christopher M. Liauw

J. Vac. Sci. Technol. A 30, 041502 (2012) https://doi.org/10.1116/1.4709451

Abstract

View articletitled, Characterization studies of aluminum oxide barrier coatings on polymeric substrates

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Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition

Gianfranco Aresta; Jurgen Palmans; Mauritius C. M. van de Sanden; Mariadriana Creatore

J. Vac. Sci. Technol. A 30, 041503 (2012) https://doi.org/10.1116/1.4711762

Abstract

View articletitled, Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition

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In/ITO whisker and optoelectronic properties of ITO films deposited by ion beam sputtering

Jung-Hsiung Shen; Sung-Wei Yeh; Lay Gaik Teoh

J. Vac. Sci. Technol. A 30, 041504 (2012) https://doi.org/10.1116/1.4716468

Abstract

View articletitled, In/ITO whisker and optoelectronic properties of ITO films deposited by ion beam sputtering

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Laboratory investigations of irradiated acetonitrile-containing ices on an interstellar dust analog

Ali G. M. Abdulgalil; Demian Marchione; Alexander Rosu-Finsen; Mark P. Collings; Martin. R. S. McCoustra

J. Vac. Sci. Technol. A 30, 041505 (2012) https://doi.org/10.1116/1.4716463

Abstract

View articletitled, Laboratory investigations of irradiated acetonitrile-containing ices on an interstellar dust analog

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Cross characterization of ultrathin interlayers in HfO₂ high-k stacks by angle resolved x-ray photoelectron spectroscopy, medium energy ion scattering, and grazing incidence extreme ultraviolet reflectometry

Matus Banyay; Larissa Juschkin; Eric Bersch; Daniel Franca; Michael Liehr; Alain Diebold

J. Vac. Sci. Technol. A 30, 041506 (2012) https://doi.org/10.1116/1.4718433

Abstract

View articletitled, Cross characterization of ultrathin interlayers in HfO2 high-k stacks by angle resolved x-ray photoelectron spectroscopy, medium energy ion scattering, and grazing incidence extreme ultraviolet reflectometry

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Influence of gamma irradiation on the C-V characteristics of the Al/SiN_x/Si MIS capacitors

Evrin Tugay; Ercan Yilmaz; Rasit Turan

J. Vac. Sci. Technol. A 30, 041507 (2012) https://doi.org/10.1116/1.4720351

Abstract

View articletitled, Influence of gamma irradiation on the C-V characteristics of the Al/SiNx/Si MIS capacitors

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Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

Guizhi Wu; Shengli Ma; Kewei Xu; Vincent Ji; Paul K. Chu

J. Vac. Sci. Technol. A 30, 041508 (2012) https://doi.org/10.1116/1.4721376

Abstract

View articletitled, Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

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Cooling effect of nanoscale Bi₂Te₃/Sb₂Te₃ multilayered thermoelectric thin films

Mardecial Hines; Joshua Lenhardt; Ming Lu; Li Jiang; Zhigang Xiao

J. Vac. Sci. Technol. A 30, 041509 (2012) https://doi.org/10.1116/1.4725483

Abstract

View articletitled, Cooling effect of nanoscale Bi2Te3/Sb2Te3 multilayered thermoelectric thin films

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Compositional depth profiling of TaCN thin films

Christoph Adelmann; Thierry Conard; Alexis Franquet; Bert Brijs; Frans Munnik; Simon Burgess; Thomas Witters; Johan Meersschaut; Jorge A. Kittl; Wilfried Vandervorst; Sven Van Elshocht

J. Vac. Sci. Technol. A 30, 041510 (2012) https://doi.org/10.1116/1.4726261

Abstract

View articletitled, Compositional depth profiling of TaCN thin films

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Extensive Raman spectroscopic investigation of ultrathin Co_1−xNi_xSi₂ films grown on Si(100)

Yinghua Piao; Zhiwei Zhu; Xindong Gao; Aliaksandra Karabko; Cheng Hu; Zhijun Qiu; Jun Luo; Zhi-Bin Zhang; Shi-Li Zhang; Dongping Wu

J. Vac. Sci. Technol. A 30, 041511 (2012) https://doi.org/10.1116/1.4726295

Abstract

View articletitled, Extensive Raman spectroscopic investigation of ultrathin Co1−xNixSi2 films grown on Si(100)

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Microstructure, phase transition, and interfacial chemistry of Gd₂O₃/Si(111) grown by electron-beam physical vapor deposition

Xiaojun Weng; Daniel A. Grave; Zachary R. Hughes; Douglas E. Wolfe; Joshua A. Robinson

J. Vac. Sci. Technol. A 30, 041512 (2012) https://doi.org/10.1116/1.4726266

Abstract

View articletitled, Microstructure, phase transition, and interfacial chemistry of Gd2O3/Si(111) grown by electron-beam physical vapor deposition

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Indium and impurity incorporation in InGaN films on polar, nonpolar, and semipolar GaN orientations grown by ammonia molecular beam epitaxy

David A. Browne; Erin C. Young; Jordan R. Lang; Christophe A. Hurni; James S. Speck

J. Vac. Sci. Technol. A 30, 041513 (2012) https://doi.org/10.1116/1.4727967

Abstract

View articletitled, Indium and impurity incorporation in InGaN films on polar, nonpolar, and semipolar GaN orientations grown by ammonia molecular beam epitaxy

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Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)

Sebastian Rauch; Klaus-Jochen Eichhorn; Manfred Stamm; Petra Uhlmann

J. Vac. Sci. Technol. A 30, 041514 (2012) https://doi.org/10.1116/1.4727737

Abstract

View articletitled, Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)

Supplementary Material

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Permeability and corrosion in ZrO₂/Al₂O₃ nanolaminate and Al₂O₃ thin films grown by atomic layer deposition on polymers

Peter F. Carcia; Robert S. McLean; Zhigang G. Li; Michael H. Reilly; Will J. Marshall

J. Vac. Sci. Technol. A 30, 041515 (2012) https://doi.org/10.1116/1.4729447

Abstract

View articletitled, Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers

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Magnetron-sputter epitaxy of β-FeSi₂(220)/Si(111) and β-FeSi₂(431)/Si(001) thin films at elevated temperatures

Hongfei Liu; Chengcheh Tan; Dongzhi Chi

J. Vac. Sci. Technol. A 30, 041516 (2012) https://doi.org/10.1116/1.4731200

Abstract

View articletitled, Magnetron-sputter epitaxy of β-FeSi2(220)/Si(111) and β-FeSi2(431)/Si(001) thin films at elevated temperatures

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Vacuum Science and Technology

In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to a hydrogen atom beam

Sabina Markelj; Primož Pelicon; Iztok Čadež; Thomas Schwarz-Selinger; Wolfgang Jacob

J. Vac. Sci. Technol. A 30, 041601 (2012) https://doi.org/10.1116/1.4723637

Abstract

View articletitled, In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to a hydrogen atom beam

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Energy Frontiers

Tin dioxide as an alternative window layer for improving the damp-heat stability of copper indium gallium diselenide solar cells

B. Selin Tosun; Rebekah K. Feist; Stephen A. Campbell; Eray S. Aydil

J. Vac. Sci. Technol. A 30, 04D101 (2012) https://doi.org/10.1116/1.3692225

Abstract

View articletitled, Tin dioxide as an alternative window layer for improving the damp-heat stability of copper indium gallium diselenide solar cells

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Magnetron-sputter deposition of Fe₃S₄ thin films and their conversion into pyrite (FeS₂) by thermal sulfurization for photovoltaic applications

Hongfei Liu; Dongzhi Chi

J. Vac. Sci. Technol. A 30, 04D102 (2012) https://doi.org/10.1116/1.3699022

Abstract

View articletitled, Magnetron-sputter deposition of Fe3S4 thin films and their conversion into pyrite (FeS2) by thermal sulfurization for photovoltaic applications

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Effect of inserting a thin buffer layer on the efficiency in n-ZnO/p-Cu₂O heterojunction solar cells

Yuki Nishi; Toshihiro Miyata; Tadatsugu Minami

J. Vac. Sci. Technol. A 30, 04D103 (2012) https://doi.org/10.1116/1.3698596

Abstract

View articletitled, Effect of inserting a thin buffer layer on the efficiency in n-ZnO/p-Cu2O heterojunction solar cells

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Solar cell with built-in charge: Experimental studies of diode model parameters

Kimberly A. Sablon; John W. Little; Andrei Sergeev; Nizami Vagidov; Vladimir Mitin

J. Vac. Sci. Technol. A 30, 04D104 (2012) https://doi.org/10.1116/1.3703607

Abstract

View articletitled, Solar cell with built-in charge: Experimental studies of diode model parameters

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Electrochemical properties of sputter-deposited MoO₃ films in lithium microbatteries

C. V. Ramana; V. V. Atuchin; H. Groult; C. M. Julien

J. Vac. Sci. Technol. A 30, 04D105 (2012) https://doi.org/10.1116/1.3701763

Abstract

View articletitled, Electrochemical properties of sputter-deposited MoO3 films in lithium microbatteries

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Chemical and structural study of electrically passivating Al₂O₃/Si interfaces prepared by atomic layer deposition

Volker Naumann; Martin Otto; Ralf B. Wehrspohn; Christian Hagendorf

J. Vac. Sci. Technol. A 30, 04D106 (2012) https://doi.org/10.1116/1.4704601

Abstract

View articletitled, Chemical and structural study of electrically passivating Al2O3/Si interfaces prepared by atomic layer deposition

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Investigating the effects of proton exchange membrane fuel cell conditions on carbon supported platinum electrocatalyst composition and performance

Anant Patel; Kateryna Artyushkova; Plamen Atanassov; Vesna Colbow; Monica Dutta; David Harvey; Silvia Wessel

J. Vac. Sci. Technol. A 30, 04D107 (2012) https://doi.org/10.1116/1.4707153

Abstract

View articletitled, Investigating the effects of proton exchange membrane fuel cell conditions on carbon supported platinum electrocatalyst composition and performance

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Amorphous and nanocrystalline silicon thin film photovoltaic technology on flexible substrates

Baojie Yan; Jeffrey Yang; Subhendu Guha

J. Vac. Sci. Technol. A 30, 04D108 (2012) https://doi.org/10.1116/1.4707154

Abstract

View articletitled, Amorphous and nanocrystalline silicon thin film photovoltaic technology on flexible substrates

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Photoresponse of PbS nanoparticles–quaterthiophene films prepared by gaseous deposition as probed by XPS

Michael W. Majeski; F. Douglas Pleticha; Igor L. Bolotin; Luke Hanley; Eda Yilmaz; Sefik Suzer

J. Vac. Sci. Technol. A 30, 04D109 (2012) https://doi.org/10.1116/1.4709386

Abstract

View articletitled, Photoresponse of PbS nanoparticles–quaterthiophene films prepared by gaseous deposition as probed by XPS

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Charge transport and relaxation in hydrogenated barium titanate films and their potential for integrated supercapacitors

Fadhel El Kamel; Patrice Gonon

J. Vac. Sci. Technol. A 30, 04D110 (2012) https://doi.org/10.1116/1.4714356

Abstract

View articletitled, Charge transport and relaxation in hydrogenated barium titanate films and their potential for integrated supercapacitors

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Correlations of Cu(In, Ga)Se₂ imaging with device performance, defects, and microstructural properties

Steve Johnston; Thomas Unold; Ingrid Repins; Ana Kanevce; Katherine Zaunbrecher; Fei Yan; Jian V. Li; Patricia Dippo; Rajalakshmi Sundaramoorthy; Kim M. Jones; Bobby To

J. Vac. Sci. Technol. A 30, 04D111 (2012) https://doi.org/10.1116/1.4714358

Abstract

View articletitled, Correlations of Cu(In, Ga)Se2 imaging with device performance, defects, and microstructural properties

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Variation in band offsets at ZnO/Sn:In₂O₃ heterojunctions measured by x-ray photoelectron spectroscopy

Tiffany C. Kaspar; Tim C. Droubay

J. Vac. Sci. Technol. A 30, 04D112 (2012) https://doi.org/10.1116/1.4719541

Abstract

View articletitled, Variation in band offsets at ZnO/Sn:In2O3 heterojunctions measured by x-ray photoelectron spectroscopy

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Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD

Sung-Suk Wi; Yun-Gi Kim; Ho-Jun Lee; Daeil Kim; Doosup Hwang; Woo Sok Chang

J. Vac. Sci. Technol. A 30, 04D113 (2012) https://doi.org/10.1116/1.4721287

Abstract

View articletitled, Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD

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Electronic effects of Cd on the formation of the CdS/CuInS₂ heterojunction

Benjamin Johnson; Jo Klaer; Antje Vollmer; Iver Lauermann

J. Vac. Sci. Technol. A 30, 04D114 (2012) https://doi.org/10.1116/1.4721639

Abstract

View articletitled, Electronic effects of Cd on the formation of the CdS/CuInS2 heterojunction

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Growth mechanism and surface atomic structure of AgInSe₂

Pamela Peña Martin; Angus A. Rockett; Joseph Lyding

J. Vac. Sci. Technol. A 30, 04D115 (2012) https://doi.org/10.1116/1.4728160

Abstract

View articletitled, Growth mechanism and surface atomic structure of AgInSe2

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Photoreflectance characteristics of chemical-bath-deposited-CdS layer in Cu(In,Ga)Se₂ thin-film solar cells

Yong-Duck Chung; Dae-Hyung Cho; Hae-Won Choi; Soo-Jeong Park; Ju-Hee Kim; Byung-Jun Ahn; Jung-Hoon Song; Kyu-Seok Lee; Jeha Kim

J. Vac. Sci. Technol. A 30, 04D116 (2012) https://doi.org/10.1116/1.4728980

Abstract

View articletitled, Photoreflectance characteristics of chemical-bath-deposited-CdS layer in Cu(In,Ga)Se2 thin-film solar cells

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