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Issues
July 2012
ISSN 0734-2101
EISSN 1520-8559
Letters
Optimizing charge neutralization for a magnetic sector SIMS instrument in negative mode
J. Vac. Sci. Technol. A 30, 040601 (2012)
https://doi.org/10.1116/1.4719960
Selective chemical etch of gallium nitride by phosphoric acid
Chongmin Lee; Jennifer K. Hite; Michael A. Mastro; Jaime A. Freitas, Jr.; Charles R. Eddy, Jr.; Hong-Yeol Kim; Jihyun Kim
J. Vac. Sci. Technol. A 30, 040602 (2012)
https://doi.org/10.1116/1.4719528
Effect of p-type doping on the oxidation of H–Si(111) studied by second-harmonic generation
J. Vac. Sci. Technol. A 30, 040603 (2012)
https://doi.org/10.1116/1.4721329
Evaporation-assisted high-power impulse magnetron sputtering: The deposition of tungsten oxide as a case study
J. Vac. Sci. Technol. A 30, 040604 (2012)
https://doi.org/10.1116/1.4722728
Nanopillar ITO electrodes via argon plasma etching
J. Vac. Sci. Technol. A 30, 040606 (2012)
https://doi.org/10.1116/1.4729592
Review Article
Pulsed high-density plasmas for advanced dry etching processes
J. Vac. Sci. Technol. A 30, 040801 (2012)
https://doi.org/10.1116/1.4716176
Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
J. Vac. Sci. Technol. A 30, 040802 (2012)
https://doi.org/10.1116/1.4728205
Plasma Science and Technology
Dry etching characteristics of TaN absorber for extreme ultraviolet mask with Ru buffer layer
J. Vac. Sci. Technol. A 30, 041301 (2012)
https://doi.org/10.1116/1.4718420
Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction
J. Vac. Sci. Technol. A 30, 041302 (2012)
https://doi.org/10.1116/1.4712534
Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. I. Ar/O2 and He/H2 plasmas
J. Vac. Sci. Technol. A 30, 041303 (2012)
https://doi.org/10.1116/1.4718444
Damage by radicals and photons during plasma cleaning of porous low-k SiOCH. II. Water uptake and change in dielectric constant
J. Vac. Sci. Technol. A 30, 041304 (2012)
https://doi.org/10.1116/1.4718447
Role of surface temperature in fluorocarbon plasma-surface interactions
J. Vac. Sci. Technol. A 30, 041305 (2012)
https://doi.org/10.1116/1.4729445
Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions
Gregory De Temmerman; Kirill Bystrov; Jakub J. Zielinski; Martin Balden; Gabriele Matern; Cecile Arnas; Laurent Marot
J. Vac. Sci. Technol. A 30, 041306 (2012)
https://doi.org/10.1116/1.4731196
Surfaces
Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy
J. Vac. Sci. Technol. A 30, 041401 (2012)
https://doi.org/10.1116/1.4718426
Effect of surface contamination on electron tunneling in the high bias range
J. Vac. Sci. Technol. A 30, 041402 (2012)
https://doi.org/10.1116/1.4721640
In situ laser processing in a scanning electron microscope
Nicholas A. Roberts; Gregory A. Magel; Cheryl D. Hartfield; Thomas M. Moore; Jason D. Fowlkes; Philip D. Rack
J. Vac. Sci. Technol. A 30, 041404 (2012)
https://doi.org/10.1116/1.4731254
Thin Films
Atomic layer deposited iridium oxide thin film as microelectrode coating in stem cell applications
Tomi Ryynänen; Laura Ylä-Outinen; Susanna Narkilahti; Jarno M. A. Tanskanen; Jari Hyttinen; Jani Hämäläinen; Markku Leskelä; Jukka Lekkala
J. Vac. Sci. Technol. A 30, 041501 (2012)
https://doi.org/10.1116/1.4709447
Characterization studies of aluminum oxide barrier coatings on polymeric substrates
J. Vac. Sci. Technol. A 30, 041502 (2012)
https://doi.org/10.1116/1.4709451
Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition
J. Vac. Sci. Technol. A 30, 041503 (2012)
https://doi.org/10.1116/1.4711762
In/ITO whisker and optoelectronic properties of ITO films deposited by ion beam sputtering
J. Vac. Sci. Technol. A 30, 041504 (2012)
https://doi.org/10.1116/1.4716468
Influence of gamma irradiation on the C-V characteristics of the Al/SiNx/Si MIS capacitors
J. Vac. Sci. Technol. A 30, 041507 (2012)
https://doi.org/10.1116/1.4720351
Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism
J. Vac. Sci. Technol. A 30, 041508 (2012)
https://doi.org/10.1116/1.4721376
Cooling effect of nanoscale Bi2Te3/Sb2Te3 multilayered thermoelectric thin films
J. Vac. Sci. Technol. A 30, 041509 (2012)
https://doi.org/10.1116/1.4725483
Compositional depth profiling of TaCN thin films
Christoph Adelmann; Thierry Conard; Alexis Franquet; Bert Brijs; Frans Munnik; Simon Burgess; Thomas Witters; Johan Meersschaut; Jorge A. Kittl; Wilfried Vandervorst; Sven Van Elshocht
J. Vac. Sci. Technol. A 30, 041510 (2012)
https://doi.org/10.1116/1.4726261
Extensive Raman spectroscopic investigation of ultrathin Co1−xNixSi2 films grown on Si(100)
Yinghua Piao; Zhiwei Zhu; Xindong Gao; Aliaksandra Karabko; Cheng Hu; Zhijun Qiu; Jun Luo; Zhi-Bin Zhang; Shi-Li Zhang; Dongping Wu
J. Vac. Sci. Technol. A 30, 041511 (2012)
https://doi.org/10.1116/1.4726295
Microstructure, phase transition, and interfacial chemistry of Gd2O3/Si(111) grown by electron-beam physical vapor deposition
J. Vac. Sci. Technol. A 30, 041512 (2012)
https://doi.org/10.1116/1.4726266
Indium and impurity incorporation in InGaN films on polar, nonpolar, and semipolar GaN orientations grown by ammonia molecular beam epitaxy
J. Vac. Sci. Technol. A 30, 041513 (2012)
https://doi.org/10.1116/1.4727967
Spectroscopic ellipsometry of superparamagnetic nanoparticles in thin films of poly(N-isopropylacrylamide)
J. Vac. Sci. Technol. A 30, 041514 (2012)
https://doi.org/10.1116/1.4727737
Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers
J. Vac. Sci. Technol. A 30, 041515 (2012)
https://doi.org/10.1116/1.4729447
Magnetron-sputter epitaxy of β-FeSi2(220)/Si(111) and β-FeSi2(431)/Si(001) thin films at elevated temperatures
J. Vac. Sci. Technol. A 30, 041516 (2012)
https://doi.org/10.1116/1.4731200
Vacuum Science and Technology
In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to a hydrogen atom beam
J. Vac. Sci. Technol. A 30, 041601 (2012)
https://doi.org/10.1116/1.4723637
Energy Frontiers
Tin dioxide as an alternative window layer for improving the damp-heat stability of copper indium gallium diselenide solar cells
J. Vac. Sci. Technol. A 30, 04D101 (2012)
https://doi.org/10.1116/1.3692225
Effect of inserting a thin buffer layer on the efficiency in n-ZnO/p-Cu2O heterojunction solar cells
J. Vac. Sci. Technol. A 30, 04D103 (2012)
https://doi.org/10.1116/1.3698596
Solar cell with built-in charge: Experimental studies of diode model parameters
J. Vac. Sci. Technol. A 30, 04D104 (2012)
https://doi.org/10.1116/1.3703607
Electrochemical properties of sputter-deposited MoO3 films in lithium microbatteries
J. Vac. Sci. Technol. A 30, 04D105 (2012)
https://doi.org/10.1116/1.3701763
Chemical and structural study of electrically passivating Al2O3/Si interfaces prepared by atomic layer deposition
J. Vac. Sci. Technol. A 30, 04D106 (2012)
https://doi.org/10.1116/1.4704601
Investigating the effects of proton exchange membrane fuel cell conditions on carbon supported platinum electrocatalyst composition and performance
Anant Patel; Kateryna Artyushkova; Plamen Atanassov; Vesna Colbow; Monica Dutta; David Harvey; Silvia Wessel
J. Vac. Sci. Technol. A 30, 04D107 (2012)
https://doi.org/10.1116/1.4707153
Amorphous and nanocrystalline silicon thin film photovoltaic technology on flexible substrates
J. Vac. Sci. Technol. A 30, 04D108 (2012)
https://doi.org/10.1116/1.4707154
Photoresponse of PbS nanoparticles–quaterthiophene films prepared by gaseous deposition as probed by XPS
J. Vac. Sci. Technol. A 30, 04D109 (2012)
https://doi.org/10.1116/1.4709386
Charge transport and relaxation in hydrogenated barium titanate films and their potential for integrated supercapacitors
J. Vac. Sci. Technol. A 30, 04D110 (2012)
https://doi.org/10.1116/1.4714356
Correlations of Cu(In, Ga)Se2 imaging with device performance, defects, and microstructural properties
Steve Johnston; Thomas Unold; Ingrid Repins; Ana Kanevce; Katherine Zaunbrecher; Fei Yan; Jian V. Li; Patricia Dippo; Rajalakshmi Sundaramoorthy; Kim M. Jones; Bobby To
J. Vac. Sci. Technol. A 30, 04D111 (2012)
https://doi.org/10.1116/1.4714358
Variation in band offsets at ZnO/Sn:In2O3 heterojunctions measured by x-ray photoelectron spectroscopy
J. Vac. Sci. Technol. A 30, 04D112 (2012)
https://doi.org/10.1116/1.4719541
Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD
J. Vac. Sci. Technol. A 30, 04D113 (2012)
https://doi.org/10.1116/1.4721287
Electronic effects of Cd on the formation of the CdS/CuInS2 heterojunction
J. Vac. Sci. Technol. A 30, 04D114 (2012)
https://doi.org/10.1116/1.4721639
Growth mechanism and surface atomic structure of AgInSe2
J. Vac. Sci. Technol. A 30, 04D115 (2012)
https://doi.org/10.1116/1.4728160
Photoreflectance characteristics of chemical-bath-deposited-CdS layer in Cu(In,Ga)Se2 thin-film solar cells
Yong-Duck Chung; Dae-Hyung Cho; Hae-Won Choi; Soo-Jeong Park; Ju-Hee Kim; Byung-Jun Ahn; Jung-Hoon Song; Kyu-Seok Lee; Jeha Kim
J. Vac. Sci. Technol. A 30, 04D116 (2012)
https://doi.org/10.1116/1.4728980