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J. Vac. Sci. Technol. A 18, 2045–2052 (2000) https://doi.org/10.1116/1.1285990
J. Vac. Sci. Technol. A 18, 2053–2061 (2000) https://doi.org/10.1116/1.1286072
J. Vac. Sci. Technol. A 18, 2062–2066 (2000) https://doi.org/10.1116/1.1286548
J. Vac. Sci. Technol. A 18, 2067–2079 (2000) https://doi.org/10.1116/1.1286025
J. Vac. Sci. Technol. A 18, 2080–2084 (2000) https://doi.org/10.1116/1.1286026
J. Vac. Sci. Technol. A 18, 2085–2089 (2000) https://doi.org/10.1116/1.1289538
J. Vac. Sci. Technol. A 18, 2090–2097 (2000) https://doi.org/10.1116/1.1288194
J. Vac. Sci. Technol. A 18, 2098–2101 (2000) https://doi.org/10.1116/1.1287444
J. Vac. Sci. Technol. A 18, 2102–2107 (2000) https://doi.org/10.1116/1.1287442
J. Vac. Sci. Technol. A 18, 2108–2115 (2000) https://doi.org/10.1116/1.1289537
J. Vac. Sci. Technol. A 18, 2116–2121 (2000) https://doi.org/10.1116/1.1286022
J. Vac. Sci. Technol. A 18, 2122–2129 (2000) https://doi.org/10.1116/1.1286396
J. Vac. Sci. Technol. A 18, 2130–2136 (2000) https://doi.org/10.1116/1.1285997
J. Vac. Sci. Technol. A 18, 2137–2142 (2000) https://doi.org/10.1116/1.1286360
J. Vac. Sci. Technol. A 18, 2143–2148 (2000) https://doi.org/10.1116/1.1286141
J. Vac. Sci. Technol. A 18, 2149–2152 (2000) https://doi.org/10.1116/1.1286391
J. Vac. Sci. Technol. A 18, 2153–2163 (2000) https://doi.org/10.1116/1.1289541
J. Vac. Sci. Technol. A 18, 2164–2168 (2000) https://doi.org/10.1116/1.1285996
J. Vac. Sci. Technol. A 18, 2169–2174 (2000) https://doi.org/10.1116/1.1286363
J. Vac. Sci. Technol. A 18, 2175–2184 (2000) https://doi.org/10.1116/1.1286361
J. Vac. Sci. Technol. A 18, 2185–2197 (2000) https://doi.org/10.1116/1.1286142
J. Vac. Sci. Technol. A 18, 2198–2206 (2000) https://doi.org/10.1116/1.1288193
J. Vac. Sci. Technol. A 18, 2207–2212 (2000) https://doi.org/10.1116/1.1289542
J. Vac. Sci. Technol. A 18, 2213–2216 (2000) https://doi.org/10.1116/1.1286362
J. Vac. Sci. Technol. A 18, 2217–2223 (2000) https://doi.org/10.1116/1.1286199
J. Vac. Sci. Technol. A 18, 2224–2229 (2000) https://doi.org/10.1116/1.1286197
J. Vac. Sci. Technol. A 18, 2230–2238 (2000) https://doi.org/10.1116/1.1289540
J. Vac. Sci. Technol. A 18, 2239–2243 (2000) https://doi.org/10.1116/1.1285934
J. Vac. Sci. Technol. A 18, 2244–2248 (2000) https://doi.org/10.1116/1.1286198
J. Vac. Sci. Technol. A 18, 2249–2253 (2000) https://doi.org/10.1116/1.1288138
J. Vac. Sci. Technol. A 18, 2254–2261 (2000) https://doi.org/10.1116/1.1285933
J. Vac. Sci. Technol. A 18, 2262–2266 (2000) https://doi.org/10.1116/1.1285994
J. Vac. Sci. Technol. A 18, 2267–2270 (2000) https://doi.org/10.1116/1.1288941
J. Vac. Sci. Technol. A 18, 2271–2276 (2000) https://doi.org/10.1116/1.1286103
J. Vac. Sci. Technol. A 18, 2277–2287 (2000) https://doi.org/10.1116/1.1285993
J. Vac. Sci. Technol. A 18, 2288–2294 (2000) https://doi.org/10.1116/1.1287721
J. Vac. Sci. Technol. A 18, 2295–2301 (2000) https://doi.org/10.1116/1.1289694
J. Vac. Sci. Technol. A 18, 2302–2311 (2000) https://doi.org/10.1116/1.1289699
J. Vac. Sci. Technol. A 18, 2312–2318 (2000) https://doi.org/10.1116/1.1288942
J. Vac. Sci. Technol. A 18, 2319–2326 (2000) https://doi.org/10.1116/1.1287149
J. Vac. Sci. Technol. A 18, 2327–2332 (2000) https://doi.org/10.1116/1.1286143
J. Vac. Sci. Technol. A 18, 2333–2338 (2000) https://doi.org/10.1116/1.1286715
J. Vac. Sci. Technol. A 18, 2339–2343 (2000) https://doi.org/10.1116/1.1286200
J. Vac. Sci. Technol. A 18, 2344–2348 (2000) https://doi.org/10.1116/1.1289696
J. Vac. Sci. Technol. A 18, 2349–2358 (2000) https://doi.org/10.1116/1.1286395
J. Vac. Sci. Technol. A 18, 2359–2362 (2000) https://doi.org/10.1116/1.1289695
J. Vac. Sci. Technol. A 18, 2363–2371 (2000) https://doi.org/10.1116/1.1285935
J. Vac. Sci. Technol. A 18, 2372–2377 (2000) https://doi.org/10.1116/1.1287153
J. Vac. Sci. Technol. A 18, 2378–2383 (2000) https://doi.org/10.1116/1.1287446
J. Vac. Sci. Technol. A 18, 2384–2388 (2000) https://doi.org/10.1116/1.1287154
J. Vac. Sci. Technol. A 18, 2389–2393 (2000) https://doi.org/10.1116/1.1286714
J. Vac. Sci. Technol. A 18, 2394–2399 (2000) https://doi.org/10.1116/1.1288137
J. Vac. Sci. Technol. A 18, 2400–2403 (2000) https://doi.org/10.1116/1.1289693
J. Vac. Sci. Technol. A 18, 2404–2411 (2000) https://doi.org/10.1116/1.1288191
J. Vac. Sci. Technol. A 18, 2412–2416 (2000) https://doi.org/10.1116/1.1288195
J. Vac. Sci. Technol. A 18, 2417–2431 (2000) https://doi.org/10.1116/1.1286073
J. Vac. Sci. Technol. A 18, 2432–2436 (2000) https://doi.org/10.1116/1.1287443
J. Vac. Sci. Technol. A 18, 2437–2440 (2000) https://doi.org/10.1116/1.1286713
J. Vac. Sci. Technol. A 18, 2441–2447 (2000) https://doi.org/10.1116/1.1289539
J. Vac. Sci. Technol. A 18, 2448–2451 (2000) https://doi.org/10.1116/1.1286023
J. Vac. Sci. Technol. A 18, 2452–2458 (2000) https://doi.org/10.1116/1.1287152
J. Vac. Sci. Technol. A 18, 2459–2465 (2000) https://doi.org/10.1116/1.1289773
J. Vac. Sci. Technol. A 18, 2466–2471 (2000) https://doi.org/10.1116/1.1289697
J. Vac. Sci. Technol. A 18, 2472–2476 (2000) https://doi.org/10.1116/1.1288197
J. Vac. Sci. Technol. A 18, 2477–2481 (2000) https://doi.org/10.1116/1.1287441
J. Vac. Sci. Technol. A 18, 2482–2485 (2000) https://doi.org/10.1116/1.1287155
J. Vac. Sci. Technol. A 18, 2486–2492 (2000) https://doi.org/10.1116/1.1285992
J. Vac. Sci. Technol. A 18, 2493–2496 (2000) https://doi.org/10.1116/1.1287151
J. Vac. Sci. Technol. A 18, 2497–2502 (2000) https://doi.org/10.1116/1.1287148
J. Vac. Sci. Technol. A 18, 2503–2506 (2000) https://doi.org/10.1116/1.1285991
J. Vac. Sci. Technol. A 18, 2507–2512 (2000) https://doi.org/10.1116/1.1286394
J. Vac. Sci. Technol. A 18, 2513–2516 (2000) https://doi.org/10.1116/1.1286390
J. Vac. Sci. Technol. A 18, 2517–2521 (2000) https://doi.org/10.1116/1.1286393
J. Vac. Sci. Technol. A 18, 2522–2526 (2000) https://doi.org/10.1116/1.1286717
J. Vac. Sci. Technol. A 18, 2527–2532 (2000) https://doi.org/10.1116/1.1287156
J. Vac. Sci. Technol. A 18, 2533–2541 (2000) https://doi.org/10.1116/1.1288196
J. Vac. Sci. Technol. A 18, 2542–2548 (2000) https://doi.org/10.1116/1.1286201
J. Vac. Sci. Technol. A 18, 2549–2562 (2000) https://doi.org/10.1116/1.1289700
J. Vac. Sci. Technol. A 18, 2563–2567 (2000) https://doi.org/10.1116/1.1287445
J. Vac. Sci. Technol. A 18, 2568–2577 (2000) https://doi.org/10.1116/1.1286024
J. Vac. Sci. Technol. A 18, 2578–2580 (2000) https://doi.org/10.1116/1.1286392
J. Vac. Sci. Technol. A 18, 2581–2585 (2000) https://doi.org/10.1116/1.1285995
J. Vac. Sci. Technol. A 18, 2586–2590 (2000) https://doi.org/10.1116/1.1286549

BRIEF REPORTS AND COMMENTS

J. Vac. Sci. Technol. A 18, 2591–2594 (2000) https://doi.org/10.1116/1.1287150
J. Vac. Sci. Technol. A 18, 2595–2596 (2000) https://doi.org/10.1116/1.1285989

ERRATA

J. Vac. Sci. Technol. A 18, 2597 (2000) https://doi.org/10.1116/1.1286102

RAPID COMMUNICATIONS

J. Vac. Sci. Technol. A 18, 2598–2602 (2000) https://doi.org/10.1116/1.1286716

SHOP NOTES

J. Vac. Sci. Technol. A 18, 2603–2605 (2000) https://doi.org/10.1116/1.1289698
J. Vac. Sci. Technol. A 18, 2606–2607 (2000) https://doi.org/10.1116/1.1289543
J. Vac. Sci. Technol. A 18, 2608–2612 (2000) https://doi.org/10.1116/1.1288192
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