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J. Vac. Sci. Technol. A 16, 913–918 (1998) https://doi.org/10.1116/1.581210
J. Vac. Sci. Technol. A 16, 919–921 (1998) https://doi.org/10.1116/1.581211
J. Vac. Sci. Technol. A 16, 922–925 (1998) https://doi.org/10.1116/1.581212
J. Vac. Sci. Technol. A 16, 926–931 (1998) https://doi.org/10.1116/1.581213
J. Vac. Sci. Technol. A 16, 932–936 (1998) https://doi.org/10.1116/1.581214
J. Vac. Sci. Technol. A 16, 937–942 (1998) https://doi.org/10.1116/1.581215
J. Vac. Sci. Technol. A 16, 943–947 (1998) https://doi.org/10.1116/1.581216
J. Vac. Sci. Technol. A 16, 948–950 (1998) https://doi.org/10.1116/1.581217
J. Vac. Sci. Technol. A 16, 951–955 (1998) https://doi.org/10.1116/1.581218
J. Vac. Sci. Technol. A 16, 956–960 (1998) https://doi.org/10.1116/1.581219
J. Vac. Sci. Technol. A 16, 961–963 (1998) https://doi.org/10.1116/1.581220
J. Vac. Sci. Technol. A 16, 964–967 (1998) https://doi.org/10.1116/1.581279
J. Vac. Sci. Technol. A 16, 968–973 (1998) https://doi.org/10.1116/1.581280
J. Vac. Sci. Technol. A 16, 974–978 (1998) https://doi.org/10.1116/1.581480
J. Vac. Sci. Technol. A 16, 979–983 (1998) https://doi.org/10.1116/1.581281
J. Vac. Sci. Technol. A 16, 984–989 (1998) https://doi.org/10.1116/1.581282
J. Vac. Sci. Technol. A 16, 990–995 (1998) https://doi.org/10.1116/1.581283
J. Vac. Sci. Technol. A 16, 996–999 (1998) https://doi.org/10.1116/1.581284
J. Vac. Sci. Technol. A 16, 1000–1005 (1998) https://doi.org/10.1116/1.581221
J. Vac. Sci. Technol. A 16, 1006–1009 (1998) https://doi.org/10.1116/1.581222
J. Vac. Sci. Technol. A 16, 1010–1013 (1998) https://doi.org/10.1116/1.581223
J. Vac. Sci. Technol. A 16, 1014–1016 (1998) https://doi.org/10.1116/1.581224
J. Vac. Sci. Technol. A 16, 1017–1022 (1998) https://doi.org/10.1116/1.581225
J. Vac. Sci. Technol. A 16, 1023–1030 (1998) https://doi.org/10.1116/1.581226
J. Vac. Sci. Technol. A 16, 1031–1036 (1998) https://doi.org/10.1116/1.581227
J. Vac. Sci. Technol. A 16, 1037–1042 (1998) https://doi.org/10.1116/1.581228
J. Vac. Sci. Technol. A 16, 1043–1046 (1998) https://doi.org/10.1116/1.581229
J. Vac. Sci. Technol. A 16, 1047–1049 (1998) https://doi.org/10.1116/1.581230
J. Vac. Sci. Technol. A 16, 1050–1054 (1998) https://doi.org/10.1116/1.581231
J. Vac. Sci. Technol. A 16, 1055–1058 (1998) https://doi.org/10.1116/1.581232
J. Vac. Sci. Technol. A 16, 1059–1065 (1998) https://doi.org/10.1116/1.581233
J. Vac. Sci. Technol. A 16, 1066–1072 (1998) https://doi.org/10.1116/1.581234
J. Vac. Sci. Technol. A 16, 1073–1077 (1998) https://doi.org/10.1116/1.581235
J. Vac. Sci. Technol. A 16, 1078–1085 (1998) https://doi.org/10.1116/1.581236
J. Vac. Sci. Technol. A 16, 1086–1090 (1998) https://doi.org/10.1116/1.581237
J. Vac. Sci. Technol. A 16, 1091–1095 (1998) https://doi.org/10.1116/1.581238
J. Vac. Sci. Technol. A 16, 1096–1102 (1998) https://doi.org/10.1116/1.581239
J. Vac. Sci. Technol. A 16, 1103–1105 (1998) https://doi.org/10.1116/1.581240
J. Vac. Sci. Technol. A 16, 1106–1111 (1998) https://doi.org/10.1116/1.581241
J. Vac. Sci. Technol. A 16, 1112–1116 (1998) https://doi.org/10.1116/1.581242
J. Vac. Sci. Technol. A 16, 1117–1121 (1998) https://doi.org/10.1116/1.581243
J. Vac. Sci. Technol. A 16, 1122–1126 (1998) https://doi.org/10.1116/1.581244
J. Vac. Sci. Technol. A 16, 1127–1130 (1998) https://doi.org/10.1116/1.581245
J. Vac. Sci. Technol. A 16, 1131–1136 (1998) https://doi.org/10.1116/1.581246
J. Vac. Sci. Technol. A 16, 1137–1138 (1998) https://doi.org/10.1116/1.581247
J. Vac. Sci. Technol. A 16, 1139–1144 (1998) https://doi.org/10.1116/1.581248
J. Vac. Sci. Technol. A 16, 1145–1150 (1998) https://doi.org/10.1116/1.581249
J. Vac. Sci. Technol. A 16, 1151–1156 (1998) https://doi.org/10.1116/1.581250
J. Vac. Sci. Technol. A 16, 1157–1162 (1998) https://doi.org/10.1116/1.581251
J. Vac. Sci. Technol. A 16, 1163–1168 (1998) https://doi.org/10.1116/1.581252
J. Vac. Sci. Technol. A 16, 1169–1171 (1998) https://doi.org/10.1116/1.581253
J. Vac. Sci. Technol. A 16, 1172–1177 (1998) https://doi.org/10.1116/1.581254
J. Vac. Sci. Technol. A 16, 1178–1182 (1998) https://doi.org/10.1116/1.581255
J. Vac. Sci. Technol. A 16, 1183–1188 (1998) https://doi.org/10.1116/1.581256
J. Vac. Sci. Technol. A 16, 1189–1195 (1998) https://doi.org/10.1116/1.581257
J. Vac. Sci. Technol. A 16, 1196–1200 (1998) https://doi.org/10.1116/1.581258
J. Vac. Sci. Technol. A 16, 1201–1206 (1998) https://doi.org/10.1116/1.581259
J. Vac. Sci. Technol. A 16, 1207–1212 (1998) https://doi.org/10.1116/1.581260
J. Vac. Sci. Technol. A 16, 1213–1217 (1998) https://doi.org/10.1116/1.581261
J. Vac. Sci. Technol. A 16, 1218–1221 (1998) https://doi.org/10.1116/1.581262
J. Vac. Sci. Technol. A 16, 1222–1226 (1998) https://doi.org/10.1116/1.581263
J. Vac. Sci. Technol. A 16, 1227–1232 (1998) https://doi.org/10.1116/1.581264
J. Vac. Sci. Technol. A 16, 1233–1238 (1998) https://doi.org/10.1116/1.581265
J. Vac. Sci. Technol. A 16, 1239–1243 (1998) https://doi.org/10.1116/1.581266
J. Vac. Sci. Technol. A 16, 1244–1246 (1998) https://doi.org/10.1116/1.581267
J. Vac. Sci. Technol. A 16, 1247–1250 (1998) https://doi.org/10.1116/1.581268
J. Vac. Sci. Technol. A 16, 1251–1257 (1998) https://doi.org/10.1116/1.581269
J. Vac. Sci. Technol. A 16, 1258–1261 (1998) https://doi.org/10.1116/1.581270
J. Vac. Sci. Technol. A 16, 1262–1267 (1998) https://doi.org/10.1116/1.581271
J. Vac. Sci. Technol. A 16, 1268–1271 (1998) https://doi.org/10.1116/1.581272
J. Vac. Sci. Technol. A 16, 1272–1276 (1998) https://doi.org/10.1116/1.581273
J. Vac. Sci. Technol. A 16, 1277–1285 (1998) https://doi.org/10.1116/1.581274
J. Vac. Sci. Technol. A 16, 1286–1292 (1998) https://doi.org/10.1116/1.581275
J. Vac. Sci. Technol. A 16, 1293–1296 (1998) https://doi.org/10.1116/1.581276
J. Vac. Sci. Technol. A 16, 1297–1302 (1998) https://doi.org/10.1116/1.581277
J. Vac. Sci. Technol. A 16, 1303–1310 (1998) https://doi.org/10.1116/1.581278
J. Vac. Sci. Technol. A 16, 1311–1315 (1998) https://doi.org/10.1116/1.581143
J. Vac. Sci. Technol. A 16, 1316–1320 (1998) https://doi.org/10.1116/1.581144
J. Vac. Sci. Technol. A 16, 1321–1326 (1998) https://doi.org/10.1116/1.581145
J. Vac. Sci. Technol. A 16, 1327–1330 (1998) https://doi.org/10.1116/1.581522
J. Vac. Sci. Technol. A 16, 1331–1335 (1998) https://doi.org/10.1116/1.581146
J. Vac. Sci. Technol. A 16, 1336–1341 (1998) https://doi.org/10.1116/1.581147
J. Vac. Sci. Technol. A 16, 1342–1347 (1998) https://doi.org/10.1116/1.581148
J. Vac. Sci. Technol. A 16, 1348–1354 (1998) https://doi.org/10.1116/1.581149
J. Vac. Sci. Technol. A 16, 1355–1358 (1998) https://doi.org/10.1116/1.581150
J. Vac. Sci. Technol. A 16, 1359–1363 (1998) https://doi.org/10.1116/1.581151
J. Vac. Sci. Technol. A 16, 1364–1367 (1998) https://doi.org/10.1116/1.581152
J. Vac. Sci. Technol. A 16, 1368–1373 (1998) https://doi.org/10.1116/1.581153
J. Vac. Sci. Technol. A 16, 1374–1379 (1998) https://doi.org/10.1116/1.581154
J. Vac. Sci. Technol. A 16, 1380–1383 (1998) https://doi.org/10.1116/1.581155
J. Vac. Sci. Technol. A 16, 1384–1387 (1998) https://doi.org/10.1116/1.581523
J. Vac. Sci. Technol. A 16, 1388–1393 (1998) https://doi.org/10.1116/1.581156
J. Vac. Sci. Technol. A 16, 1394–1401 (1998) https://doi.org/10.1116/1.581157
J. Vac. Sci. Technol. A 16, 1403–1408 (1998) https://doi.org/10.1116/1.581158
J. Vac. Sci. Technol. A 16, 1409–1413 (1998) https://doi.org/10.1116/1.581159
J. Vac. Sci. Technol. A 16, 1414–1419 (1998) https://doi.org/10.1116/1.581160
J. Vac. Sci. Technol. A 16, 1420–1424 (1998) https://doi.org/10.1116/1.581161
J. Vac. Sci. Technol. A 16, 1425–1429 (1998) https://doi.org/10.1116/1.581162
J. Vac. Sci. Technol. A 16, 1430–1434 (1998) https://doi.org/10.1116/1.581163
J. Vac. Sci. Technol. A 16, 1435–1439 (1998) https://doi.org/10.1116/1.581164
J. Vac. Sci. Technol. A 16, 1440–1443 (1998) https://doi.org/10.1116/1.581165
J. Vac. Sci. Technol. A 16, 1444–1448 (1998) https://doi.org/10.1116/1.581166
J. Vac. Sci. Technol. A 16, 1449–1453 (1998) https://doi.org/10.1116/1.581167
J. Vac. Sci. Technol. A 16, 1454–1458 (1998) https://doi.org/10.1116/1.581168
J. Vac. Sci. Technol. A 16, 1459–1463 (1998) https://doi.org/10.1116/1.581169
J. Vac. Sci. Technol. A 16, 1464–1468 (1998) https://doi.org/10.1116/1.581170
J. Vac. Sci. Technol. A 16, 1469–1472 (1998) https://doi.org/10.1116/1.581171
J. Vac. Sci. Technol. A 16, 1473–1477 (1998) https://doi.org/10.1116/1.581172
J. Vac. Sci. Technol. A 16, 1478–1482 (1998) https://doi.org/10.1116/1.581173
J. Vac. Sci. Technol. A 16, 1483–1488 (1998) https://doi.org/10.1116/1.581174
J. Vac. Sci. Technol. A 16, 1489–1496 (1998) https://doi.org/10.1116/1.581175
J. Vac. Sci. Technol. A 16, 1497–1501 (1998) https://doi.org/10.1116/1.581176
J. Vac. Sci. Technol. A 16, 1502–1508 (1998) https://doi.org/10.1116/1.581177
J. Vac. Sci. Technol. A 16, 1509–1513 (1998) https://doi.org/10.1116/1.581178
J. Vac. Sci. Technol. A 16, 1514–1518 (1998) https://doi.org/10.1116/1.581179
J. Vac. Sci. Technol. A 16, 1519–1524 (1998) https://doi.org/10.1116/1.581180
J. Vac. Sci. Technol. A 16, 1525–1528 (1998) https://doi.org/10.1116/1.581181
J. Vac. Sci. Technol. A 16, 1529–1536 (1998) https://doi.org/10.1116/1.581182
J. Vac. Sci. Technol. A 16, 1537–1541 (1998) https://doi.org/10.1116/1.581183
J. Vac. Sci. Technol. A 16, 1542–1546 (1998) https://doi.org/10.1116/1.581184
J. Vac. Sci. Technol. A 16, 1547–1551 (1998) https://doi.org/10.1116/1.581185
J. Vac. Sci. Technol. A 16, 1552–1559 (1998) https://doi.org/10.1116/1.581186
J. Vac. Sci. Technol. A 16, 1560–1565 (1998) https://doi.org/10.1116/1.581187
J. Vac. Sci. Technol. A 16, 1566–1570 (1998) https://doi.org/10.1116/1.581188
J. Vac. Sci. Technol. A 16, 1571–1576 (1998) https://doi.org/10.1116/1.581189
J. Vac. Sci. Technol. A 16, 1577–1581 (1998) https://doi.org/10.1116/1.581190
J. Vac. Sci. Technol. A 16, 1582–1587 (1998) https://doi.org/10.1116/1.581191
J. Vac. Sci. Technol. A 16, 1588–1593 (1998) https://doi.org/10.1116/1.581192
J. Vac. Sci. Technol. A 16, 1594–1599 (1998) https://doi.org/10.1116/1.581193
J. Vac. Sci. Technol. A 16, 1600–1603 (1998) https://doi.org/10.1116/1.581126
J. Vac. Sci. Technol. A 16, 1604–1608 (1998) https://doi.org/10.1116/1.581127
J. Vac. Sci. Technol. A 16, 1609–1614 (1998) https://doi.org/10.1116/1.581128
J. Vac. Sci. Technol. A 16, 1615–1620 (1998) https://doi.org/10.1116/1.581129
J. Vac. Sci. Technol. A 16, 1621–1626 (1998) https://doi.org/10.1116/1.581130
J. Vac. Sci. Technol. A 16, 1627–1630 (1998) https://doi.org/10.1116/1.581131
J. Vac. Sci. Technol. A 16, 1631–1635 (1998) https://doi.org/10.1116/1.581132
J. Vac. Sci. Technol. A 16, 1636–1640 (1998) https://doi.org/10.1116/1.581133
J. Vac. Sci. Technol. A 16, 1641–1645 (1998) https://doi.org/10.1116/1.581134
J. Vac. Sci. Technol. A 16, 1646–1649 (1998) https://doi.org/10.1116/1.581135
J. Vac. Sci. Technol. A 16, 1650–1653 (1998) https://doi.org/10.1116/1.581136
J. Vac. Sci. Technol. A 16, 1654–1657 (1998) https://doi.org/10.1116/1.581137
J. Vac. Sci. Technol. A 16, 1658–1663 (1998) https://doi.org/10.1116/1.581138
J. Vac. Sci. Technol. A 16, 1664–1669 (1998) https://doi.org/10.1116/1.581139
J. Vac. Sci. Technol. A 16, 1670–1675 (1998) https://doi.org/10.1116/1.581140
J. Vac. Sci. Technol. A 16, 1676–1679 (1998) https://doi.org/10.1116/1.581141
J. Vac. Sci. Technol. A 16, 1680–1685 (1998) https://doi.org/10.1116/1.581142
J. Vac. Sci. Technol. A 16, 1686–1691 (1998) https://doi.org/10.1116/1.581285
J. Vac. Sci. Technol. A 16, 1692–1696 (1998) https://doi.org/10.1116/1.581286
J. Vac. Sci. Technol. A 16, 1697–1701 (1998) https://doi.org/10.1116/1.581287
J. Vac. Sci. Technol. A 16, 1702–1709 (1998) https://doi.org/10.1116/1.581288
J. Vac. Sci. Technol. A 16, 1710–1715 (1998) https://doi.org/10.1116/1.581289
J. Vac. Sci. Technol. A 16, 1716–1720 (1998) https://doi.org/10.1116/1.581290
J. Vac. Sci. Technol. A 16, 1721–1729 (1998) https://doi.org/10.1116/1.581291
J. Vac. Sci. Technol. A 16, 1730–1734 (1998) https://doi.org/10.1116/1.581292
J. Vac. Sci. Technol. A 16, 1735–1740 (1998) https://doi.org/10.1116/1.581293
J. Vac. Sci. Technol. A 16, 1741–1744 (1998) https://doi.org/10.1116/1.581294
J. Vac. Sci. Technol. A 16, 1745–1749 (1998) https://doi.org/10.1116/1.581295
J. Vac. Sci. Technol. A 16, 1750–1756 (1998) https://doi.org/10.1116/1.581296
J. Vac. Sci. Technol. A 16, 1757–1761 (1998) https://doi.org/10.1116/1.581297
J. Vac. Sci. Technol. A 16, 1762–1766 (1998) https://doi.org/10.1116/1.581298
J. Vac. Sci. Technol. A 16, 1767–1771 (1998) https://doi.org/10.1116/1.581299
J. Vac. Sci. Technol. A 16, 1772–1774 (1998) https://doi.org/10.1116/1.581300
J. Vac. Sci. Technol. A 16, 1775–1778 (1998) https://doi.org/10.1116/1.581301
J. Vac. Sci. Technol. A