A correction is being made to Fig. 7. The original version of Figs. 7(b)7(d) has mislabeled the elements on the top-right corners of the subpanels. The correction serves only as a rectification of a labeling error and does not affect the conclusion of the paper.1 

FIG. 7.

(a) TEM image of sample treated with six cycles of ALE with 550 Torr formic acid exposure pressure. (b)–(e) EDS elemental mapping of carbon, oxygen, silicon, and nickel.

FIG. 7.

(a) TEM image of sample treated with six cycles of ALE with 550 Torr formic acid exposure pressure. (b)–(e) EDS elemental mapping of carbon, oxygen, silicon, and nickel.

Close modal
1.
X.
Sang
,
E.
Chen
, and
J. P.
Chang
,
J. Vac. Sci. Technol. A
38
,
042603
(
2020
).