Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8, 3954 (1990)]

Shinohara, M.; Tashiro, H.; Saio, K.; Arai, K.; Takayama, K.

doi:10.1116/1.577144

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Erratum| November 01 1991

Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8, 3954 (1990)]

M. Shinohara;

M. Shinohara

Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259‐12 Japan

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H. Tashiro;

H. Tashiro

Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259‐12 Japan

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K. Saio;

K. Saio

Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259‐12 Japan

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K. Arai;

K. Arai

Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259‐12 Japan

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K. Takayama

Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259‐12 Japan

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J. Vac. Sci. Technol. A 9, 3183 (1991)

https://doi.org/10.1116/1.577144

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Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8, 3954 (1990)]

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Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8, 3954 (1990)]

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