An ultrahigh vacuum coevaporator equipped with three sources for preparation of Y–BaF2 –Cu–O thin films is described. Evaporation rates of Y, BaF2, and Cu were controlled using a quadrupole mass spectrometer operating in a multiplexed mode. To evaluate the method depositions have been performed using different source configurations and evaporation rates. Utilizing Rutherford backscattering spectrometry absolute values of the actual evaporation rates were determined. It was observed that the mass‐spectrometer sensitivity is highest for Y, followed by BaF2 (BaF+ is the measured ion) and Cu. A partial pressure of oxygen during evaporation of Y, BaF2, and Cu affected mainly the rate of Y. It is shown that the mass spectrometer can be utilized to precisely control the film composition.
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September 1991
Research Article|
September 01 1991
Coevaporation of Y, BaF2, and Cu utilizing a quadrupole mass spectrometer as a rate measuring probe
J. Hudner;
J. Hudner
Department of Solid State Electronics, Royal Institute of Technology, P.O Box 1298, S‐164 28, Kista, Sweden
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M. Östling;
M. Östling
Department of Solid State Electronics, Royal Institute of Technology, P.O Box 1298, S‐164 28, Kista, Sweden
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H. Ohlsén;
H. Ohlsén
Swedish Institute of Microelectronics, P.O. Box 1084, S‐164 21 Kista, Sweden
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L. Stolt
L. Stolt
Swedish Institute of Microelectronics, P.O. Box 1084, S‐164 21 Kista, Sweden
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J. Vac. Sci. Technol. A 9, 2636–2641 (1991)
Article history
Received:
March 12 1991
Accepted:
April 13 1991
Citation
J. Hudner, M. Östling, H. Ohlsén, L. Stolt; Coevaporation of Y, BaF2, and Cu utilizing a quadrupole mass spectrometer as a rate measuring probe. J. Vac. Sci. Technol. A 1 September 1991; 9 (5): 2636–2641. https://doi.org/10.1116/1.577217
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