Carbon k‐edge x‐ray absorption fine structure (XAFS) is used to study the structure and bonding of chemical vapor deposition (CVD) grown diamond and diamond‐like carbon films. Diamond films grown at 875 °C on silicon using a 1% CH4 /H2 mixture have near‐edge spectra resembling type 1(a) natural diamond. The k‐edges of the diamond‐like films grown by electron cyclotron resonance CVD at 200 °C using 10−4 Torr of CH4 show a broad main peak lacking the sharp structure of graphite or diamond. Comparing the near edges of the CVD diamond film with other carbon compounds (i.e., graphite) and the CVD diamond film, the diamond‐like film shows a strong π* feature at 285 eV indicative of sp2 bonded carbon and a feature at 289 eV, the σ*(C–H) resonance indicating C–H bonds. The relatively weak extended x‐ray absorption fine structure (EXAFS) shows that the diamond‐like carbon film is highly disordered on an atomic level.
Skip Nav Destination
Article navigation
Research Article|
May 01 1991
X‐ray absorption study of diamond films grown by chemical vapor deposition
X.‐Q. Yang;
X.‐Q. Yang
Brookhaven National Laboratory, Upton, New York 11973
Search for other works by this author on:
M. W. Ruckman;
M. W. Ruckman
Brookhaven National Laboratory, Upton, New York 11973
Search for other works by this author on:
T. A. Skotheim;
T. A. Skotheim
Brookhaven National Laboratory, Upton, New York 11973
Search for other works by this author on:
M. den Boer;
M. den Boer
The City University of New York, New York, New York 10021
Search for other works by this author on:
Yu Zheng;
Yu Zheng
The City University of New York, New York, New York 10021
Search for other works by this author on:
A. R. Badzian;
A. R. Badzian
The Pennsylvania State University, University Park, Pennsylvania 16802
Search for other works by this author on:
T. Badzian;
T. Badzian
The Pennsylvania State University, University Park, Pennsylvania 16802
Search for other works by this author on:
R. Messier;
R. Messier
The Pennsylvania State University, University Park, Pennsylvania 16802
Search for other works by this author on:
A. R. Srivatsa
A. R. Srivatsa
Moltech Corporation, Stony Brook, New York 11974
Search for other works by this author on:
J. Vac. Sci. Technol. A 9, 1140–1144 (1991)
Article history
Received:
October 09 1990
Accepted:
November 26 1990
Citation
X.‐Q. Yang, M. W. Ruckman, T. A. Skotheim, M. den Boer, Yu Zheng, A. R. Badzian, T. Badzian, R. Messier, A. R. Srivatsa; X‐ray absorption study of diamond films grown by chemical vapor deposition. J. Vac. Sci. Technol. A 1 May 1991; 9 (3): 1140–1144. https://doi.org/10.1116/1.577591
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00