A micron scale Faraday cup for electron beam current measurements

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Letter| March 01 1991

P. K. Bhattacharya;

P. K. Bhattacharya

Microelectronics Center of North Carolina, Research Triangle Park, North Carolina 27709

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L. Maynard

Microelectronics Center of North Carolina, Research Triangle Park, North Carolina 27709

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J. Vac. Sci. Technol. A 9, 364–368 (1991)

https://doi.org/10.1116/1.577565

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