A refrigerator‐cooled cryopump is applied to an ultrahigh vacuum system made of aluminum alloys. This system is easy to bakeout and to achieve a pressure around 2–6×10−9 Pa. A pressure in the 10−9 Pa range is obtained without the baking process being repeated, if only dry nitrogen gas, instead of air, is introduced into the vacuum chamber. Some different regeneration procedures are also studied.
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Research Article| July 01 1990
An ultrahigh vacuum application of a refrigerator‐cooled cryopump
M. Kasuya, J. Yuyama; An ultrahigh vacuum application of a refrigerator‐cooled cryopump. J. Vac. Sci. Technol. A 1 July 1990; 8 (4): 3333–3336. https://doi.org/10.1116/1.576545
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