In this paper we report on p‐type arsenic doping of CdTe and HgTe/CdTe superlattices by photoassisted and conventional molecular‐beam epitaxy (MBE). We also report on some of the problems involved in doping and growing the HgTe/CdTe superlattice system by theoretically examining two key aspects of its growth: (i) growth of CdTe at low temperatures under Cd‐stabilized conditions, and (ii) effect of laser excitation on the growing CdTe surface. p‐Type arsenic‐doped CdTe and HgTe/CdTe superlattice epilayers were grown on (100) CdTe and CdZnTe substrates at low temperatures under cation‐stabilized conditions obtained either with excess Cd, or excess Hg fluxes. As‐grown arsenic‐doped CdTe layers had room temperature carrier concentrations in the 1014–1016 cm−3 range, and hole mobilities of about 35–65 cm2/V s. Low‐temperature photoluminescence spectra of arsenic‐doped CdTe epilayers grown by photoassisted MBE showed an emission peak at 1.51 eV, which is associated to the AsTe acceptor (arsenic occupying a Te site) with a 92 meV ionization energy. CdTe epilayers grown at low temperatures with photoassisted MBE have superior structural, optical, and electrical properties than those grown by conventional MBE. Arsenic doping of the HgTe/CdTe superlattice structure has resulted in in situ growth of p‐type modulation‐doped superlattices with enhanced mobilities. Undoped superlattices grown under the same conditions are n‐type. These results represent a significant step towards the in situ fabrication of photodiodes and other advanced devices based on HgTe/CdTe doped superlattice structures.
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March 1990
Research Article|
March 01 1990
p‐type arsenic doping of CdTe and HgTe/CdTe superlattices grown by photoassisted and conventional molecular‐beam epitaxy Available to Purchase
J. M. Arias;
J. M. Arias
Rockwell International Science Center, Thousand Oaks, California 91360
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S. H. Shin;
S. H. Shin
Rockwell International Science Center, Thousand Oaks, California 91360
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D. E. Cooper;
D. E. Cooper
Rockwell International Science Center, Thousand Oaks, California 91360
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M. Zandian;
M. Zandian
Rockwell International Science Center, Thousand Oaks, California 91360
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J. G. Pasko;
J. G. Pasko
Rockwell International Science Center, Thousand Oaks, California 91360
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E. R. Gertner;
E. R. Gertner
Rockwell International Science Center, Thousand Oaks, California 91360
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R. E. DeWames;
R. E. DeWames
Rockwell International Science Center, Thousand Oaks, California 91360
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J. Singh
J. Singh
University of Michigan, Ann Arbor, Michigan 48109
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J. M. Arias
Rockwell International Science Center, Thousand Oaks, California 91360
S. H. Shin
Rockwell International Science Center, Thousand Oaks, California 91360
D. E. Cooper
Rockwell International Science Center, Thousand Oaks, California 91360
M. Zandian
Rockwell International Science Center, Thousand Oaks, California 91360
J. G. Pasko
Rockwell International Science Center, Thousand Oaks, California 91360
E. R. Gertner
Rockwell International Science Center, Thousand Oaks, California 91360
R. E. DeWames
Rockwell International Science Center, Thousand Oaks, California 91360
J. Singh
University of Michigan, Ann Arbor, Michigan 48109
J. Vac. Sci. Technol. A 8, 1025–1033 (1990)
Article history
Received:
October 04 1989
Accepted:
November 07 1989
Citation
J. M. Arias, S. H. Shin, D. E. Cooper, M. Zandian, J. G. Pasko, E. R. Gertner, R. E. DeWames, J. Singh; p‐type arsenic doping of CdTe and HgTe/CdTe superlattices grown by photoassisted and conventional molecular‐beam epitaxy. J. Vac. Sci. Technol. A 1 March 1990; 8 (2): 1025–1033. https://doi.org/10.1116/1.577000
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