A compact UHV‐compatible sample manipulator with three rotational and three translational degrees of freedom is described. The manipulator head has less than 25 mm radius and is completely manufactured from nonmagnetic materials. With liquid nitrogen as a coolant temperatures of 100 K can be achieved.
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Research Article| January 01 1990
A compact three‐axis cryogenic ultrahigh vacuum manipulator
H. Dürr, Th. Fauster, R. Schneider; A compact three‐axis cryogenic ultrahigh vacuum manipulator. J. Vac. Sci. Technol. A 1 January 1990; 8 (1): 145–146. https://doi.org/10.1116/1.577048
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