A concise and critical review of the basic ideas of the kinematic model of surface evolution during growth and erosion is presented. Further generalization of a recent development based on the Huygens principle of wave‐front propagation is briefly discussed. Numerical analysis and consequent numerical procedures based on the generalized kinematic model are also presented. A number of simulation examples of surface evolution are given to illustrate the advantages and capabilities of the numerical method.
Topics
Wave propagation
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© 1989 American Vacuum Society.
1989
American Vacuum Society
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