An 8‐in. ConFlat■ flange assembly with both an electron beam evaporator and a Knudsen cell has been constructed to deposit intermetallic compounds containing transition and group‐III metals with specific phase composition. Initial depositions of thin films using this design have shown excellent epitaxy with the desired compound stoichiometry.

Topics
Mechanical instruments, Crystallography, Thin films, Electron beams, Stoichiometry
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© 1989 American Vacuum Society.
1989
American Vacuum Society
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